Metasurface antennas manufactured with mass transfer technologies

1. A unit cell for a metasurface, metamaterial, or beamforming antenna, comprising:

a substrate;

a metal layer attached to the substrate and defining an iris opening; and

one or more tunable capacitance devices positioned within or across the iris opening, each to tune resonance frequency of the unit cell, wherein each of the one or more tunable capacitance devices comprises one discrete diode, wherein

a first terminal of the one discrete diode is coupled, using at least a thru via, to a metal layer on one side of the iris opening,

a second terminal of the one discrete diode, opposing the first terminal, is coupled to a first electrode, and

a bias electrode is coupled to the first electrode.

2. The unit cell of claim 1 , further comprising:

an assembly template formed by structure on the substrate, to align the one or more tunable capacitance devices during assembly of the unit cell.

3. The unit cell of claim 2 , wherein the assembly template is removable.

4. The unit cell of claim 2 , wherein the assembly template is to remain in the structure on the substrate after the assembly of the unit cell.

5. The unit cell of claim 2 , wherein the assembly template is formed by the metal layer in which the iris opening is defined.

6. The unit cell of claim 1 , and further comprising:

the thru via connecting the first terminal of the one discrete diode to the metal layer on the one side of the iris opening;

wherein the one electrode comprises a patch electrode connected to the opposing second terminal of the one discrete diode; and

the bias electrode is connected to the patch electrode.

7. The unit cell of claim 6 , wherein the bias electrode is resistive and comprises a resistive bias line or a resistor.

8. The unit cell of claim 1 , wherein the one or more tunable capacitance devices comprises two discrete diodes, wherein the first electrode comprises a patch electrode, and further comprising:

the patch electrode connected to one terminal of each of the two discrete diodes;

a first thru via connecting a first portion of the metal layer on a first side of the iris opening to another terminal of a first of the two discrete diodes; and

a second thru via connecting a second portion of the metal layer on a second side of the iris opening to another terminal of a second of the two discrete diodes.

9. The unit cell of claim 1 , further comprising:

a first patch electrode connected to a first terminal of the one discrete diode, wherein the one discrete diode is oriented parallel to and within the iris opening; and

a second patch electrode connected to a second terminal of the one discrete diode.

10. The unit cell of claim 1 , wherein the one or more tunable capacitance devices comprises the first discrete diode and a second discrete diode, and further comprising:

a first patch electrode located to a first side of the iris opening and connected to a first terminal of the first discrete diode;

a second patch electrode located to a second side of the iris opening and connected to a first terminal of the second discrete diode; and

a third electrode located along a centerline of the iris opening and connected to a second terminal of each of the first and second discrete diodes.

11. The unit cell of claim 1 , further comprising:

a first patch electrode located to a first side of the iris opening and connected to a first terminal of the one discrete diode; and

a second patch electrode located to a second side of the iris opening and connected to a second terminal of the one discrete diode.

12. The unit cell of claim 1 , further comprising:

the metal layer further defining a first electrode and a second electrode for the one discrete diode, wherein each of the first electrode and the second electrode has a half-round shape that supports uniform rotation of the one discrete diode relative to differing rotations of a remainder of the unit cells in a plurality of placements of the unit cell in an array for the antenna.

13. The unit cell of claim 1 , wherein the one or more tunable capacitance devices comprises one unpackaged circular diode or one diode with a circular diode package, the circular diode or the circular diode package having at least one of a circular bonding pad and a ring- shaped bonding pad.

14. The unit cell of claim 1 , wherein the one or more tunable capacitance devices comprises one tunable capacitance device having at least one of a circular bonding pad and a ring-shaped bonding pad.

15. The unit cell of claim 1 , wherein each of the one or more tunable capacitance devices includes one or more ferromagnetic bonding pads.

16. An antenna, comprising:

one or more substrates defining an antenna aperture having a plurality of unit cells, wherein the antenna aperture is circular; and

each of the plurality of unit cells comprising:

a metal layer attached to a portion of the one or more substrates and defining an iris opening; and

one or more tunable capacitance devices positioned within or across the iris opening, each tunable for resonance frequency of the unit cell, wherein the one or more tunable capacitance devices have uniform orientation relative to differing rotations of a remainder of the unit cells across at least a portion of the antenna aperture.

17. The antenna of claim 16 , wherein:

the antenna aperture comprises a plurality of segments, each of the plurality of segments having a subset of the one or more tunable capacitance devices with a uniform orientation across the segment, including one of the plurality of segments as the at least a portion of the antenna aperture.

18. An antenna, comprising:

one or more substrates defining an antenna aperture having a plurality of unit cells, wherein the antenna aperture is rectangular; and

each of the plurality of unit cells comprising:

a metal layer attached to a portion of the one or more substrates and defining an iris opening; and

one or more tunable capacitance devices positioned within or across the iris opening, each tunable for resonance frequency of the unit cell, wherein the one or more tunable capacitance devices have uniform orientation across at least a portion of the antenna aperture, wherein each the one or more tunable capacitance devices comprises a discrete diode capacitively-coupled with a capacitor to the iris opening and is controlled by a DC voltage source.

19. A method comprising:

placing each of a plurality of unit cells on a substrate, with each of the plurality of unit cells comprising a metal layer attached to the substrate and defining an iris opening, including positioning one or more tunable capacitance devices within or across the iris opening, each to tune resonance frequency of the unit cell; and

attaching the one or more tunable capacitance devices as part of completing each of the plurality of unit cells, wherein each the one or more tunable capacitance devices comprises one discrete diode and attaching the one or more tunable capacitance devices comprises

coupling one terminal of the one discrete diode to the metal layer on one side of the iris opening using at least a thru via,

coupling another terminal of the one discrete diode, opposing the one terminal, to a first electrode, and

coupling a bias electrode to the first electrode.

20. The method of claim 19 , wherein the one or more tunable capacitance devices have uniform orientation across the substrate.

21. The method of claim 19 , wherein the plurality of unit cells has uniform orientation of the one or more tunable capacitance devices relative to differing rotations of a remainder of the unit cells.

22. The method of claim 19 , further comprising:

depositing thin film transistors on the substrate; and

depositing thru vias on the substrate.

23. The method of claim 19 , further comprising depositing thin film transistors above the metal layer that defines the iris openings of the plurality of unit cells.

24. The method of claim 19 , further comprising depositing thin film transistors below the metal layer that defines the iris openings of the plurality of unit cells.

25. The method of claim 19 , further comprising:

using one or more hexagonal-shaped transfer tools to place the one or more tunable capacitance devices for each of the plurality of unit cells on the substrate.

26. The method of claim 19 , further comprising:

using one or more rectangular-shaped transfer tools to place the one or more tunable capacitance devices for each of the plurality of unit cells on the substrate.

27. The method of claim 19 , further comprising:

arranging an assembly template on the substrate, for the receiving the one or more tunable capacitance devices positioned within or across the iris opening of each of the plurality of unit cells.

28. The method of claim 19 , wherein the attaching the one or more tunable capacitance devices to complete each of the plurality of unit cells comprises a self-assembly process using one or more magnets to attract ferromagnetic bonding pads of the one or more tunable capacitance devices for each of the plurality of unit cells.

29. The method of claim 19 , further comprising applying agitation in a self-assembly process to position the one or more tunable capacitance devices within or across the iris opening of each of the plurality of unit cells.

30. The method of claim 19 , further comprising:

arranging an assembly template on the substrate; and

attracting ferromagnetic bonding pads of the one or more tunable capacitance devices, using one or more magnets, to align the one or more tunable capacitance devices within the assembly template, for each of the plurality of unit cells.

31. A method of fabricating an electronically scanned array using mass transfer technologies, comprising:

using a self-assembly process to align one or more tunable capacitance devices to each of a plurality of iris openings defined by a metal layer coupled to a substrate; and

coupling the one or more tunable capacitance devices to the substrate while aligned with each of the plurality of iris openings, wherein each the one or more tunable capacitance devices comprises one discrete diode and coupling the one or more tunable capacitance devices to the substrate comprises

coupling one terminal of the one discrete diode to the metal layer on one side of the iris opening using at least a thru via,

coupling another terminal of the one discrete diode, opposing the one terminal, to a first electrode, and

coupling a bias electrode to the first electrode.

32. The method of claim 31 , wherein:

each of the one or more tunable capacitance devices comprises a ferromagnetic portion; and

the self-assembly process uses a magnetic field for aligning the one or more tunable capacitance devices.

33. The method of claim 31 , wherein the self-assembly process comprises agitation.

34. The method of claim 31 , wherein the self-assembly process comprises using an assembly template formed by the metal layer that defines the plurality of iris openings.

35. The method of claim 31 , wherein the self-assembly process comprises using an assembly template attached to the substrate.

36. The method of claim 31 , wherein the self-assembly process comprises each of the one or more tunable capacitance devices having a shape that fits an assembly template.

37. An antenna, comprising:

one or more substrates defining an antenna aperture having a plurality of unit cells, each of the plurality of unit cells comprising:

a metal layer attached to one of the one or more substrates and defining an iris opening; and

one or more tunable capacitance devices positioned within or across the iris opening, each to tune resonance frequency of the unit cell, wherein each the one or more tunable capacitance devices comprises a discrete diode capacitively-coupled to the iris opening, wherein the discrete diode is connected in series with a capacitor that is coupled to the iris opening and is controlled by a DC voltage source.

38. The antenna of claim 37 wherein the one or more tunable capacitance devices have uniform orientation across at least a portion of the antenna aperture relative to differing rotations of a remainder of the unit cells.

39. The antenna of claim 38 wherein the antenna aperture comprises a plurality of segments, each of the plurality of segments having a subset of the one or more tunable capacitance devices with a uniform orientation across the segment.