IP Library Granted Patent US 11,185,915
Granted Patent B2
US 11,185,915 · App. 16/996,525 · Granted Nov 30, 2021

Deposition of reactive metals with protection layer for high volume manufacturing

Inventor: Subramanya P. Herle (Mountain View, CA)
Assignee: Applied Materials, Inc.
B22D11/0611B22D11/001B22D11/144H01M4/0409
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Quick Facts
Patent No.
US 11,185,915
App. No.
16/996,525
Granted
Nov 30, 2021
Kind
B2
Abstract

A method and apparatus for manufacturing a flexible layer stack, and to a flexible layer stack. Implementations of the present disclosure particularly relate to a method and apparatus for coating flexible substrates with a low melting temperature metal or metal alloy. In one implementation, a method is provided. The method includes delivering a transfer liquid to a quenching surface of a rotating casting drum. The method further includes forming a material layer stack over the rotating casting drum by delivering a molten metal or molten metal alloy toward the quenching surface of the rotating casting drum. The method further includes transferring the material layer stack from the rotating casting drum to a continuous flexible substrate, wherein the quenching surface of the rotating casting drum is cooled to a temperature at which the layers of the material layer stack solidify.

Claims (37)

1. A method, comprising:

delivering a transfer liquid to a quenching surface of a rotating casting drum, wherein the transfer liquid forms a peeling layer on the quenching surface of the rotating casting drum;

forming a material layer stack over the rotating casting drum, comprising:

forming a surface protection film on the peeling layer prior to delivering a molten metal or molten metal alloy toward the quenching surface of the rotating casting drum; and

delivering the molten metal or molten metal alloy toward the quenching surface of the rotating casting drum; and

transferring the material layer stack from the rotating casting drum to a continuous flexible substrate, wherein the quenching surface of the rotating casting drum is cooled to a temperature at which the layers of the material layer stack solidify.

2. The method of claim 1 , wherein the transfer liquid is selected from ionic liquids, synthetic oils, mineral oils, molten salts, or a combination thereof.

3. The method of claim 1 , wherein the transfer liquid is applied to the casting drum via a roller coating process.

4. The method of claim 1 , wherein forming the surface protection film comprises delivering a protection layer forming liquid toward the quenching surface, which solidifies on the peeling layer to form the surface protection film.

5. The method of claim 1 , wherein the surface protection film is selected from LiF, BiTe 3 , Cu, Sn, LiNO 3 , sulfide, or a combination thereof.

6. The method of claim 1 , wherein the continuous flexible substrate is a copper substrate and the molten metal is lithium.

7. The method of claim 1 , wherein the continuous flexible substrate is a copper substrate having an anode film formed thereon and the molten metal is lithium.

8. A method, comprising:

delivering an ionic liquid to a quenching surface of a rotating casting drum, wherein the quenching surface is cooled to a temperature at which the ionic liquid solidifies to form a peeling layer on the rotating casting drum;

forming a material layer stack over the rotating casting drum, comprising:

forming a surface protection layer over the rotating casting drum and on the peeling layer; and

delivering a molten lithium metal onto the surface protection layer and over the quenching surface of the rotating casting drum; and

transferring the material layer stack from the rotating casting drum to a continuous flexible substrate, wherein the quenching surface of the rotating casting drum is cooled to a temperature at which the layers of the material layer stack solidify.

9. The method of claim 8 , further comprising:

guiding the continuous flexible substrate in a vacuum chamber using a roller arrangement.

10. The method of claim 9 , wherein transferring the material layer stack from the rotating casting drum to the continuous flexible substrate further comprises removing the material layer stack from the peeling layer.

11. The method of claim 10 , wherein the molten lithium metal is delivered toward the quenching surface of the rotating casting drum by a deposition process selected from sputtering, thermal evaporation, e-beam evaporation, slot-die coating, casting nozzle coating, roller coating, subsonic spraying, electrostatic spraying, gas pressure spraying, thermal spraying, and plasma spraying.

12. The method of claim 10 , wherein the molten lithium metal or molten metal alloy is delivered toward the quenching surface of the rotating casting drum by a spraying process selected from subsonic spraying, electrostatic spraying, gas pressure spraying, thermal spraying, and plasma spraying.

13. A method, comprising:

delivering a transfer liquid to a quenching surface of a rotating casting drum;

forming a material layer stack, comprising:

forming a first layer on the transfer liquid;

forming a second layer on the first layer, wherein at least one of forming the first layer and forming the second layer comprises delivering a molten metal over the quenching surface of the rotating casting drum; and

forming a third layer on the second layer; and

transferring the material layer stack from the rotating casting drum to a continuous flexible substrate, wherein the quenching surface of the rotating casting drum is cooled to a temperature at which the layers of the material layer stack solidify.

14. The method of claim 13 , wherein the transfer liquid forms a peeling layer on the quenching surface of the rotating casting drum, wherein the first layer is a surface protection film, wherein the second layer is a molten metal or molten metal alloy layer, and wherein the third layer is an anode film.

15. The method of claim 14 , wherein the anode film is constructed from graphite, silicon, silicon-containing graphite, lithium metal, lithium metal foil or a lithium alloy foil.

16. The method of claim 14 , wherein forming the surface protection film comprises delivering a protection layer forming liquid toward the quenching surface, which solidifies on the peeling layer to form the surface protection film.

17. The method of claim 14 , wherein the surface protection film is selected from LiF, BiTe 3 , Cu, Sn, LiNO 3 , sulfide, or a combination thereof.

18. The method of claim 13 , wherein the transfer liquid is applied to the casting drum via a roller coating process and where the transfer liquid is selected from ionic liquids, synthetic oils, mineral oils, molten salts, or a combination thereof.

19. The method of claim 18 , wherein the continuous flexible substrate is a copper substrate and the molten metal is lithium.

20. The method of claim 13 , further comprising exposing the rotating casting drum to a cleaning process.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2025
From: APPLIED MATERIALS, INC.
To: ELEVATED MATERIALS US LLC
Reel/Frame 071036/0188 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2020
From: HERLE, SUBRAMANYA P.
To: APPLIED MATERIALS, INC.
Reel/Frame 053583/0165 →
Continuity (2)
Provisional Application 62894131 · Aug 30, 2019
Related Publication 20210060638A1 · Mar 4, 2021
Cited By (2)
US 12,283,687 US 12,695,083