Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch

1. An acoustic resonator device comprising:

a substrate;

a piezoelectric plate at least partially supported by the substrate; and

an interdigital transducer (IDT) including interleaved fingers on the piezoelectric plate, the IDT comprising multiple copies of a unit cell juxtaposed along a length of the IDT,

wherein each unit cell comprises:

a first pitch/mark zone having a pitch between adjacent interleaved fingers equal to a first pitch value P 1 and a mark of the interleaved fingers equal to a first mark value M 1 , and

a second pitch/mark zone having a pitch between adjacent interleaved fingers equal to a second pitch value P 2 not equal to P 1 and a mark of the interleaved fingers equal to a second mark value M 2 not equal to M 1 ,

wherein a radio frequency signal applied to the IDT causes the first pitch/mark zone and the second pitch/mark zone to excite a same shear primary acoustic mode in the piezoelectric plate.

2. The acoustic resonator device of claim 1 , wherein each first pitch/mark zone and each second pitch/mark zone comprise two or more pairs of interleaved fingers.

3. The acoustic resonator device of claim 1 , each unit cell further comprising:

three or more pitch/mark zones including the first pitch/mark zone and the second pitch/mark zone, each of the three or more pitch/mark zones having a pitch between adjacent interleaved fingers equal to a respective unique pitch value and a mark of the interleaved fingers equal to a respective unique mark value,

wherein a radio frequency signal applied to the IDT causes excitation of the same shear primary acoustic mode by all of the three or more pitch/mark zones.

4. The acoustic resonator device of claim 3 , wherein each of the three or more pitch/mark zone comprises two or more pairs of interleaved fingers.

5. The acoustic resonator device of claim 1 , wherein

a portion of the piezoelectric plate forms a diaphragm spanning a cavity, and

the interleaved fingers of the IDT are on the diaphragm.

6. The acoustic resonator device of claim 1 , further comprising:

an acoustic Bragg reflector sandwiched between the substrate and the piezoelectric plate.

7. An acoustic resonator device comprising:

a substrate;

a piezoelectric plate at least partially supported by the substrate; and

an interdigital transducer (IDT) including interleaved fingers on the piezoelectric plate, the IDT comprising:

a first set of fingers extending from a first busbar, and

a second set of fingers extending from a second busbar, the second set of fingers parallel to and interleaved with the first set of fingers, wherein

the pitch and mark of at least a part of the IDT alternate between a first pitch/mark combination P1/M1 and a second pitch/mark combination P2/M2 along a length of the IDT, where P1≠P2 and M1≠M2.

8. The acoustic resonator device of claim 7 , wherein a radio frequency signal applied to the IDT causes portions of the IDT having the first pitch/mark combination and portions of the IDT having the second pitch/mark combination to excite a same shear primary acoustic mode in the piezoelectric plate.

9. The acoustic resonator device of claim 7 , wherein

a mark of all fingers in the first set of fingers is (M1+M2)/2,

marks of fingers of the second set of fingers alternate between M1 and M2, and

center-to-center spacing of the second set of fingers is P1+P2.

10. The acoustic resonator device of claim 7 , wherein the pitch and mark of the IDT alternate between two periods of the first pitch/mark combination and two periods of the second pitch/mark combination.

11. The acoustic resonator device of claim 7 , wherein the pitch and mark of the IDT alternate between three periods of the first pitch/mark combination and three periods of the second pitch/mark combination.

12. The acoustic resonator device of claim 7 , wherein

a portion of the piezoelectric plate forms a diaphragm over a cavity, and

the interleaved fingers of the IDT are on the diaphragm.

13. The acoustic resonator device of claim 7 , further comprising:

an acoustic Bragg reflector sandwiched between the substrate and the piezoelectric plate.

14. An acoustic resonator device comprising:

a substrate;

a piezoelectric plate above the substrate; and

an interdigital transducer (IDT) including interleaved fingers on the piezoelectric plate, the IDT comprising:

a first set of fingers extending from a first busbar, and

a second set of fingers extending from a second busbar, the second set of fingers parallel to and interleaved with the first set of fingers, wherein

the pitch and mark of at least part of the IDT cycle between a first pitch/mark combination P1/M1, a second pitch/mark combination P2/M2, and a third pitch/mark combination P3/M3 along a length of the IDT, where P1≠P2≠P3 and M1≠M2≠M3.

15. The acoustic resonator device of claim 14 , wherein a radio frequency signal applied to the IDT causes portions of the IDT having the first pitch/mark combination, portions of the IDT having the second pitch/mark combination, and portions of the IDT having the third pitch/mark combination to excite a same shear primary acoustic mode in the piezoelectric plate.

16. The acoustic resonator device of claim 14 , wherein the pitch and mark of the IDT alternate between two periods of the first pitch/mark combination, two periods of the second pitch/mark combination, and two periods of the third pitch/mark combination.

17. The acoustic resonator device of claim 7 , wherein

a portion of the piezoelectric plate forms a diaphragm over a cavity, and

the interleaved fingers of the IDT are on the diaphragm.

18. The acoustic resonator device of claim 7 , further comprising:

an acoustic Bragg reflector between the substrate and the piezoelectric plate.