Waveguide absorbers
The present disclosure relates to semiconductor structures and, more particularly, to spiral waveguide absorbers and methods of manufacture. The structure includes: a photonics component; and a waveguide absorber with a grating pattern coupled to a node of the photonics component.
1. A structure comprising:
a photonics component; and
a waveguide absorber with a grating pattern coupled to a node of the photonics component,
wherein the waveguide absorber comprises alternating wide regions and narrow regions, and the grating pattern is a gap between a pair of the wide regions and adjacent to the narrow region between the pair of the wide regions.
2. The structure of claim 1 , wherein the waveguide absorber is provided in a spiral configuration and the grating pattern comprises gaps within the waveguide absorber.
3. The structure of claim 2 , wherein gaps are filled with insulator material.
4. The structure of claim 2 , wherein the waveguide absorber is one of Si material of silicon on insulator (SOI) technologies, SiN material and polysilicon material.
5. The structure of claim 2 , wherein the spiral configuration comprises concentrically placed rounded turns.
6. The structure of claim 2 , wherein the spiral configuration comprises concentrically placed quadrilateral turns.
7. The structure of claim 1 , wherein the gap between the pair of the wide regions and adjacent to the narrow region is filled with insulator material.
8. The structure of claim 1 , wherein the alternating wide regions and narrow regions are doped with a same dopant type.
9. The structure of claim 1 , wherein the alternating wide regions and narrow regions are doped with different dopant types.
10. The structure of claim 1 , wherein the waveguide absorber is provided on a monolithic base of a same material as the waveguide absorber.
11. The structure of claim 1 , wherein the waveguide absorber is provided on a monolithic base of a same material as the waveguide absorber and the grating pattern is partially removed material from the monolithic base.
12. A structure comprising:
a waveguide absorber comprising sections of discontinuous, separated semiconductor material;
gaps between each of the sections of discontinuous, separated semiconductor material; and
insulator material over the waveguide absorber and within the gaps formed between sections of the discontinuous, separated semiconductor material,
wherein the waveguide absorber comprises alternating wide regions and narrow regions, with the gaps between a pair of the wide regions and adjacent to the narrow region between the pair of the wide regions.
13. The structure of claim 12 , wherein the discontinuous semiconductor material is one of Si material of silicon on insulator (SOI) technologies, SiN material and polysilicon material.
14. The structure of claim 12 , wherein the waveguide absorber is provided in a spiral configuration.
15. The structure of claim 12 , wherein the waveguide absorber is provided on a monolithic base of a same material as the waveguide absorber and the gaps are partially removed material from the monolithic base.
16. The structure of claim 12 , wherein the alternating wide regions and narrow regions are doped.
17. A structure comprising:
a semiconductor waveguide component;
a concentrically configured spiraled waveguide absorber composed of semiconductor material with voids between discrete, separated sections of the semiconductor material which form a grating pattern between the discrete, separated sections of the semiconductor material of the concentrically configured spiraled waveguide absorber;
insulator material over the concentrically spiraled waveguide absorber and within the voids, separating each of the discrete, separated sections of the semiconductor material; and
a monolithic slab of thinned semiconductor material composed of a same semiconductor material as the spiraled waveguide absorber, the semiconductor material of the spiraled waveguide absorber being integral with the monolithic slab, a dielectric material being in contact on a top surface of the insulator material and over the semiconductor material of the spiraled waveguide absorber and the monolithic slab such that the insulator material separates the dielectric material from the semiconductor material of the spiraled waveguide absorber and the monolithic slab.
18. The structure of claim 17 , wherein the waveguide absorber is provided on a monolithic base of a same material as the waveguide absorber.
19. The structure of claim 17 , wherein the dielectric material is directly in contact on the top surface of the insulator material and the dielectric material is different than the insulator material.