Diffusion barrier films enabling the stability of lithium
Lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same are provided. In one implementation, an anode electrode is provided. The anode electrode comprises a first diffusion barrier layer formed on a copper foil. The first diffusion barrier layer comprises titanium (Ti), molybdenum (Mo), tungsten (W), zirconium (Zr), hafnium (H), niobium (Nb), tantalum (Ta), or combinations thereof. The anode electrode further comprises a wetting layer formed on the first diffusion barrier layer. The wetting layer is selected from silicon (Si), tin (Sn), aluminum (Al), germanium (Ge), antimony (Sb), lead (Pb), bismuth (Bi), gallium (Ga), indium (In), zinc (Zn), cadmium (Cd), magnesium (Mg), oxides thereof, nitrides thereof, or combinations thereof. The anode electrode further comprises a lithium metal layer formed on the wetting layer.
1. An anode electrode structure, comprising:
a copper foil;
a first diffusion barrier layer formed on the copper foil, wherein the first diffusion barrier layer comprises titanium (Ti), molybdenum (Mo), tungsten (W), zirconium (Zr), hafnium (Hf), niobium (Nb), tantalum (Ta), or combinations thereof;
a wetting layer formed on the first diffusion barrier layer, wherein the wetting layer is selected from silicon (Si), tin (Sn), aluminum (Al), germanium (Ge), antimony (Sb), lead (Pb), bismuth (Bi), gallium (Ga), indium (In), zinc (Zn), cadmium (Cd), magnesium (Mg), oxides thereof, nitrides thereof, or combinations thereof; and
a lithium metal layer formed on the wetting layer.
2. The anode electrode structure of claim 1 , further comprising:
a second diffusion barrier layer formed between the first diffusion barrier layer and the wetting layer, wherein the second diffusion barrier layer is different from the first diffusion barrier layer.
3. The anode electrode structure of claim 2 , wherein the second diffusion barrier layer comprises titanium (Ti), molybdenum (Mo), tungsten (W), zirconium (Zr), hafnium (Hf), niobium (Nb), tantalum (Ta), or combinations thereof.
4. The anode electrode structure of claim 3 , wherein the first diffusion barrier layer is a tantalum layer and the second diffusion barrier layer is a titanium layer.
5. The anode electrode structure of claim 3 , wherein the first diffusion barrier layer is a tantalum nitride layer and the second diffusion barrier layer is a titanium layer.
6. The anode electrode structure of claim 1 , wherein the lithium metal layer forms an alloy with the wetting layer.
7. The anode electrode structure of claim 1 , wherein the first diffusion barrier layer has a thickness from about 100 nanometers to about 200 nanometers.
8. The anode electrode structure of claim 7 , wherein the wetting layer has a thickness from about 5 nanometers to about 20 nanometers.
9. A battery incorporating the anode electrode structure of claim 1 .
10. A method of forming an electrode structure, comprising:
forming a first diffusion barrier layer on a copper foil, wherein the first diffusion barrier layer comprises titanium (Ti), molybdenum (Mo), tungsten (W), zirconium (Zr), hafnium (Hf), niobium (Nb), tantalum (Ta), or combinations thereof;
forming a wetting layer on the first diffusion barrier layer, wherein the wetting layer is selected from silicon (Si), tin (Sn), aluminum (Al), germanium (Ge), antimony (Sb), lead (Pb), bismuth (Bi), gallium (Ga), indium (In), zinc (Zn), cadmium (Cd), magnesium (Mg), oxides thereof, nitrides thereof, or combinations thereof; and
forming a lithium metal layer on the wetting layer.
11. The method of claim 10 , further comprising:
forming a second diffusion barrier layer on the first diffusion barrier layer prior to forming the wetting layer, wherein the second diffusion barrier layer is different from the first diffusion barrier layer.
12. The method of claim 11 , wherein the second diffusion barrier layer comprises titanium (Ti), molybdenum (Mo), tungsten (W), zirconium (Zr), hafnium (Hf), niobium (Nb), tantalum (Ta), or combinations thereof.
13. The method of claim 10 , wherein the first diffusion barrier layer is a tantalum layer deposited by a PVD sputtering process using a tantalum target.
14. The method of claim 10 , wherein the first diffusion barrier layer is a tantalum nitride layer deposited by a PVD sputtering process using a tantalum target in a nitrogen-containing environment.
15. The method of claim 11 , wherein the second diffusion barrier layer is a titanium layer deposited by a PVD sputtering process using a titanium target.
16. The method of claim 11 , wherein the second diffusion barrier layer is a titanium nitride layer deposited by a PVD sputtering process using a titanium target in a nitrogen-containing environment.
17. The method of claim 10 , wherein the wetting layer is a silicon layer deposited by a PVD sputtering process using a silicon target.
18. The method of any of claim 10 , further comprising:
guiding the copper foil in a vacuum chamber using a roller arrangement.
19. An integrated processing tool operable to form lithium coated electrodes, comprising:
a reel-to-reel system operable to transport a continuous sheet of material through following processing chambers:
a first processing chamber operable to deposit a first diffusion barrier layer on the continuous sheet of material;
a second processing chamber operable to deposit a second diffusion barrier layer on the first diffusion barrier layer;
a third processing chamber operable to deposit a wetting layer on the second diffusion barrier layer; and
a fourth processing chamber operable to deposit a thin film of lithium metal on the second diffusion barrier layer.
20. The integrated processing tool of claim 19 , wherein the continuous sheet of material is a copper foil.