Metal oxide liner for cross-point phase change memory cell
Phase change memory material stacks having a metal oxide liner for memory integrated circuits, related systems, and methods of fabrication are disclosed. Such phase change memory material stacks include a phase change material and a switching device and the sidewalls of the phase change memory material stacks are lined with a metal oxide to protect the material stacks during manufacture and use and to provide isolation between the material stacks.
1. A phase change memory structure, comprising
a memory cell material stack coupled to and between first and second electrodes, the memory cell material stack comprising at least a phase change material layer and a switching device; and
a liner on one or more sidewalls of the memory cell material stack, the liner comprising a first material layer on the one or more sidewalls and a second material layer on the first material layer, the first material layer comprising lanthanum and oxygen, and the second material layer comprising oxygen and aluminum or hafnium.
2. The phase change memory structure of claim 1 , wherein the second material layer comprises oxygen and aluminum, the liner further comprising a third material layer on the second material layer, the third material layer comprising oxygen and lanthanum or hafnium.
3. The phase change memory structure of claim 1 , wherein the first material layer comprises polycrystalline lanthanum oxide.
4. The phase change memory structure of claim 1 , wherein the liner has a thickness of not more than 80 nm on the one or more sidewalls and the memory cell material stack has a height to width aspect ratio of not less than seven to one.
5. The phase change memory structure of claim 1 , wherein the liner has a first thickness on a first sidewall of the memory cell material stack and a second thickness on a second sidewall of the memory cell material stack, the first thickness not more than 60% of the second thickness.
6. The phase change memory structure of claim 1 , wherein the memory cell material stack comprises a first layer, the switching device over the first layer, a second layer over the switching device, the phase change material layer over the second layer, and a third layer over the phase change material layer, wherein the first layer, the second layer and the third layer each comprise carbon.
7. The phase change memory structure of claim 6 , wherein the switching device comprises a first chalcogenide material and the phase change material layer comprises a second chalcogenide material.
8. The phase change memory structure of claim 1 , further comprising:
a power supply;
an integrated memory circuit coupled to the power supply, the integrated memory circuit comprising a first access line, a second access line, and a memory cell coupled to the first and second access lines, the memory cell comprising the memory cell material stack and the liner.
9. A phase change memory structure, comprising
a memory cell material stack coupled to and between first and second electrodes, the memory cell material stack comprising at least a phase change material layer and a switching device; and
a liner on one or more sidewalls of the memory cell material stack, the liner comprising a first material layer on the one or more sidewalls and a second material layer on the first material layer, the first material layer comprising hafnium, silicon, and oxygen, and the second material layer comprising oxygen and aluminum or hafnium.
10. The phase change memory structure of claim 9 , wherein the second material layer comprises oxygen and aluminum, the liner further comprising a third material layer on the second material layer, the third material layer comprising hafnium and oxygen, or hafnium, silicon, and oxygen.
11. The phase change memory structure of claim 9 , wherein the liner has a thickness of not more than 80 nm on the one or more sidewalls and the memory cell material stack has a height to width aspect ratio of not less than seven to one.
12. The phase change memory structure of claim 9 , wherein the liner has a first thickness on a first sidewall of the memory cell material stack and a second thickness on a second sidewall of the memory cell material stack, the first thickness not more than 60% of the second thickness.
13. The phase change memory structure of claim 9 , wherein the memory cell material stack comprises a first layer, the switching device over the first layer, a second layer over the switching device, the phase change material layer over the second layer, and a third layer over the phase change material layer, wherein the first layer, the second layer and the third layer each comprise carbon.
14. The phase change memory structure of claim 13 , wherein the switching device comprises a first chalcogenide material and the phase change material layer comprises a second chalcogenide material.
15. The phase change memory structure of claim 9 , further comprising:
a power supply;
an integrated memory circuit coupled to the power supply, the integrated memory circuit comprising a first access line, a second access line, and a memory cell coupled to the first and second access lines, the memory cell comprising the memory cell material stack and the liner.
16. A phase change memory structure, comprising
a memory cell material stack coupled to and between first and second electrodes, the memory cell material stack comprising a phase change material layer and a switching device material layer; and
a multilayer liner on sidewalls of the phase change material layer and the switching device material layer, the multilayer liner comprising a layer of hafnium silicate or lanthanum oxide on the sidewalls of the phase change material layer and the switching device material layer and a layer of hafnium oxide or aluminum oxide on the layer of hafnium silicate or lanthanum oxide.
17. The phase change memory structure of claim 16 , wherein the layer of hafnium silicate or lanthanum oxide on the sidewalls of the phase change material layer is lanthanum oxide, the layer of hafnium oxide or aluminum oxide is aluminum oxide, and multilayer liner further comprises a layer of lanthanum oxide or hafnium oxide on the layer of aluminum oxide.
18. The phase change memory structure of claim 16 , wherein the layer of hafnium silicate or lanthanum oxide on the sidewalls of the phase change material layer is hafnium silicate, the layer of hafnium oxide or aluminum oxide is aluminum oxide, and multilayer liner further comprises a layer of hafnium silicate or hafnium oxide on the layer of aluminum oxide.
19. The phase change memory structure of claim 16 , wherein the memory cell material stack comprises a first layer, the switching device material layer over the first layer, a second layer over the switching device material layer, the phase change material layer over the second layer, and a third layer over the phase change material layer, wherein the first layer, the second layer and the third layer each comprise carbon.
20. The phase change memory structure of claim 16 , further comprising:
a power supply;
an integrated memory circuit coupled to the power supply, the integrated memory circuit comprising a first access line, a second access line, and a memory cell coupled to the first and second access lines, the memory cell comprising the memory cell material stack and the multilayer liner.