Method for producing a nitride compound semiconductor component
A method for producing a nitride compound semiconductor component is disclosed. In an embodiment the method includes providing a growth substrate, growing a nucleation layer of an aluminum-containing nitride compound semiconductor onto the growth substrate, growing a tension layer structure for generating a compressive stress, wherein the tension layer structure comprises at least a first GaN semiconductor layer and a second GaN semiconductor layer, and wherein an Al(Ga)N interlayer for generating the compressive stress is disposed between the first GaN semiconductor layer and the second GaN semiconductor layer and growing a functional semiconductor layer sequence of the nitride compound semiconductor component onto the tension layer structure, wherein a growth of the second GaN semiconductor layer is preceded by a growth of a first 3D AlGaN layer on the Al(Ga)N interlayer in such a way that it has nonplanar structures.
1. A method for producing a nitride compound semiconductor component, the method comprising:
providing a growth substrate;
growing a nucleation layer of an aluminum-containing nitride compound semiconductor onto the growth substrate;
growing a tension layer structure for generating a compressive stress,
wherein the tension layer structure comprises at least a first GaN semiconductor layer and a second GaN semiconductor layer, and
wherein an Al(Ga)N interlayer for generating the compressive stress is disposed between the first GaN semiconductor layer and the second GaN semiconductor layer; and
growing a functional semiconductor layer sequence of the nitride compound semiconductor component onto the tension layer structure,
wherein a growth of the second GaN semiconductor layer is preceded by a growth of a first 3D AlGaN layer on the Al(Ga)N interlayer such that the first 3D AlGaN layer has nonplanar structures, and
wherein the nonplanar structures form a nonplanar side of the first 3D AlGaN layer, the nonplanar side facing away from the growth substrate.
2. The method of claim 1 , wherein the first 3D AlGaN layer is produced by metal-organic vapor phase epitaxy, and wherein a growth temperature in the growth of the first 3D AlGaN layer is less than 1000° C.
3. The method of claim 1 ,
wherein the first GaN semiconductor layer and the second GaN semiconductor layer are produced by metal-organic vapor phase epitaxy,
wherein NH3 is used as reaction gas, and
wherein an NH3 gas flow rate while producing the first 3D AlGaN layer is lower than while producing the first GaN semiconductor layer and/or the second GaN semiconductor layer.
4. The method of claim 1 ,
wherein the first 3D AlGaN layer, the first GaN semiconductor layer and the second GaN semiconductor layer are produced by metal-organic vapor phase epitaxy in a reaction chamber, and
wherein a pressure in the reaction chamber while producing the first 3D AlGaN layer is lower than while producing the first GaN semiconductor layer and/or the second GaN semiconductor layer.
5. The method of claim 1 , wherein the tension layer structure does not have a masking layer.
6. The method of claim 1 , wherein the tension layer structure does not include silicon nitride.
7. The method of claim 1 , wherein a growth of the nucleation layer is followed and a growth of the first GaN semiconductor layer is preceded by a growth of a second 3D AlGaN layer such that the second 3D AlGaN layer has nonplanar structures.
8. The method of claim 1 , wherein the nucleation layer is produced by sputtering.
9. The method of claim 1 , wherein a total thickness of the tension layer structure is less than 5 μm.
10. The method of claim 1 , wherein the second GaN semiconductor layer is undoped, and wherein the second GaN semiconductor layer is followed by a third GaN semiconductor layer which is doped.
11. The method of claim 1 , wherein the growth substrate has a silicon surface.
12. The method of claim 11 , wherein the silicon surface is a plane.
13. The method of claim 1 , wherein the nitride compound semiconductor component is an optoelectronic component.
14. The method of claim 13 , wherein the functional semiconductor layer sequence is a light-emitting diode layer sequence comprising an n-type semiconductor region, a p-type semiconductor region, and an active layer disposed between the n-type semiconductor region and the p-type semiconductor region.
15. The method of claim 1 , wherein the growth substrate is detached after a growth of the functional semiconductor layer sequence.
16. The method of claim 1 , wherein the functional semiconductor layer sequence is bonded to a carrier substrate on an opposite side from the growth substrate.
17. The method of claim 1 , wherein the second GaN semiconductor layer is grown directly on the nonplanar structures of the first 3D AlGaN layer.
18. The method of claim 1 , wherein the first 3D AlGaN layer is directly disposed on the Al(Ga)N interlayer.
19. The method of claim 7 , wherein the nonplanar structures of the second 3D AlGaN layer form a nonplanar side of the second 3D AlGaN layer, the nonplanar side of the second 3D AlGaN layer facing away from the growth substrate.
20. A method for producing a nitride compound semiconductor component, the method comprising:
providing a growth substrate;
growing a nucleation layer of an aluminum-containing nitride compound semiconductor onto the growth substrate;
growing a tension layer structure for generating a compressive stress,
wherein the tension layer structure comprises at least a first GaN semiconductor layer and a second GaN semiconductor layer, and
wherein an Al(Ga)N interlayer for generating the compressive stress is disposed between the first GaN semiconductor layer and the second GaN semiconductor layer; and
growing a functional semiconductor layer sequence of the nitride compound semiconductor component onto the tension layer structure,
wherein a growth of the second GaN semiconductor layer is preceded by a growth of a first 3D AlGaN layer on the Al(Ga)N interlayer such that the first 3D AlGaN layer has nonplanar structures, and
wherein the first 3D AlGaN layer has crystal faces that are predominantly not oriented in a c plane.