Vertical cavity surface emitting laser device with integrated photodiode

1. A vertical cavity surface emitting laser device comprising:

a substrate;

a first electrical contact;

a second electrical contact;

a third electrical contact;

a fourth electrical contact; and

an optical resonator,

wherein the optical resonator comprises:

a first distributed Bragg reflector on the substrate, the first distributed Bragg reflector being a bottom end mirror of the optical resonator;

an active layer for light emission on the first distributed Bragg reflector;

a photodiode; and

a second distributed Bragg reflector on the active layer, the second distributed Bragg reflector being a top end mirror of the optical resonator;

wherein the second distributed Bragg reflector comprises a first part, a second part, and a third part,

wherein the first part comprises at least one first pair of layers with different refractive indices,

wherein the at least one first pair of layers is of a second conductivity type,

wherein the second part comprises at least one second pair of layers with different refractive indices,

wherein the at least one second pair of layers is is of a first conductivity type different than the second conductivity type,

wherein the third part comprises at least one third pair of layers with different refractive indices,

wherein the at least one third pair of layers is of the second conductivity type,

wherein a light absorption structure of the photodiode is arranged between the second part and the third part of the second distributed Bragg reflector,

wherein the first electrical contact and the second electrical contact are arranged to provide an electrical drive current to electrically pump the optical resonator,

wherein the light absorption structure is arranged outside a current path of the electrical drive current,

wherein the third electrical contact and the fourth electrical contact are arranged to electrically contact the photodiode,

wherein the second electrical contact electrically contacts the first part of the second distributed Bragg reflector,

wherein the third electrical contact electrically contacts the second part of the second distributed Bragg reflector, and

wherein the second electrical contact and the third electrical contact are separated by a semiconductor layer structure.

2. The vertical cavity surface emitting laser device according to claim 1 , wherein laser light is emitted through the second distributed Bragg reflector.

3. The vertical cavity surface emitting laser device according to claim 1 , wherein the substrate is of the first conductivity type, and wherein the first distributed Bragg reflector is of the first conductivity type.

4. The vertical cavity surface emitting laser device according to claim 1 , wherein the first conductivity type is characterized by n-doped material and wherein the second conductivity type is characterized by p-doped material.

5. The vertical cavity surface emitting laser device according to claim 1 , wherein the semiconductor layer structure is an isolation structure arranged to electrically isolate the third electrical contact from the second electrical contact.

6. The vertical cavity surface emitting laser device according to claim 5 , wherein the isolation structure comprises at least one pair of layers, each of the pair of layers comprising a first layer with the first refractive index and a second layer with a second refractive index different than the first refractive index.

7. The vertical cavity surface emitting laser device according to claim 6 ,

wherein the isolation structure comprises several pair of layers, comprising the at least one pair of layers, which comprises the first layer and the second layer, and

wherein at least two of the first layers are of the first conductivity type and wherein at least two of the second layers are of the second conductivity type.

8. The vertical cavity surface emitting laser device according to claim 1 , wherein laser light is emitted through the first distributed Bragg reflector.

9. The vertical cavity surface emitting laser device according to claim 8 , further comprising a first current distribution layer arranged between the substrate and the first distributed Bragg reflector,

wherein the first current distribution layer is electrically connected to the first electrical contact, and

wherein the substrate comprises an undoped semiconductor material.

10. The vertical cavity surface emitting laser device according to claim 1 , wherein the first part and the second part of the second distributed Bragg reflector comprises more pair of layers of different refractive indices than the third part of the second distributed Bragg reflector.

11. The vertical cavity surface emitting laser device according to claim 1 , wherein the absorption structure comprises an intrinsic layer with a thickness of less than 100 nanometers.

12. The vertical cavity surface emitting laser device according to claim 11 , wherein the intrinsic layer is configured to be in an anti-node of a standing wave pattern in the optical resonator during operation of the vertical cavity surface emitting laser device.

13. An optical sensor comprising the vertical cavity surface emitting laser device according to claim 1 .

14. A method of fabricating a vertical cavity surface emitting laser device, the method comprising:

providing a substrate;

providing a first electrical contact;

providing a second electrical contact, wherein the first electrical contact and the second electrical contact are arranged to provide an electrical drive current to electrically pump an optical resonator of the vertical cavity surface emitting laser device;

providing a first distributed Bragg reflector on the substrate;

providing an active layer for light emission on the first distributed Bragg reflector;

providing a first part of a second distributed Bragg reflector on the active layer, wherein the first distributed Bragg reflector, the active layer and the second distributed Bragg reflector form the optical resonator, the first distributed Bragg reflector being a bottom end mirror of the optical resonator, the second distributed Bragg reflector being a top end mirror of the optical resonator, wherein the first part comprises at least one first pair of layers with different refractive indices, and wherein the at least one first pair of layers is of a second conductivity type;

providing a second part of the second distributed Bragg reflector on the first part of the second distributed Bragg reflector, wherein the second part comprises at least one second pair of layers with different refractive indices, and wherein the at least one pair of layers is of a first conductivity type different than the second conductivity type;

providing a third part of the second distributed Bragg reflector on the second part of the second distributed Bragg reflector, wherein the third part comprises at least one third pair of layers with different refractive indices, and wherein the at least one third pair of layers is of the second conductivity type;

providing a light absorption structure of a photodiode between the second part and the third part of the second distributed Bragg reflector, wherein the light absorption structure is arranged outside a current path of the electrical drive current;

providing a third electrical contact;

providing a fourth electrical contact, wherein the third electrical contact and the fourth electrical contact are arranged to electrically contact the photodiode;

electrically contacting the first part of the second distributed Bragg reflector by the second electrical contact;

electrically contacting the second part of the second distributed Bragg reflector by the third electrical contact; and

separating the second electrical contact and the third electrical contact by a semiconductor layer structure.