Electro-acoustic resonator and method of forming thereof
An electro-acoustic resonator comprises a piezoelectric substrate on which an electrode structure is disposed. The electrode structure comprises a metal layer of aluminum and copper, a barrier layer forming a barrier against the diffusion of copper and another metal layer disposed on the barrier layer comprising aluminum. An AlCu intermetallic phase formed after an anneal is restricted to the portion beneath the barrier layer so that Galvano-corrosion of the electrode structure is avoided.
1. An electro-acoustic resonator, comprising:
a substrate, the substrate having piezoelectric properties; and
an electrode structure disposed on the substrate, the electrode structure comprising:
a metal layer, the metal layer comprising aluminum and copper, wherein, within the metal layer, a mass of the copper is substantially equal to a mass of the aluminum;
a barrier layer disposed on the metal layer and configured to form a barrier against a diffusion of copper; and
another metal layer disposed on the barrier layer, the other metal layer comprising aluminum.
2. The electro-acoustic resonator of claim 1 , wherein the metal layer comprises grains of an intermetallic phase comprising aluminum and copper.
3. The electro-acoustic resonator of any of claims 1 to 2 , wherein the barrier layer comprises a metal or a metal nitride.
4. The electro-acoustic resonator of any of claims 1 to 2 , wherein the barrier layer comprises at least one of titanium, chromium, cobalt, tantalum, tungsten, or a nitride of one of titanium, tantalum, or tungsten.
5. The electro-acoustic resonator of any of claims 1 to 2 , wherein a thickness of the metal layer is at least half of a thickness of the other metal layer.
6. The electro-acoustic resonator of any of claims 1 to 2 , wherein a thickness of the metal layer is larger than a thickness of the other metal layer.
7. The electro-acoustic resonator of any of claims 1 to 2 , wherein the substrate comprises lithium tantalate or lithium niobate.
8. The electro-acoustic resonator of any of claims 1 to 2 , further comprising a seed layer disposed between the substrate and the metal layer, the seed layer comprising at least one of titanium or chromium.
9. The electro-acoustic resonator of any of claims 1 to 2 , further comprising a seed layer disposed between the substrate and the metal layer, the seed layer comprising a metal, wherein the metal has a hardness of at least 1 gigapascal.
10. The electro-acoustic resonator of claim 9 , wherein the seed layer comprises a metal having one of a body centered cubic crystal structure or a hexagonal closed packed crystal structure.
11. The electro-acoustic resonator of claim 9 , wherein the seed layer comprises a metal selected from the group consisting of chromium, cobalt, niobium, molybdenum, and tungsten.
12. The electro-acoustic resonator of any of claims 1 to 2 , wherein the electro-acoustic resonator is a surface acoustic wave resonator and wherein the electrode structure forms an interdigital transducer arrangement.