IP Library › Granted Patent US 11,773,849
Granted Patent B2
US 11,773,849 · App. 17/063,912 · Granted Oct 3, 2023

Vacuum pump, scroll pump, and manufacturing method for such

Inventors: Michael Willig (Lahnau, DE); Jan Hofmann (Gruenbeg, DE); Jonas Becker (Bischoffen, DE); Gernot Bernhardt (Huettenberg, DE); Verena Wangorsch (Wetzlar, DE); Stefan Kallenborn (Wetzlar, DE); Wolfgang Soehngen (Waldsolms, DE); Heiko Schaefer (Solms-Niederbiel, DE); Erhard Harapat (Asslar, DE); Lars Pauli (Solms, DE)
Assignee: PFEIFFER VACUUM GmbH
F04C18/0215F04C25/02F04C29/04F04C2220/10F04C2270/18
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Quick Facts
Patent No.
US 11,773,849
App. No.
17/063,912
Granted
Oct 3, 2023
Kind
B2
Abstract

The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Claims (35)

1. A scroll pump, comprising:

at least one pressure sensor integrated into the scroll pump; and

a cooling device,

wherein the at least one pressure sensor is disposed in a cooling air flow of the cooling device,

wherein the at least one pressure sensor is disposed at least substantially at a start of the cooling air flow adjacent to the cooling device,

wherein the at least one pressure sensor is positioned within an air guide hood of the scroll pump, and

wherein a cable is attached to the at least one pressure sensor and passes through the air guide hood.

2. The scroll pump according to claim 1 , wherein the cooling device is a fan.

3. The scroll pump according to claim 1 ,

further comprising a fixed-position spiral component,

wherein the at least one pressure sensor is disposed within the air guide hood and is screwed into the fixed-position spiral component.

4. The scroll pump according to claim 1 , wherein the at least one pressure sensor is configured to measure a suction pressure of the scroll pump.

5. The scroll pump according to claim 1 , wherein the at least one pressure sensor is configured to measure a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section.

6. The scroll pump according to claim 1 , wherein the at least one pressure sensor is screwed into a component of the scroll pump.

7. The scroll pump according to claim 6 , wherein the component into which the at least one pressure sensor is screwed is a housing element and/or a fixed-position spiral component.

8. The scroll pump according to claim 6 , wherein the at least one pressure sensor is axially screwed into a fixed-position spiral component.

9. The scroll pump according to claim 1 , wherein the at least one pressure sensor is screwed into a component of the scroll pump.

10. The scroll pump according to claim 9 , wherein a control device is provided that is configured to automatically detect the at least one pressure sensor upon connection to the control device.

11. A scroll pump, comprising:

at least one pressure sensor integrated into the scroll pump;

a channel; and

a cooling device,

wherein the channel opens into a non-pump-active outer region between a spiral wall of a fixed-position spiral component and a spiral wall of a movable spiral component and/or the channel opens into a pump-active region between the spiral wall of the fixed-position spiral component and the spiral wall of the movable spiral component,

wherein the at least one pressure sensor is positioned within an air guide hood of the scroll pump and a cable is attached to the at least one pressure sensor and passes through the air guide hood, and

wherein the at least one pressure sensor is disposed in a cooling air flow of the cooling device.

12. The scroll pump according to claim 11 , wherein the cooling device is a fan.

13. The scroll pump according to claim 12 , wherein the at least one pressure sensor is disposed at least substantially at a start of the cooling air flow adjacent to the fan.

14. The scroll pump according to claim 11 ,

wherein the at least one pressure sensor is disposed within the air guide hood and is screwed into the fixed-position spiral component.

15. The scroll pump according to claim 11 , wherein the at least one pressure sensor is configured to measure a suction pressure of the scroll pump.

16. The scroll pump according to claim 11 , wherein the at least one pressure sensor is configured to measure a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section.

17. The scroll pump according to claim 11 , wherein the at least one pressure sensor is screwed into a component of the scroll pump.

18. The scroll pump according to claim 17 , wherein the component into which the at least one pressure sensor is screwed is a housing element and/or the fixed-position spiral component.

19. The scroll pump according to claim 17 , wherein the at least one pressure sensor is axially screwed into the fixed-position spiral component.

20. The scroll pump according to claim 11 , wherein a control device is provided that is configured to automatically detect the at least one pressure sensor upon connection to the control device.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 8, 2020
From: WILLIG, MICHAEL; HOFMANN, JAN; BECKER, JONAS; BERNHARDT, GERNOT; WANGORSCH, VERENA; KALLENBORN, STEFAN; SOEHNGEN, WOLFGANG; SCHAEFER, HEIKO; HARAPAT, ERHARD; PAULI, LARS
To: PFEIFFER VACUUM GMBH
Reel/Frame 054577/0715 →
Priority Claims (2)
EP 19201745 · Oct 7, 2019 · regional
EP 19201749 · Oct 7, 2019 · regional
Continuity (1)
Related Publication 20210102536A1 · Apr 8, 2021