Multi-zone air turn for transport of a flexible substrate
Methods and apparatus for transporting a flexible substrate are provided. In one embodiment, an air turn is disclosed that includes a body, a porous cover disposed about a circumference of the body, and two seals. Each of the two seals are positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone. The second zone and third zone are each positioned outside of a respective seal. The body includes a first opening formed along a longitudinal axis of the body, and a plurality of second openings formed in the body at a position other than along the longitudinal axis.
1. An air turn, comprising:
a body;
a porous cover disposed about a circumference of the body; and
two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone, wherein:
each of the second zone and the third zone is positioned outside of a respective seal;
the body includes a first opening formed along a longitudinal axis of the body, the first opening comprises a transverse channel that is coupled to a central radial channel that extends from the transverse channel to an outer surface of the body; and
the body includes a plurality of second openings formed at a position other than along the longitudinal axis.
2. The air turn of claim 1 , wherein the body comprises a rod extending from an end of the body in the longitudinal axis.
3. The air turn of claim 2 , wherein the first opening is formed in the rod.
4. The air turn of claim 1 , wherein the central radial channel terminates at the outer surface of the body in the central zone.
5. The air turn of claim 1 , wherein each of the plurality of second openings comprises a transversely oriented channel that is parallel to the longitudinal axis.
6. The air turn of claim 5 , wherein each of the transversely oriented channels is coupled to a respective radially oriented channel that extends from the transversely oriented channel to an outer surface of the body.
7. The air turn of claim 6 , wherein a first radially oriented channel of the radially oriented channels terminates at the outer surface of the body in the second zone.
8. The air turn of claim 7 , wherein a second radially oriented channel of the radially oriented channels terminates at the outer surface of the body in the third zone.
9. An air turn, comprising:
a body having a rod extending from an end of the body along a longitudinal axis thereof;
a porous cover disposed about a circumference of the body; and
two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a plurality of outer zones positioned outside of the each seal, wherein the body includes:
a first opening formed along the longitudinal axis of the body, the first opening comprises a transverse channel that is coupled to a central radial channel that extends from the transverse channel to an outer surface of the body; and
a plurality of second openings formed in the body at a position other than along the longitudinal axis.
10. The air turn of claim 9 , wherein the first opening is formed in the rod.
11. The air turn of claim 9 , wherein the central radial channel terminates at the outer surface of the body in the central zone.
12. The air turn of claim 9 , wherein each of the plurality of second openings comprises a transversely oriented channel that is parallel to the longitudinal axis.
13. The air turn of claim 12 , wherein each of the transversely oriented channels is coupled to a respective radially oriented channel that extends from the transversely oriented channel to an outer surface of the body.
14. An air turn, comprising:
a body;
a porous cover disposed about a circumference of the body; and
two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone, wherein:
each of the second zone and the third zone is positioned outside of a respective seal;
the body includes a first opening formed along a longitudinal axis of the body;
the body includes a plurality of second openings formed at a position other than along the longitudinal axis; and
each of the plurality of second openings comprises a transversely oriented channel that is parallel to the longitudinal axis.
15. The air turn of claim 14 , wherein each of the transversely oriented channels is coupled to a respective radially oriented channel that extends from the transversely oriented channel to an outer surface of the body.
16. The air turn of claim 15 , wherein a first radially oriented channel of the radially oriented channels terminates at the outer surface of the body in the second zone.
17. The air turn of claim 16 , wherein a second radially oriented channel of the radially oriented channels terminates at the outer surface of the body in the third zone.
18. The air turn of claim 14 , wherein the body comprises a rod extending from an end of the body in the longitudinal axis, and wherein the first opening is formed in the rod.
19. An air turn, comprising:
a body having a rod extending from an end of the body along a longitudinal axis thereof;
a porous cover disposed about a circumference of the body; and
two seals, each of the two seals positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a plurality of outer zones positioned outside of the each seal, wherein the body includes:
a first opening formed along the longitudinal axis of the body; and
a plurality of second openings formed in the body at a position other than along the longitudinal axis, wherein each of the plurality of second openings comprises a transversely oriented channel that is parallel to the longitudinal axis.
20. The air turn of claim 19 , wherein each of the transversely oriented channels is coupled to a respective radially oriented channel that extends from the transversely oriented channel to an outer surface of the body.