IP Library Granted Patent US 11,444,214
Granted Patent B2
US 11,444,214 · App. 17/099,536 · Granted Sep 13, 2022

Conductive strip based mask for metallization of semiconductor devices

Inventor: Nils-Peter Harder (San Jose, CA)
Assignee: Total Marketing Services
H01L31/022441H01L31/022425H01L31/18Y02E10/50
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Quick Facts
Patent No.
US 11,444,214
App. No.
17/099,536
Granted
Sep 13, 2022
Kind
B2
Abstract

Methods of manufacturing a semiconductor device, and resulting semiconductor device are described. In an example, the method for manufacturing a semiconductor device include forming a semiconductor region and forming a metal seed region over the semiconductor region. The method can include placing a conductive strip over a first portion of the metal region, where the conductive strip is formed over the semiconductor region. The method can include bonding a contacting portion of the conductive strip to the first portion the metal region. The method can include etching a second portion of the metal region and where the conductive strip inhibits etching of the first portion of the metal region. In an example, the conductive strip can have a coating. In one example, the semiconductor device can be a solar cell.

Claims (29)

1. A solar cell, comprising:

a first doped polysilicon region disposed above a substrate;

a first metal seed region disposed over the first doped polysilicon region; and

a first coated conductive wire disposed over, and thermally compressed to, the first metal seed region, wherein a portion the first coated conductive wire flatly contacts the first metal seed region and the first coated conductive wire comprises a coating completely surrounding a first conductive wire.

2. The solar cell of claim 1 , wherein the first doped polysilicon region is formed over a back side of the solar cell.

3. The solar cell of claim 1 , wherein the first doped polysilicon region is formed over a front side of the solar cell.

4. The solar cell of claim 1 , wherein the coating comprises a thickness greater than a thickness of the first metal seed region.

5. The solar cell of claim 1 , wherein the first coated conductive wire comprises an aluminum coating.

6. The solar cell of claim 1 , wherein the coating of the first coated conductive wire and the first metal seed region comprise substantially the same metal.

7. The solar cell of claim 1 , wherein the first conductive wire comprises a metal selected from the group consisting of copper, nickel and aluminum.

8. The solar cell of claim 1 , wherein the first conductive wire comprises a thickness in a range of 50-1200 nanometers.

9. The solar cell of claim 1 , wherein the first conductive wire is placed substantially parallel to the first doped polysilicon region.

10. The solar cell of claim 1 , wherein the first metal seed region comprises a metal selected from the group consisting of aluminum, nickel, copper, titanium, and tungsten.

11. The solar cell of claim 1 , wherein the first coated conductive wire comprises a thickness greater than 1200 nanometers.

12. A solar cell, comprising:

a first doped polysilicon region disposed above a substrate;

a second doped polysilicon region disposed above the substrate;

a first metal seed region disposed over the first doped polysilicon region;

a second metal seed region disposed over the second doped polysilicon region;

a first coated conductive wire disposed over, and thermally compressed to, the first metal seed region, wherein a portion the first coated conductive wire flatly contacts the first metal seed region and the first coated conductive wire comprises a coating completely surrounding a first conductive wire; and

a second coated conductive wire disposed over, and thermally compressed to, the second metal seed region, wherein a portion the second coated conductive wire flatly contacts the second metal seed region and the second coated conductive wire comprises a coating completely surrounding a second conductive wire.

13. The solar cell of claim 12 , wherein the first doped polysilicon region is formed over a back side of the solar cell and the second doped polysilicon region is formed over a front side of the solar cell.

14. The solar cell of claim 12 , wherein the coating of the first and second coated conductive wires comprises a thickness greater than a thickness of the first and second metal seed regions.

15. The solar cell of claim 12 , wherein the coating of the first and second coated conductive wires and the first and second metal seed regions comprise substantially the same metal.

16. The solar cell of claim 12 , wherein the coating of the first coated conductive wire, second coated conductive wire, first metal seed region and the second metal seed region comprise substantially the same metal.

17. The solar cell of claim 12 , wherein the first and second coated conductive wire comprises an aluminum coating.

18. The solar cell of claim 12 , wherein the first and second coated conductive wires comprise a metal selected from the group consisting of copper, nickel and aluminum.

19. The solar cell of claim 12 , wherein the first and second coated conductive wires are placed substantially parallel to the first and second doped polysilicon regions.

20. The solar cell of claim 12 , wherein the first and second metal seed regions comprise a metal selected from the group consisting of aluminum, nickel, copper, titanium, and tungsten.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 8, 2025
From: TOTALENERGIES SE; TOTALENERGIES SOLAR INTL
To: MAXEON SOLAR PTE. LTD.
Reel/Frame 073059/0081 →
SECURITY INTEREST Recorded Jun 27, 2024
From: MAXEON SOLAR PTE. LTD.
To: DB TRUSTEES (HONG KONG) LIMITED
Reel/Frame 067924/0062 →
SECOND LIEN SECURITY INTEREST AGREEMENT Recorded Jun 26, 2024
From: MAXEON SOLAR PTE. LTD
To: DB TRUSTEES (HONG KONG) LIMITED
Reel/Frame 071343/0553 →
SECURITY INTEREST Recorded Jun 5, 2024
From: MAXEON SOLAR PTE. LTD.
To: DB TRUSTEES (HONG KONG) LIMITED
Reel/Frame 067637/0598 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 24, 2023
From: SUNPOWER CORPORATION
To: MAXEON SOLAR PTE. LTD.
Reel/Frame 062699/0875 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 17, 2020
From: HARDER, NILS-PETER
To: TOTAL MARKETING SERVICES
Reel/Frame 054390/0114 →