Manufacturing method of semiconductor device and etching gas
A manufacturing method of a semiconductor device includes etching a film using etching gas that has a first or second molecule which has a C 3 F 4 group and in which the number of carbon atoms is four or five. Further, the first molecule has an R1 group that bonds to a carbon atom in the C 3 F 4 group through a double bond, and the R1 group contains carbon and also chlorine, bromine, iodine, or oxygen. Further, the second molecule has an R2 group that bonds to a carbon atom in the C 3 F 4 group through a single bond and an R3 group that bonds to the carbon atom in the C 3 F 4 group through a single bond, the R2 group or the R3 group or both containing carbon, and both the R2 group and the R3 group containing hydrogen, fluorine, chlorine, bromine, iodine, or oxygen.
1. A method for manufacturing a semiconductor device, the method comprising:
etching a film using etching gas that has a first molecule or second molecule, the etching gas having a C 3 F 4 group, the etching gas having a number of carbon atoms of four or five,
the first molecule represented by a general formula (1) described below, where R1 group contains carbon and at least one of chlorine, bromine, iodine, or oxygen,
and
the second molecule represented by a general formula (2) described below, where R2 group and R3 group each contains at least one of hydrogen, fluorine, chlorine, bromine, iodine, or oxygen
2. The method according to claim 1 , wherein an F/C ratio of fluorine atoms and carbon atoms in the R1 group or an F/C ratio of fluorine atoms and carbon atoms in the R2 or R3 group is equal to or less than two.
3. The method according to claim 1 , wherein the film includes a plurality of first films and a plurality of second films that are alternately formed on a substrate.
4. The method according to claim 1 , wherein a recess portion with an aspect ratio equal to or greater than ten is formed in the film through the etching.
5. The method according to claim 1 , wherein the etching gas further contains at least an oxygen molecule, a rare gas molecule, or a C a F b molecule, wherein a and b represent integers that are equal to or greater than one.
6. The method according to claim 1 , wherein etching the film comprises etching with plasma generated from the first or second molecule.
7. The method according to claim 6 , wherein the plasma contains C 3 F 4 radicals that are generated from the first or second molecule.
8. The method according to claim 7 , wherein an electron density of the plasma ranges from 5.0×10 9 to 2.0×10 11 /cm 3 .
9. An etching gas comprising:
a first molecule, which has a C 3 F 4 group, in which a number of carbon atoms is four or five,
the first molecule represented by a general formula (1) described below, where R1 group contains carbon and further contains chlorine, bromine, iodine, or oxygen
10. The etching gas according to claim 9 , wherein an F/C ratio of fluorine atoms and carbon atoms in the R1 group or an F/C ratio of fluorine atoms and carbon atoms in the R2 or R3 group is equal to or less than two.
11. The etching gas according to claim 9 , further comprising a single atom molecule.
12. The etching gas according to claim 9 , wherein the number of carbon atoms is five.
13. The etching gas according to claim 9 , further comprising at least an oxygen molecule, a rare gas molecule, or a C a F b molecule, wherein a and b represent integers that are equal to or greater than one.
14. The etching gas according to claim 13 , wherein a and b are each equal to 1.
15. An etching gas comprising:
a second molecule, which has a C 3 F 4 group, in which a number of carbon atoms is four or five,
the second molecule represented by a general formula (2) described below, where R2 group and R3 group each contain at least one of hydrogen, fluorine, chlorine, bromine, iodine, or oxygen
16. The etching gas according to claim 15 , further comprising at least an oxygen molecule, a rare gas molecule, or a C a F b molecule, wherein a and b represent integers that are equal to or greater than one.
17. The etching gas according to claim 15 , wherein an F/C ratio of fluorine atoms and carbon atoms in the R1 group or an F/C ratio of fluorine atoms and carbon atoms in the R2 or R3 group is equal to or less than two.
18. The etching gas according to claim 15 , further comprising a single atom molecule.
19. The etching gas according to claim 15 , wherein a and b are each equal to 1.
20. The etching gas according to claim 15 , wherein the number of carbon atoms is five.