Configuring optical layers in imprint lithography processes
An imprint lithography method of configuring an optical layer includes imprinting first features of a first order of magnitude in size on a side of a substrate with a patterning template, while imprinting second features of a second order of magnitude in size on the side of the substrate with the patterning template, the second features being sized and arranged to define a gap between the substrate and an adjacent surface.
1. A multilayer wearable eyepiece, comprising:
a substrate; and
a first waveguide on a side of the substrate, the first waveguide comprising:
a functional pattern, wherein the functional pattern comprises first features of a first size range at first locations;
wherein the first features comprise first diffraction gratings configured to project light of a first wavelength range and to focus a virtual image at a first depth plane, wherein the first diffraction gratings comprise a first incoupling grating and form a first orthogonal pupil expander region and a first exit pupil expander region;
an auxiliary pattern surrounding the functional pattern, the auxiliary pattern comprising:
additional first features of the first size range, wherein the additional first features comprise anti-reflective features; and
second features of a second size range respectively at second locations spaced laterally apart from the first locations on the side of the substrate, the second size range being at least an order of magnitude greater in size than the first size range; and
a second waveguide attached to the first waveguide along the second features to define a gap of the second size range between the first waveguide and the second waveguide, the second waveguide comprising second diffraction gratings configured to project light of a second wavelength range and to focus the virtual image at a second depth plane, wherein the second diffraction gratings comprise a second incoupling grating and form a second orthogonal pupil expander region and a second exit pupil expander region.
2. The multilayer wearable eyepiece of claim 1 , wherein the second features comprise spacers on the side of the substrate.
3. The multilayer wearable eyepiece of claim 2 , wherein the spacers, the anti-reflective features, or both are located on a peripheral edge of the side of the substrate.
4. The multilayer wearable eyepiece of claim 2 , wherein the spacers, the anti-reflective features, or both are located on an interior region of the side of the substrate.
5. The multilayer wearable eyepiece of claim 1 , wherein the side of the substrate is a first side of the substrate, and third features of the first size range are located on a second side of the substrate.
6. The multilayer wearable eyepiece of claim 5 , wherein the third features comprise diffraction gratings or anti-reflective features located on the second side of the substrate.
7. The multilayer wearable eyepiece of claim 1 , wherein the second size range comprises a range of about 1 μm to about 50 μm in height, about 1 μm to about 100 μm in width, or both.
8. The multilayer wearable eyepiece of claim 1 , wherein the first size range comprises a range of up to about 300 nm in height.
9. The multilayer wearable eyepiece of claim 1 , wherein the second features are located on opposite lateral sides of the first features.
10. The multilayer wearable eyepiece of claim 1 , further comprising an adhesive substance atop the second features on the side of the substrate.
11. The multilayer wearable eyepiece of claim 10 , wherein the first and second waveguides are attached to each other at the adhesive substance atop the second features on the side of the substrate to form the gap between the first waveguide and the second waveguide.
12. The multilayer wearable eyepiece of claim 1 , wherein the first waveguide and the second waveguide are aligned with each other.
13. The multilayer wearable eyepiece of claim 1 , wherein the gap provides a low index region.
14. The multilayer wearable eyepiece of claim 11 , wherein the low index region comprises air with an index of refraction of 1.
15. The multilayer wearable eyepiece of claim 1 , wherein each of the second features is spaced laterally apart by at least about 5 μm to about 100 μm from each of the first features.
16. The multilayer wearable eyepiece of claim 1 , wherein the first and second waveguides are attached to each other with a seal along first and second peripheral edges of the first and second waveguides.
17. The multilayer wearable eyepiece of claim 1 , wherein at least one of the first wavelength range and the second wavelength range corresponds to red light with wavelengths in a range of about 560 nm to about 640 nm, green light with wavelengths in a range of about 490 nm to about 570 nm, or blue light with wavelengths in a range of about 390 nm to about 470 nm.
18. The multilayer wearable eyepiece of claim 1 , wherein the first depth plane and the second depth plane are the same.
19. The multilayer wearable eyepiece of claim 1 , wherein the second features are spaced laterally apart from the additional first features on the side of the substrate.
20. The multilayer wearable eyepiece of claim 19 , wherein the second features are located about 5 μm to about 100 μm from the additional first features.