Transversely-excited film bulk acoustic resonator with a back-side dielectric layer and an etch-stop layer
Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. A back-side dielectric layer is formed on the back surface. An etch-stop layer is sandwiched between the surface of the substrate and the back-side dielectric layer. A portion of the piezoelectric plate, the back-side dielectric layer, and the etch-stop layer forms a diaphragm spanning a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate with interleaved fingers of the IDT disposed on the diaphragm. The etch-stop layer is impervious to an etch process used to form the cavity.
1. An acoustic resonator device comprising:
a substrate including a plurality of materials and a cavity disposed therein;
a piezoelectric layer that is attached to the substrate by a dielectric layer;
an etch-stop layer sandwiched between the substrate and the dielectric layer; and
an interdigital transducer (IDT) on the piezoelectric layer and having interleaved fingers disposed on a portion of the piezoelectric layer that is over the cavity,
wherein the etch-stop layer is impervious to an etch process used to form the cavity in the substrate, and
wherein the dielectric layer is a first dielectric layer and a second dielectric layer is disposed over and between the IDT fingers, wherein a sum of the thickness of the first and second dielectric layers is greater than 35% of a thickness of the piezoelectric layer.
2. The device of claim 1 , further comprising a bonding layer between the etch-stop layer and the substrate.
3. The device of claim 2 , wherein the substrate is silicon and the bonding layer is silicon dioxide.
4. The device of claim 1 , wherein the piezoelectric layer is one of lithium niobate and lithium tantalate.
5. The device of claim 1 , wherein the etch-stop layer is one of silicon dioxide, sapphire, a nitride, silicon carbide, and diamond.
6. The device of claim 1 , wherein the dielectric layer is silicon dioxide.
7. The device of claim 1 , wherein a thickness of the etch-stop layer is less than or equal to 20% of a thickness of the piezoelectric layer.
8. A filter device comprising:
a plurality of bulk acoustic wave resonators including a shunt resonator and a series resonator, wherein each of the shunt and series resonators comprises:
a substrate including a plurality of materials and a cavity disposed therein;
a piezoelectric layer that is attached to the substrate by a dielectric layer;
an etch-stop layer sandwiched between the substrate and the dielectric layer; and
a conductor pattern on the piezoelectric layer and including an interdigital transducer (IDT) that includes interleaved fingers disposed on a portion of the respective piezoelectric layer that is over the cavity; and
wherein an additional dielectric layer is disposed on the piezoelectric layer of the shunt resonator and between the interleaved fingers of the IDT of the shunt resonator,
wherein the etch-stop layer is impervious to an etch process used to form the respective cavity of each of the shunt and series resonators, and
wherein a sum of a thickness of the dielectric layer and the additional dielectric layer of the shunt resonator is greater than 35% of a thickness of the piezoelectric layer of the shunt resonators.
9. The filter device of claim 8 , further comprising a bonding layer between the etch-stop layer and the substrate of each of the shunt and series resonators.
10. The filter device of claim 9 , wherein the substrate is silicon and the bonding layer is silicon dioxide.
11. The filter device of claim 8 , wherein the etch-stop layer of each of the shunt and series resonators is one of silicon dioxide, sapphire, a nitride, silicon carbide, and diamond.
12. The filter device of claim 8 , wherein the dielectric layer of each of the shunt and series resonators is silicon dioxide.
13. An acoustic resonator device comprising:
a substrate including a plurality of materials and a cavity disposed therein;
a piezoelectric layer that is attached to the substrate by a dielectric layer;
an etch-stop layer sandwiched between the substrate and the dielectric layer; and
an interdigital transducer (IDT) on the piezoelectric layer and having interleaved fingers disposed on a portion of the piezoelectric layer that is over the cavity,
wherein the etch-stop layer is impervious to an etch process used to form the cavity in the substrate, and
wherein a thickness of the etch-stop layer is between 4% and 6% of a thickness of the piezoelectric layer.