Method of placing a micro device to a receiver substrate
In a micro-device integration process, a donor substrate is provided on which to conduct the initial manufacturing and pixelation steps to define the micro devices, including functional, e.g. light emitting layers, sandwiched between top and bottom conductive layers. The microdevices are then transferred to a system substrate for finalizing and electronic control integration. The transfer may be facilitated by various means, including providing a continuous light emitting functional layer, breakable anchors on the donor substrates, temporary intermediate substrates enabling a thermal transfer technique, or temporary intermediate substrates with a breakable substrate bonding layer.
1. A method of placing at least one micro device to a receiver substrate, the method comprising:
providing a housing structure surrounding the at least one micro device;
providing an anchor to hold the at least one micro device inside the housing structure;
forming a stack comprising electrodes and an electroactive polymer layer underneath the at least one micro device on a donor substrate; and
applying a voltage to the stack to cause the stack to thin and to bring the at least one micro device closer to a surface of the receiver substrate.
2. The method of claim 1 , wherein the anchor releases the micro device on the surface of the receiver substrate by one of a push force or pull force.
3. The method of claim 1 , wherein the stack further comprises an absorption layer that converts a light to a thermal change.
4. The method of claim 1 , wherein an electroactive polymer layer changes to gas and a pressure created by the change pushes the at least one micro device to the surface of the receiver substrate.