Optoelectronic semiconductor component, and method for producing an optoelectronic semiconductor component
An optoelectronic semiconductor component and a method for producing an optoelectronic semiconductor component are disclosed. In an embodiment an optoelectronic semiconductor component includes a semiconductor layer sequence having a first region of a first conductivity type, a reflection layer, a passivation layer arranged between the semiconductor layer sequence and the reflection layer, a first barrier layer arranged between the first region of the semiconductor layer sequence and the passivation layer and a second barrier layer arranged between the passivation layer and the reflection layer, wherein the first barrier layer is configured to reduce or prevent diffusion of contaminants from the passivation layer into the semiconductor layer sequence, and wherein the second barrier layer is configured to reduce or prevent diffusion of contaminants from the passivation layer into the reflection layer.
1. An optoelectronic semiconductor component comprising:
a semiconductor layer sequence having a first region of a first conductivity type;
a reflection layer;
a passivation layer arranged between the semiconductor layer sequence and the reflection layer;
a first barrier layer arranged between the first region of the semiconductor layer sequence and the passivation layer; and
a second barrier layer arranged between the passivation layer and the reflection layer,
wherein the first barrier layer is configured to reduce or prevent diffusion of contaminants from the passivation layer into the semiconductor layer sequence,
wherein the second barrier layer is configured to reduce or prevent diffusion of contaminants from the passivation layer into the reflection layer
wherein the first barrier layer is formed as an ALD layer, and/or wherein the second barrier layer is formed as an ALD layer, and
wherein the first barrier layer and/or the second barrier layer contain(s) at least one of Al 2 O 3 , AlN or Ta 2 O 5 .
2. The optoelectronic semiconductor component according to claim 1 , wherein the first barrier layer is configured to reduce or prevent diffusion of H 2 , O 2 , N 2 , NH 3 from the passivation layer into the first region of the semiconductor layer sequence and/or the second barrier layer is configured to reduce or prevent diffusion of H 2 , O 2 , N 2 , NH 3 from the passivation layer into the reflection layer.
3. The optoelectronic semiconductor component according to claim 1 , wherein the first barrier layer has a thickness of at most 100 nm, and/or wherein the second barrier layer has a thickness of at most 100 nm.
4. The optoelectronic semiconductor component according to claim 1 , wherein the first barrier layer has a thickness of at most 10 nm, and/or wherein the second barrier layer has a thickness of at most 10 nm.
5. The optoelectronic semiconductor component according to claim 1 , wherein the passivation layer contains at least a material from the group consisting of silicon oxide, niobium oxide, titanium oxide and magnesium fluoride.
6. The optoelectronic semiconductor component according to claim 1 , wherein the passivation layer is formed as a multilayer containing at least two materials from the group consisting of silicon oxide, niobium oxide, titanium oxide and magnesium fluoride.
7. The optoelectronic semiconductor component according to claim 1 , wherein at least one layer of the optoelectronic semiconductor component is based on a phosphide compound semiconductor material and/or a nitride compound semiconductor material and/or an arsenide compound semiconductor material.
8. The optoelectronic semiconductor component according to claim 1 , wherein the first conductivity type is p-type.
9. The optoelectronic semiconductor component according to claim 8 , wherein a p-dopant of the first conductivity type is magnesium.
10. The optoelectronic semiconductor component according to claim 1 , further comprising a transparent, conductive layer arranged between the passivation layer and the first region.
11. The optoelectronic semiconductor component according to claim 1 , wherein the reflection layer comprises a transparent, conductive layer comprising a gold layer or a transparent, conductive layer comprising a silver layer.
12. The optoelectronic semiconductor component according to claim 1 , wherein the semiconductor layer sequence has a second region of a second conductivity type on a side facing away from the passivation layer and an active region formed between the first region and the second region, the active region configured to emit or detect electromagnetic radiation.
13. The optoelectronic semiconductor component according to claim 12 , wherein the first barrier layer and/or the second barrier layer is/are designed to be permeable.
14. The optoelectronic semiconductor component according to claim 12 , wherein the first barrier layer and/or the second barrier layer are is/designed to be transparent or translucent for the electromagnetic radiation.
15. A method for producing an optoelectronic semiconductor component comprising, the method comprising:
providing a semiconductor layer sequence with a first region of a first conductivity type;
depositing a passivation layer on the first region by PECVD or PVD; and
arranging a reflection layer on a side of the passivation layer facing away from the first region,
wherein, between providing the semiconductor layer sequence and depositing the passivation layer, a first barrier layer is formed between the first region and the passivation layer,
wherein, between depositing the passivation layer and arranging the reflection layer, a second barrier layer is formed between the passivation layer and the reflection layer,
wherein the first barrier layer is formed as an ALD layer, and/or wherein the second barrier layer is formed as an ALD layer, and
wherein the first barrier layer and/or the second barrier layer contain(s) at least one of Al 2 O 3 , AlN or Ta 2 O 5 .
16. The method according to claim 15 , wherein the method does not comprise annealing.