Method of coating a flexible substrate in a R2R deposition system, and vapor deposition system
A method of coating a flexible substrate in a roll-to-roll deposition system is described. The method includes unwinding the flexible substrate from an unwinding roll, the flexible substrate having a first coating on a first main side thereof; measuring a lateral positioning of the first coating while guiding the flexible substrate to a coating drum; adjusting a lateral position of the flexible substrate on the coating drum depending on the measured lateral positioning of the first coating; and depositing a second coating on the flexible substrate, particularly on a second main side of the flexible substrate opposite the first main side. Further described is a vacuum deposition apparatus for conducting the methods described herein.
1. A method of coating a flexible substrate in a roll-to-roll deposition system, comprising:
unwinding the flexible substrate from an unwinding roll, the flexible substrate having a first coating on a first main side;
measuring a lateral positioning of the first coating while guiding the flexible substrate to a coating drum;
adjusting a lateral position of the flexible substrate on the coating drum depending on the measured lateral positioning of the first coating; and
depositing a second coating on a second main side of the flexible substrate opposite the first main side, wherein the lateral position of the flexible substrate is adjusted depending on the measured lateral positioning of the first coating such that the second coating is deposited on the second main side of the flexible substrate in alignment with the first coating on the first main side.
2. The method of claim 1 , wherein the lateral position of the flexible substrate on the coating drum is adjusted by axially moving the unwinding roll depending on the lateral positioning of the first coating.
3. The method of claim 1 , wherein the measuring of the lateral positioning of the first coating comprises scanning a position of a side edge of the first coating.
4. The method of claim 1 , wherein the lateral position of the flexible substrate is adjusted such that side edges of the second coating are aligned with side edges of the first coating with a deviation of 0.5 mm or less.
5. The method of claim 1 , wherein the lateral position of the flexible substrate is adjusted using a feedback loop with the lateral positioning of the first coating as an input parameter.
6. The method of claim 1 , wherein depositing the second coating comprises directing evaporated material toward a second main side of the flexible substrate with a plurality of nozzles of at least one vapor source while the flexible substrate is moved past the at least one vapor source on a curved drum surface of the coating drum.
7. The method of claim 1 , wherein depositing the second coating comprises directing evaporated material toward the flexible substrate past an edge exclusion shield that masks lateral edge areas of the flexible substrate not to be coated.
8. The method of claim 7 , wherein the edge exclusion shield has a temperature of 500° C. or more.
9. The method of claim 1 , wherein at least one of the first coating and the second coating is a lithium coating or comprises a lithium-containing material.
10. The method of claim 1 , wherein the flexible substrate comprises a metal foil.
11. The method of claim 1 , wherein at least one of the first coating and the second coating constitutes an anode or forms a part of an anode for manufacturing a lithium battery.