IP Library Granted Patent US 11,201,257
Granted Patent B2
US 11,201,257 · App. 16/966,424 · Granted Dec 14, 2021

Methods for group V doping of photovoltaic devices

Inventors: Sachit Grover (Campbell, CA); Dingyuan Lu (San Jose, CA); Roger Malik (Santa Clara, CA); Gang Xiong (Santa Clara, CA)
Assignee: First Solar, Inc.
H01L31/1828H01L31/1832H01L31/1872H01L31/02963H01L31/02966H01L31/073
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Quick Facts
Patent No.
US 11,201,257
App. No.
16/966,424
Granted
Dec 14, 2021
Kind
B2
Abstract

According to the embodiments provided herein, a method for doping an absorber layer can include contacting the absorber layer with an annealing compound. The annealing compound can include cadmium chloride and a group V salt comprising an anion and a cation. The anion, the cation, or both can include a group V element. The method can include annealing the absorber layer, whereby the absorber layer is doped with at least a portion of the group V element of the annealing compound.

Claims (35)

1. A method for doping an absorber layer, comprising:

contacting the absorber layer with an annealing compound, wherein:

the absorber layer comprises cadmium, and tellurium;

the annealing compound comprises cadmium chloride and a group V salt comprising an anion and a cation;

the anion, the cation, or both comprise a group V element;

a ratio of cadmium chloride to group V salt within the annealing compound, on a weight per volume basis, is at least 30 to 1; and

annealing the absorber layer, whereby the absorber layer is doped with at least a portion of the group V element of the annealing compound.

2. The method of claim 1 , wherein the annealing compound is a solution, and a proportion of the group V salt to a total amount of the annealing compound is less than 100 grams per liter.

3. The method of claim 2 , wherein the proportion of the group V salt to the total amount of the annealing compound is between 1/25 grams per liter and 20 grams per liter.

4. The method of claim 1 , wherein a grain size of the absorber layer is increased during annealing of the absorber layer.

5. The method of claim 1 , wherein the group V salt is ammonium dihydrogen arsenate.

6. The method of claim 1 , wherein the group V salt is diammonium hydrogen phosphate.

7. The method of claim 1 , wherein the group V element is nitrogen.

8. The method of claim 1 , wherein the group V element is phosphorous.

9. The method of claim 1 , wherein the group V element is arsenic.

10. The method of claim 1 , wherein the group V element is antimony.

11. The method of claim 1 , wherein the group V element is bismuth.

12. The method of claim 1 , comprising exposing an absorber layer to a reducing environment, while the absorber layer is annealed.

13. The method of claim 12 , wherein the reducing environment comprises a forming gas configured to mitigate formation of group V oxides, the forming gas comprising hydrogen, nitrogen, carbon, or combinations thereof.

14. The method of claim 1 , wherein the absorber layer is annealed at a temperature between 350° C. and 500° C. for between 5 minutes and 60 minutes.

15. The method of claim 1 , wherein:

the annealing compound comprises an alkali metal chloride; and

at least a portion of the group V dopant is activated during annealing of the absorber layer.

16. The method of claim 1 , wherein, after the absorber layer is annealed, an atomic concentration of the group V dopant in a central region of the absorber layer is greater than 1×10 16 cm −3 .

17. The method of claim 1 , wherein the absorber layer comprises selenium.

18. The method of claim 1 , wherein a grain size of the absorber layer is increased during annealing of the absorber layer.

19. The method of claim 1 , wherein the group V salt is ammonium dihydrogen arsenate.

20. The method of claim 1 , wherein the group V salt is diammonium hydrogen phosphate.

21. The method of claim 1 , wherein the group V element is nitrogen.

22. The method of claim 1 , wherein the group V element is phosphorous.

23. The method of claim 1 , wherein the group V element is arsenic.

24. The method of claim 1 , wherein the group V element is antimony.

25. The method of claim 1 , wherein the group V element is bismuth.

26. The method of claim 1 , comprising exposing an absorber layer to a reducing environment, while the absorber layer is annealed.

27. The method of claim 26 , wherein the reducing environment comprises a forming gas configured to mitigate formation of group V oxides, the forming gas comprising hydrogen, nitrogen, carbon, or combinations thereof.

Assignments (2)
RELEASE OF SECURITY INTEREST Recorded Feb 13, 2026
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 074858/0364 →
SECURITY INTEREST Recorded Jul 10, 2023
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 064237/0462 →
Cited By (3)
US 12,261,231 US 12,356,755 US 12,610,650