Method for producing a semiconductor component having an insulating substrate, and semiconductor component having an insulating substrate
A method for producing a semiconductor component may include applying a semiconductor chip over a first main surface of an insulating substrate, thinning a second main surface of the insulating substrate where the second main surface has a roughness of more than 300 nm after thinning, applying a smoothing metal layer over the second main surface of the insulating substrate, and smoothing the smoothing metal layer. A semiconductor component may include a semiconductor chip, an insulating substrate where the semiconductor chip is arranged over a first main surface of the insulating substrate and a second main surface of the insulating substrate has a roughness Ra of more than 300 nm, and a smoothing metal layer over the second main surface.
1. A method for producing a semiconductor component, wherein the method comprises:
applying a plurality of semiconductor chips over a first main surface of an insulating substrate where the plurality of semiconductor chips are spaced apart laterally on the insulating substrate; wherein the insulating substrate is selected from the group consisting of SiN, AlN, NbO, MgO, or a combination thereof,
thinning a second main surface of the insulating substrate, wherein the second main surface has a roughness of more than 300 nm after thinning;
applying a smoothing metal layer over the second main surface of the insulating substrate;
smoothing the smoothing metal layer; and
applying a contact metal layer over the smoothing metal layer and patterning the contact metal layer.
2. The method as claimed in claim 1 , wherein the smoothing metal layer is structured after smoothing.
3. The method as claimed in claim 1 , wherein the structured contact metal layer is used as an etching mask for etching the smoothing metal layer.
4. The method as claimed in claim 1 , wherein the smoothing metal is selected from the group consisting of titanium, nickel, aluminum, a combination thereof.
5. The method as claimed in claim 1 , wherein the contact metal comprises one or more of gold, platinum, tin, titanium, or combinations thereof.
6. The method as claimed in claim 1 , wherein the semiconductor chip is an optoelectronic semiconductor chip.
7. The method as claimed in claim 1 , further comprising singulating a layer composite comprising a semiconductor chip of the plurality of semiconductor chips, the insulating substrate, and the smoothing metal layer.
8. The method as claimed in claim 7 , wherein the singulating is carried out after structuring the smoothing metal layer.
9. The method as claimed in claim 1 , wherein a thickness of the smoothing metal layer is approximately double the thickness of the roughening of the second main surface of the insulating substrate.
10. A semiconductor component comprising:
a semiconductor chip;
an insulating substrate, wherein the semiconductor chip is arranged over a first main surface of the insulating substrate and a second main surface of the insulating substrate has a roughness Ra of more than 300 nm; wherein the insulating substrate is selected from the group consisting of SiN, AlN, NbO, MgO, or a combination thereof,
a smoothing metal layer over the second main surface; wherein a horizontal extent of the smoothing metal layer is smaller than a horizontal extent of the insulating substrate; and
a patterned contact metal disposed over the smoothing metal layer.
11. The semiconductor component as claimed in claim 10 , wherein the roughness of a first main surface of the smoothing metal layer facing away from the insulating substrate is less than the roughness of the second main surface of the insulating substrate.
12. The semiconductor component as claimed in claim 10 , wherein the smoothing metal is selected from the group consisting of titanium, nickel, aluminum, or a combination thereof.
13. The semiconductor component as claimed in claim 10 , wherein the contact metal layer comprising one or more of gold, platinum, tin, titanium, or combinations thereof.
14. The semiconductor component as claimed in claim 10 , wherein the semiconductor chip is an optoelectronic semiconductor chip.
15. An optoelectronic device comprising the semiconductor component as claimed in claim 14 .
16. The semiconductor component as claimed in claim 10 , wherein a thickness of the smoothing metal layer is approximately double the thickness of the roughening of the second main surface of the insulating substrate.
17. A method for producing a semiconductor component, wherein the method comprises:
applying a semiconductor chip over a first main surface of an insulating substrate;
after applying the semiconductor chip, thinning a second main surface of the insulating substrate, wherein the second main surface has a roughness of more than 300 nm after thinning;
applying a smoothing metal layer over the second main surface of the insulating substrate; and
smoothing the smoothing metal layer; wherein a thickness of the smoothing metal layer is approximately double the thickness of the roughening of the second main surface of the insulating substrate.