Semiconductor on insulator wafer with cavity structures
The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor on insulator substrate with cavity structures and methods of manufacture. The structure includes: a bulk substrate with at least one rectilinear cavity structure; an insulator material sealing the at least one rectilinear cavity structure; and a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure.
1. A structure comprising:
a bulk substrate with at least one rectilinear cavity structure;
an insulator material sealing the at least one rectilinear cavity structure;
a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure; and
a semiconductor material on the buried insulator layer and above the at least one rectilinear cavity structure, wherein the insulator material is over and contacts the semiconductor material,
wherein the insulator material is over the buried insulator layer and extends within an opening of the buried insulator layer, which seals the at least one rectilinear cavity structure.
2. The structure of claim 1 , wherein the at least one rectilinear cavity structure is lined with insulator material.
3. The structure of claim 2 , wherein the insulator material suppresses traps.
4. The structure of claim 3 , wherein the insulator material is thermal SiO 2 .
5. The structure of claim 1 , further comprising a shallow trench isolation region formed in the semiconductor material above the buried insulator layer and at least one wire on at least one of the semiconductor material above the at least one rectilinear cavity structure and the shallow trench isolation region.
6. The structure of claim 1 , wherein the at least one rectilinear cavity structure is plural cavity structures of different dimensions.
7. The structure of claim 1 , wherein the at least one rectilinear cavity structure is plural cavity structures of a same depth within the bulk substrate.
8. The structure of claim 1 , wherein the at least one rectilinear cavity structure is plural cavity structures separated from each other.
9. The structure of claim 1 , wherein the at least one rectilinear cavity structure is a single rectilinear cavity with different depths.
10. The structure of claim 1 , wherein the bulk substrate is a single crystalline semiconductor material and the rectilinear cavity structure is bounded by the single crystalline semiconductor material and, at is top surface, the buried insulator layer.
11. A structure comprising:
a bulk substrate with at least one rectilinear cavity structure;
an insulator material sealing the at least one rectilinear cavity structure;
a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure; and
an electrode contacting the insulator material,
wherein the insulator material is over the buried insulator layer and extends within an opening of the buried insulator layer, which seals the at least one rectilinear cavity structure,
wherein the at least one rectilinear cavity structure forms part of a microfluidic device, and
wherein the electrode is a plurality of wires directly contacting the insulator material.
12. A structure comprising:
a bulk substrate with at least one rectilinear cavity structure;
an insulator material sealing the at least one rectilinear cavity structure; and
a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure; and
a semiconductor material on the buried insulator layer and above the at least one rectilinear cavity structure, wherein the insulator material extends over and contacts the semiconductor material,
wherein the insulator material is over the buried insulator layer and extends within an opening of the buried insulator layer, which seals the at least one rectilinear cavity structure, and
wherein the at least one rectilinear cavity structure is hermetically sealed, and
wherein the at least one rectilinear cavity structure is plural cavity structures.
13. A structure comprising:
a bulk substrate of single crystalline material;
a buried insulator layer on the bulk substrate; and
at least one rectilinear cavity structure within the bulk substrate with a top surface being the buried insulator layer;
dielectric material extending over an upper surface of the buried insulator layer; and
a semiconductor material on the buried insulator layer and above the at least one rectilinear cavity structure, wherein the dielectric material extends over and contacts the semiconductor material,
wherein the least one rectilinear cavity structure is plural cavity structures.
14. The structure of claim 13 , wherein the least one rectilinear cavity structure is lined with insulator material and further comprising shallow trench isolation structures in the semiconductor material and over the at least one rectilinear cavity structure.
15. The structure of claim 13 , wherein the at least one rectilinear cavity structure has a stepped feature, lined with insulator material.
16. The structure of claim 13 , further comprising an electrode above the at least one rectilinear cavity and the dielectric material, which forms a microfluidic device.
17. A method comprising:
forming amorphous region of a first depth within a bulk substrate, below a buried oxide layer of semiconductor on insulator (SOI) technologies;
forming a vent hole through the buried oxide layer to expose the amorphous region;
removing the amorphous region through the vent hole to form at least one cavity structure at the first depth within the bulk substrate;
lining the at least one cavity structure with insulator material;
forming a single crystalline semiconductor material on the buried oxide layer; and
sealing the vent hole with dielectric material, which is also formed on a top surface of the buried oxide layer and a top surface of the single crystalline semiconductor material.