BAW resonator with increased quality factor
A BAW resonator comprises a center area (CA), an underlap region (UL) surrounding the center area having a thickness smaller than the thickness d C of the center region and a frame region (FR), surrounding the underlap region having thickness d F greater than d C .
1. A bulk acoustic wave (BAW) resonator, comprising:
a substrate;
a sandwich, comprising:
a bottom electrode;
a piezoelectric layer; and
a top electrode; and
dielectric layer covering a surface of the BAW resonator,
wherein the sandwich further comprises:
a center area, wherein the bottom electrode, the piezoelectric layer, and the top electrode of the sandwich overlap each other;
an underlap region surrounding the center area and having a thickness d U smaller than a thickness d C of the center area, wherein the bottom electrode has a thickness in the underlap region that is smaller than the thickness of the bottom electrode in the center area; and
a frame region surrounding the underlap region and having a thickness d F greater than d C .
2. The BAW resonator of claim 1 , wherein the thickness d U being smaller than the thickness d C is mainly due to a reduced thickness of one or more of the bottom electrode or the top electrode.
3. The BAW resonator of claim 1 , wherein one of the bottom electrode and the top electrode comprises a first sub-layer of aluminum copper and a second sub-layer of tungsten, and wherein the thickness of one of the first sub-layer or the second sub-layer is reduced in the underlap region.
4. The BAW resonator of claim 1 , wherein the frame region is formed by a dielectric interlayer arranged between the top electrode and the piezoelectric layer.
5. The BAW resonator of claim 1 , wherein the dielectric layer has a uniform thickness over a total surface of the BAW resonator.
6. The BAW resonator of claim 1 , wherein the BAW resonator is arranged in ladder type circuit of series resonators and shunt resonators, each series and shunt resonator being embodied as the BAW resonator, and wherein the dielectric layer is a trimming layer.
7. The BAW resonator of claim 1 , wherein the dielectric layer is a trimming layer formed of silicon nitride having a uniform thickness of about 60 nm.
8. The BAW resonator of claim 1 , wherein a thickness of the top electrode is reduced in the underlap region relative to the center area by about 15 nm.
9. The BAW resonator of claim 1 , wherein the underlap region has a width of about 0.2 μm to 8.0 μm.
10. A bulk acoustic wave (BAW) resonator, comprising:
a substrate;
a sandwich, comprising:
a bottom electrode;
a piezoelectric layer; and
a top electrode; and
a dielectric layer covering a surface of the BAW resonator,
wherein the sandwich further comprises:
a center area, wherein the bottom electrode, the piezoelectric layer, and the top electrode of the sandwich overlap each other;
an underlap region surrounding the center area and having a thickness d U smaller than a thickness d C of the center area, wherein a thickness of the top electrode is reduced in the underlap region relative to the center area by about 15 nm; and
a frame region surrounding the underlap region and having a thickness d F greater than d C .
11. The BAW resonator of claim 10 , wherein the frame region is formed by a dielectric interlayer arranged between the top electrode and the piezoelectric layer.
12. The BAW resonator of claim 10 , wherein the thickness d U being smaller than the thickness d C is mainly due to a reduced thickness of one or more of the bottom electrode or the top electrode.
13. The BAW resonator of claim 10 , wherein one of the bottom electrode and the top electrode comprises a first sub-layer of aluminum copper and a second sub-layer of tungsten, and wherein the thickness of one of the first sub-layer or the second sub-layer is reduced in the underlap region.
14. The BAW resonator of claim 10 , wherein the dielectric layer has a uniform thickness over a total surface of the BAW resonator.
15. The BAW resonator of claim 10 , wherein the BAW resonator is arranged in ladder type circuit of series resonators and shunt resonators, each series and shunt resonator being embodied as the BAW resonator, and wherein the dielectric layer is a trimming layer.
16. The BAW resonator of claim 10 , wherein the dielectric layer is a trimming layer formed of silicon nitride having a uniform thickness of about 60 nm.
17. The BAW resonator of claim 10 , wherein the underlap region has a width of about 0.2 μm to 8.0 μm.