IP Library Granted Patent US 11,569,343
Granted Patent B2
US 11,569,343 · App. 17/142,489 · Granted Jan 31, 2023

Metal-insulator-metal capacitors

Inventors: Kyung Wook Kwon (Chungcheongbuk-do, KR); Mun Young Lee (Chungcheongbuk-do, KR); Myoung Kyun Choi (Chungcheongbuk-do, KR)
Assignee: SK HYNIX SYSTEM IC INC.
H01L28/65H01L23/5223H01L28/56
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Quick Facts
Patent No.
US 11,569,343
App. No.
17/142,489
Granted
Jan 31, 2023
Kind
B2
Abstract

A metal-insulator-metal (MIM) capacitor includes a first group of metal contacts disposed on a first region of an isolation layer spaced apart from each other in a first direction, a second group of metal contacts disposed on a second region of the isolation layer spaced apart from each other in the first direction, a dielectric layer disposed between the first group of metal contacts and the second group of metal contacts, a first metal electrode disposed to contact the top surfaces of the first group of metal contacts, and a second metal electrode disposed to contact the top surfaces of the second group of metal contacts.

Claims (13)

1. A metal-insulator-metal (MIM) capacitor comprising:

a first group of metal contacts disposed on a first region of an isolation layer on a semiconductor layer spaced apart from each other in a first direction;

a second group of metal contacts disposed on a second region of the isolation layer spaced apart from each other in the first direction;

a dielectric layer disposed between the first group of metal contacts and the second group of metal contacts;

a first metal electrode disposed to contact top surfaces of the first group of metal contacts; and

a second metal electrode disposed to contact top surfaces of the second group of metal contacts,

wherein the first group of metal contacts are electrically coupled by the first metal electrode, and the second group of metal contacts are electrically coupled by the second metal electrode, and

wherein the second group of metal contacts face respective metal contacts of the first group of metal contacts in a second direction intersecting the first direction.

2. The MIM capacitor of claim 1 , wherein the number of the first group of metal contacts is equal to the number of the second group of metal contacts.

3. The MIM capacitor of claim 1 , wherein the isolation layer is a trench isolation layer.

4. The MIM capacitor of claim 1 ,

wherein the first metal electrode has a planar shape; and

wherein the second metal electrode has a planar shape.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2024
From: SK HYNIX SYSTEM IC INC.
To: SK HYNIX SYSTEM IC (WUXI) CO., LTD.
Reel/Frame 067889/0779 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 6, 2021
From: KWON, KYUNG WOOK; LEE, MUN YOUNG; CHOI, MYOUNG KYUN
To: SK HYNIX SYSTEM IC INC.
Reel/Frame 054826/0620 →