Method for temporarily fastening a semiconductor chip to a surface, method for producing a semiconductor component and semiconductor component
In an embodiment a method for producing a semiconductor component comprising at least one semiconductor chip mounted on a surface, wherein the semiconductor chip is fixed on the surface by applying a solder compound to an assembling surface of the semiconductor chip, applying a metallic adhesive layer to a side of the solder compound facing away from the assembling surface, preheating the surface to a first temperature T 1 , bringing the metallic adhesive layer into mechanical contact in a solid state with the preheated surface, the metallic adhesive layer at least partially melting while it is brought into mechanical contact with the preheated surface, and subsequently cooling the surface to room temperature, the semiconductor chip being at least partially metallurgically bonded to the surface, and wherein the semiconductor chip is subsequently soldered to the surface to form a resulting solder connection.
1. A method for producing a semiconductor component comprising at least one semiconductor chip mounted on a surface, wherein the semiconductor chip is fixed on the surface by:
applying a solder compound to an assembling surface of the semiconductor chip,
applying a metallic adhesive layer to a side of the solder compound facing away from the assembling surface,
preheating the surface to a first temperature T 1 ,
bringing the metallic adhesive layer into mechanical contact in a solid state with the preheated surface, the metallic adhesive layer at least partially melting while it is brought into mechanical contact with the preheated surface, and
subsequently cooling the surface to room temperature, the semiconductor chip being at least partially metallurgically bonded to the surface, and
wherein the semiconductor chip is subsequently soldered to the surface to form a resulting solder connection.
2. The method according to claim 1 , wherein the metallic adhesive layer has a solidus temperature which is ≤T 1 .
3. The method according to claim 1 , wherein the solder compound has a solidus temperature which is >T 1 .
4. The method according to claim 1 , further comprising applying a barrier layer between the solder compound and the metallic adhesive layer.
5. The method according to claim 4 , wherein applying the barrier layer comprises vapour depositing or sputtering the barrier layer.
6. The method according to claim 4 , wherein applying the barrier layer comprises depositing the barrier layer in a thickness between 10 μm and 50 μm.
7. The method according to claim 4 , wherein the barrier layer comprises a material selected from the group consisting of Ti and Ni.
8. The method according to claim 1 , wherein the solder compound comprises Sn or a Sn-based alloy.
9. The method according to claim 1 , wherein the metallic adhesive layer comprises a material selected from the group consisting of SnIn, SnBi and In.
10. The method according to claim 1 , wherein applying the solder compound comprises electroplating the solder compound on the assembling surface.
11. The method according to claim 1 , wherein applying the solder compound comprises depositing the solder compound in a thickness between 20 μm and 50 μm inclusive.
12. The method according to claim 1 , wherein applying the metallic adhesive layer comprises vapour depositing or sputtering the metallic adhesive layer.
13. The method according to claim 1 , wherein applying the metallic adhesive layer comprises depositing the metallic adhesive layer in a thickness between 1 μm to 5 μm inclusive.
14. The method according to claim 1 , wherein the surface comprises of an assembling surface of a printed circuit board or of a housing.
15. The method according to claim 1 , wherein soldering is carried out in a reducing atmosphere.
16. The method according to claim 1 , wherein soldering the semiconductor chip comprises soldering the semiconductor chip at a second temperature which is greater than or equal to a liquidus temperature of the solder compound.
17. The method according to claim 1 , wherein the solder compound and the metallic adhesive layer melt completely during soldering, and wherein the resulting solder connection is formed, which comprises an alloy which is different in its composition from the solder compound and the metallic adhesive layer.
18. The semiconductor component comprising:
the at least one semiconductor chip mounted on the surface produced by the method according to claim 1 .
19. The method according to claim 1 , wherein soldering is pressure-free.
20. A method for producing a semiconductor component comprising at least one semiconductor chip mounted on a surface, wherein the semiconductor chip is fixed on the surface by:
applying a solder compound to an assembling surface of the semiconductor chip,
applying a metallic adhesive layer to a side of the solder compound facing away from the assembling surface,
preheating the surface to a first temperature T 1 ,
bringing the metallic adhesive layer into mechanical contact in a solid state with the preheated surface, the metallic adhesive layer at least partially melting while it is brought into mechanical contact with the preheated surface, and
subsequently cooling the surface to room temperature, the semiconductor chip being at least partially metallurgically bonded to the surface, and
wherein the semiconductor chip is subsequently soldered to the surface to form a resulting solder connection,
wherein the solder compound and the metallic adhesive layer melt completely during soldering, and
wherein the resulting solder connection is formed, which comprises an alloy which is different in its composition from the solder compound and the metallic adhesive layer.