Multi-shank heater
Provided is a multi-shank heater to be mounted on a support substrate, wherein, with a normal direction relative to the support substrate, which is a direction from the heater side toward the support substrate side, as a basis, the multi-shank heater has U-shaped pieces in which an angle θ of a planar direction of the U-shaped pieces, which is a direction from the heater side toward the support substrate side, is ±10° or more and ±60° or less. An object of the present invention is to provide a multi-shank heater capable of considerably improving the energy output even when the U-shaped pieces are arranged in a high density and have the same pitch.
1. A multi-shank heater to be mounted on a support substrate, wherein, with a normal direction relative to the support substrate, which is a direction from a heater side toward a support substrate side, as a basis, the multi-shank heater has U-shaped pieces in which an angle θ of a planar direction of the U-shaped pieces, which is a direction from the heater side toward the support substrate side, is +10° or more and ±60° or less, and a U-shaped piece in which the angle θ is +10° or more and +60° or less and a U-shaped piece in which the angle θ is −10° or more and −60° or less respectively exist at least at one or more locations.
2. The multi-shank heater according to claim 1 , wherein, among the U-shaped pieces configuring the heater, a U-shaped piece in which the angle is ±10° or more and ±60° or less exists at three or more locations.
3. The multi-shank heater according to claim 2 , wherein the U-shaped piece in which the angle θ is +10° or more and +60° or less and the U-shaped piece in which the angle θ is −10° or more and −60° or less are connected adjacent to each other, and such connected U-shaped pieces exist in a plurality.
4. The multi-shank heater according to claim 3 , wherein the support substrate is of a planar shape, a polyhedral shape, a slope (slide) shape, a curved shape or a cylindrical shape.
5. The multi-shank heater according to claim 4 , wherein the heater has MoSi 2 as its main component.
6. The multi-shank heater according to claim 1 , wherein the U-shaped piece in which the angle θ is +10° or more and +60° or less and the U-shaped piece in which the angle θ is −10° or more and −60° or less are connected adjacent to each other, and such connected U-shaped pieces exist in a plurality.
7. The multi-shank heater according to claim 1 , wherein the support substrate is of a planar shape, a polyhedral shape, a slope (slide) shape, a curved shape or a cylindrical shape.
8. The multi-shank heater according to claim 1 , wherein the heater has MoSi 2 as its main component.