IP Library Granted Patent US 11,885,986
Granted Patent B2
US 11,885,986 · App. 16/943,927 · Granted Jan 30, 2024

Plasma dispersion effect for metasurface tuning

Inventors: Aditya Jain (Minneapolis, MN); Zoran Jandric (Minneapolis, MN); Dan Mohr (St. Paul, MN); Kevin A. Gomez (Eden Prairie, MN); Krishnan Subramanian (Shakopee, MN)
Assignee: LUMINAR TECHNOLOGIES, INC.
G02B5/008G01S7/481G01S7/4814G01S7/4817G02B1/002G02B1/007G02B6/1226G02B27/0087G02F1/292G02F1/3133G02F2202/30
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Quick Facts
Patent No.
US 11,885,986
App. No.
16/943,927
Filed
Jul 30, 2020
Granted
Jan 30, 2024
Kind
B2
Art Unit
2871
USPC
359/315
Abstract

An active metasurface that provides low-loss and high-bandwidth modulation control of light includes a number of cells arranged on a substrate. A controller dynamically alters a voltage differential supplied to the electrodes of each of the cells is adapted to alter refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

Claims (23)

1. A metasurface comprising:

a number of cells arranged on a substrate, each of the cells including:

a high-index dielectric block including an interface between a positively-doped material and a negatively-doped material; and

electrodes configured to provide a voltage differential across the high-index dielectric block to flow current along a current path that passes through the high-index dielectric block, at least a portion of the current path being substantially parallel to a plane defined by the metasurface; and

a controller that dynamically alters a voltage differential supplied to the electrodes of each of the cells to alter a refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

2. The metasurface of claim 1 , wherein each of the cells has dimensions that provide a Mie resonance mode to enhance an electric field component of light of a target wavelength.

3. The metasurface of claim 1 , wherein each of the cells is doped to have a positive charge density that increases in a first direction of the cell and a negative charge density that increases in a second opposite direction of the cell.

4. The metasurface of claim 3 , wherein the positive charge density and the negative charge density vary in a direction that is generally parallel to the plane defined by the metasurface.

5. The metasurface of claim 1 , wherein the high-index dielectric block is a silicon resonator.

6. The metasurface of claim 1 , wherein the cell is reverse biased such that the controller applies a positive voltage to a first electrode in contact with a negatively-doped region and a negative voltage to a second electrode that is in contact with a positively-doped region.

7. A method of controlling a metasurface to steer light, the method comprising:

receiving light at each of a number of cells arranged on a substrate, each of the cells including at least:

a high-index dielectric block including an interface between a positively-doped material and a negatively-doped material; and

electrodes configured to supply a voltage differential to the cell to flow current along a current path that passes through the high-index dielectric block, at least a portion of the current path being substantially parallel to a plane defined by the metasurface; and

dynamically altering a voltage differential supplied to the electrodes of each of the cells to alter a refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

8. The method of claim 7 , wherein each of the cells has dimensions that provide a Mie resonance mode to enhance an electric field component of light of a target wavelength.

9. The method of claim 7 , wherein each of the cells is doped to have a positive charge density that increases in a first direction of the cell and a negative charge density that increases in a second opposite direction of the cell.

10. The method of claim 9 , wherein the positive charge density and the negative charge density vary in a direction that is generally parallel to the plane defined by the metasurface.

11. The method of claim 9 , wherein the high-index dielectric block is a silicon resonator.

12. A system comprising:

at least one cell including a high-index dielectric block including a junction between a positively-doped material and a negatively-doped material;

electrodes arranged on opposite sides of the at least one cell and each being separated from a phase-shifting portion of the high-index dielectric block;

circuitry configured to supply a voltage differential to the electrodes and to dynamically alter the voltage differential to control a refractive index of the high-index dielectric block and thereby controllably steer light exiting the cell.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Feb 6, 2026
From: GLAS TRUST COMPANY LLC
To: LUMINAR TECHNOLOGIES, INC.
Reel/Frame 074733/0220 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 6, 2026
From: LUMINAR TECHNOLOGIES, INC.
To: MICROVISION, INC.
Reel/Frame 075282/0141 →
PARTIAL RELEASE OF SECURITY INTEREST IN PATENTS AND TRADEMARKS Recorded Feb 4, 2026
From: GLAS TRUST COMPANY LLC
To: LUMINAR TECHNOLOGIES, INC.; LUMINAR LLC
Reel/Frame 074944/0658 →
PARTIAL RELEASE OF SECURITY INTEREST IN PATENTS AND TRADEMARKS Recorded Feb 4, 2026
From: GLAS TRUST COMPANY LLC
To: LUMINAR TECHNOLOGIES, INC.; LUMINAR LLC
Reel/Frame 074944/0606 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE NAME OF THE FIRST CONVEYING PARTY PREVIOUSLY RECORDED AT REEL: 69312 FRAME: 713. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Nov 27, 2024
From: LUMINAR TECHNOLOGIES, INC; LUMINAR , LLC; FREEDOM PHOTONICS LLC
To: GLAS TRUST COMPANY LLC
Reel/Frame 069990/0772 →
SECURITY INTEREST Recorded Nov 6, 2024
From: LIMINAR TECHNOLOGIES, INC; LUMINAR, LLC; FREEDOM PHOTONICS LLC
To: GLAS TRUST COMPANY LLC
Reel/Frame 069312/0713 →
SECURITY INTEREST Recorded Nov 6, 2024
From: LUMINAR TECHNOLOGIES, INC; LUMINAR , LLC; FREEDOM PHOTONICS LLC
To: GLAS TRUST COMPANY LLC
Reel/Frame 069312/0669 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 17, 2023
From: SEAGATE TECHNOLOGY LLC; SEAGATE SINGAPORE INTERNATIONAL HEADQUARTERS PTE. LTD
To: LUMINAR TECHNOLOGIES, INC.
Reel/Frame 063116/0289 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 31, 2020
From: JAIN, ADITYA; JANDRIC, ZORAN; MOHR, DAN; GOMEZ, KEVIN A.; SUBRAMANIAN, KRISHNAN
To: SEAGATE TECHNOLOGY LLC
Reel/Frame 053368/0472 →
Continuity (2)
Provisional Application 62948234 · Dec 14, 2019
Related Publication 20210181378A1 · Jun 17, 2021