Vertical inductor for WLCSP
Embodiments of the invention include a microelectronic device and methods of forming a microelectronic device. In an embodiment the microelectronic device includes a semiconductor die and an inductor that is electrically coupled to the semiconductor die. The inductor may include one or more conductive coils that extend away from a surface of the semiconductor die. In an embodiment each conductive coils may include a plurality of traces. For example, a first trace and a third trace may be formed over a first dielectric layer and a second trace may be formed over a second dielectric layer and over a core. A first via through the second dielectric layer may couple the first trace to the second trace, and a second via through the second dielectric layer may couple the second trace to the third trace.
1. A microelectronic device, comprising:
a semiconductor die; and
an inductor electrically coupled to the semiconductor die, wherein the inductor includes one or more conductive coils that extend away from a surface of the semiconductor die, wherein the inductor comprises a dielectric layer having a first via and a second via therein, the first via and the second via electrically coupled to each other with a conductive trace, and wherein the inductor is electrically coupled to the semiconductor die with solder balls.
2. The microelectronic device of claim 1 , wherein the first via and the second via are electrically coupled to the solder balls.
3. The microelectronic device of claim 2 , wherein the solder balls are coupled to a first redistribution line and a second redistribution line formed on the semiconductor die.
4. The microelectronic device of claim 1 , wherein the inductor comprises a first redistribution line coupled to the first via and a second redistribution line coupled to the second via, wherein each of the first and second redistribution lines are formed on a surface of the inductor substrate opposite the surface the conductive trace, and wherein the first and second redistribution lines are electrically coupled to the solder balls.
5. A microelectronic device, comprising:
a semiconductor die; and
an inductor electrically coupled to the semiconductor die, wherein the inductor includes one or more conductive coils that extend away from a surface of the semiconductor die, wherein the inductor is electrically coupled to the semiconductor die with solder balls, wherein the inductor comprises a dielectric layer having a first via and a second via electrically coupled to each other with a conductive trace, and a first redistribution line coupled to the first via and a second redistribution line coupled to the second via, wherein each of the first and second redistribution lines are formed on a surface of the inductor substrate opposite the surface the conductive trace, and wherein the first and second redistribution lines are electrically coupled to the solder balls.