Semiconductor device, and method of manufacturing semiconductor device
A p-type semiconductor region is formed in a front surface side of an n-type semiconductor substrate. An n-type field stop (FS) region including protons as a donor is formed in a rear surface side of the semiconductor substrate. A concentration distribution of the donors in the FS region include first, second, third and fourth peaks in order from a front surface to the rear surface. Each of the peaks has a peak maximum point, and peak end points formed at both sides of the peak maximum point. The peak maximum points of the first and second peaks are higher than the peak maximum point of the third peak. The peak maximum point of the third peak is lower than the peak maximum point of the fourth peak.
1. A semiconductor device comprising:
an n-type semiconductor substrate;
a p-type semiconductor region formed in a front surface side of the semiconductor substrate; and
an n-type field stop region that is formed in a rear surface side of the semiconductor substrate, the n-type field stop region including protons as a donor; wherein
a concentration distribution of the donor in the field stop region in a depth direction has a plurality of peaks including a first peak, a second peak that is closer to the rear surface of the semiconductor substrate than the first peak is, a third peak that is closer to the rear surface of the semiconductor substrate than the second peak is, and a fourth peak that is closer to the rear surface of the semiconductor substrate than the third peak is,
each of the plurality of peaks including the first peak, the second peak, the third peak and the fourth peak has a peak maximum point, and peak end points formed at both sides of the peak maximum point, and
the peak maximum point of the third peak is lower than the peak maximum point of the fourth peak.
2. The semiconductor device according to claim 1 , wherein the peak end points are points at which inclination becomes substantially zero.
3. The semiconductor device according to claim 2 , wherein
a concentration difference between the peak end points formed at both sides of the peak maximum point of the first peak is larger than a concentration difference between the peak end points formed at both sides of the peak maximum point of the second peak, and
the concentration difference between the peak end points formed at both sides of the peak maximum point of the first peak is larger than a concentration difference between the peak end points formed at both sides of the peak maximum point of the third peak.
4. The semiconductor device according to claim 2 , wherein
a concentration of a second peak end point of the first peak that is closer to the rear surface of the semiconductor substrate than a first peak end point of the first peak is, concentrations of the peak end points formed at both sides of the peak maximum point of the second peak, and concentrations of the peak end points formed at both sides of the peak maximum point of the third peak are predetermined concentrations that are substantially the same as each other, and
a concentration of the first peak end point of the first peak is lower than the predetermined concentrations.
5. The semiconductor device according to claim 4 , wherein
a concentration of a first peak end point of the fourth peak that is closer to the front surface of the semiconductor substrate than a second peak end point of the fourth peak is, is substantially the same as the predetermined concentrations.
6. The semiconductor device according to claim 5 , wherein
the predetermined concentrations are substantially equal to 2×10 14 /cm 3 .
7. The semiconductor device according to claim 6 , wherein
the concentration of the first peak end point of the first peak is substantially equal to 6×10 13 /cm 3 .
8. The semiconductor device according to claim 2 , wherein
each of the first peak, the second peak, the third peak and the fourth peak is a peak that rises from a baseline,
a first portion of the baseline is substantially constant between the first peak and the second peak,
a second portion of the baseline is substantially constant between the second peak and the third peak, and
a third portion of the baseline is substantially constant between the third peak and the fourth peak.
9. The semiconductor device according to claim 8 , wherein
a fourth portion of the baseline of the first peak is lower than the first portion of the baseline between the first peak and the second peak,
the fourth portion of the baseline of the first peak is lower than the second portion of the baseline between the second peak and the third peak, and
the fourth portion of the baseline of the first peak is lower than the third portion of the baseline between the third peak and the fourth peak.
10. The semiconductor device according to claim 9 , wherein
the first portion of the baseline between the first peak and the second peak, the second portion of the baseline between the second peak and the third peak, and the third portion of the baseline between the third peak and the fourth peak substantially have a concentration of 2×10 14 /cm 3 .
11. The semiconductor device according to claim 10 , wherein
the fourth portion of the baseline of the first peak substantially has a concentration of 6×10 13 /cm 3 .
12. The semiconductor device according to claim 3 , further comprising
an n-type cathode region formed in the semiconductor substrate closer to the rear surface side of the semiconductor substrate than the field stop region is, wherein
the p-type semiconductor region is an anode region.
13. The semiconductor device according to claim 12 , wherein
the fourth peak is a peak from among the plurality of peaks that is closest to the rear surface of the semiconductor substrate.
14. The semiconductor device according to claim 12 , wherein
the fourth peak is a peak from among the plurality of peaks that is closest to the rear surface of the semiconductor substrate, and
the second peak is adjacent to both the first peak and the third peak, and the third peak is adjacent to both the second peak and the fourth peak.
15. The semiconductor device according to claim 14 , wherein
among the plurality of peaks, at least some of the peak maximum points are provided at regular intervals in the field stop region in the depth direction.
16. The semiconductor device according to claim 14 , wherein
a thickness of the semiconductor substrate is 100 to 130 μm.
17. The semiconductor device according to claim 14 , wherein
a peak closest to the front surface of the semiconductor substrate from among the plurality of peaks is positioned substantially 30 μm from the rear surface of the semiconductor substrate.
18. The semiconductor device according to claim 1 , wherein
the peak maximum point of the third peak is higher than the peak maximum point of the second peak.
19. The semiconductor device according to claim 1 , wherein
the peak maximum point of the third peak is higher than the peak maximum point of the first peak.
20. The semiconductor device according to claim 1 , wherein
the peak maximum point of the third peak is higher than the peak maximum points of the first peak and the second peak.