Electronic devices having bilayer capping layers and/or barrier layers
In various embodiments, electronic devices such as thin-film transistors and/or touch-panel displays incorporate bilayer capping layers and/or barrier layers.
1. An electronic device comprising:
a substrate; and
a conductive feature disposed over the substrate, the conductive feature comprising:
(a) disposed over the substrate, a bilayer barrier layer comprising a base layer and a dielectric layer disposed thereover, wherein (i) the base layer comprises an alloy of Cu and/or Mo with 0.5 weight %-50 weight % of one or more anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg, and (ii) the dielectric layer comprises an oxide, nitride, or oxynitride of the one or more anodizable alloying elements, and
(b) disposed over the barrier layer, a conductor layer comprising at least one of Cu, Ag, Al, or Au.
2. The electronic device of claim 1 , wherein the substrate comprises glass.
3. The electronic device of claim 1 , wherein the substrate comprises silicon.
4. The electronic device of claim 3 , wherein the substrate comprises amorphous silicon.
5. The electronic device of claim 1 , wherein the base layer comprises an alloy of (i) Mo and Nb, (ii) Mo, Ta, and Nb, (iii) Mo, Nb, and Ti, (iv) Mo and Ti, or (v) Mo, Nb, and Zr.
6. The electronic device of claim 1 , wherein the base layer comprises an alloy of Cu, Ta, and Zr.
7. The electronic device of claim 1 , wherein the dielectric layer is substantially free of Cu and/or Mo.
8. The electronic device of claim 1 , wherein the base layer comprises:
an interfacial portion disposed beneath and in contact with the dielectric layer; and
a bottom portion disposed beneath the interfacial portion.
9. The electronic device of claim 8 , wherein a concentration of at least one of the one or more anodizable alloying elements within the interfacial portion is less than a concentration of at least one of the one or more anodizable alloying elements within the bottom portion.
10. The electronic device of claim 8 , wherein the interfacial portion is substantially free of at least one of the one or more anodizable alloying elements.
11. The electronic device of claim 8 , wherein the interfacial portion is substantially free of all of said one or more anodizable alloying elements.
12. The electronic device of claim 1 , wherein the conductive feature comprises, disposed over the conductor layer, a bilayer capping layer comprising a second base layer and a second dielectric layer disposed thereover, wherein (i) the second base layer comprises an alloy of Cu and/or Mo with 0.5 weight %-50 weight % of one or more second anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg, and (ii) the second dielectric layer comprises an oxide, nitride, or oxynitride of the one or more second anodizable alloying elements.
13. The electronic device of claim 12 , wherein the base layer comprises an alloy the same as that of the second base layer.
14. The electronic device of claim 12 , wherein the base layer comprises an alloy different from that of the second base layer.
15. The electronic device of claim 1 , wherein the conductive feature comprises an electrode.
16. The electronic device of claim 1 , wherein the conductive feature comprises an interconnect.
17. The electronic device of claim 16 , wherein the conductive feature is electrically coupled to a conductive sensor.
18. The electronic device of claim 17 , wherein the conductive sensor comprises a substantially transparent conductive material.
19. The electronic device of claim 17 , wherein the conductive sensor comprises indium tin oxide.
20. The electronic device of claim 1 , wherein the base layer comprises an alloy of Mo with 0.5 weight %-50 weight % of one or more anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg.