IP Library Granted Patent US 11,462,733
Granted Patent B2
US 11,462,733 · App. 17/194,899 · Granted Oct 4, 2022

Ex-situ solid electrolyte interface modification using chalcogenides for lithium metal anode

Inventors: Girish Kumar Gopalakrishnan Nair (San Jose, CA); Subramanya P. Herle (Mountain View, CA); Karl J. Armstrong (Sunnyvale, CA)
Assignee: Applied Materials, Inc.
H01M4/366H01M4/0404H01M4/0423H01M4/134H01M4/382H01M4/62H01M4/661H01M4/667H01M2004/027
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Quick Facts
Patent No.
US 11,462,733
App. No.
17/194,899
Granted
Oct 4, 2022
Kind
B2
Abstract

Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.

Claims (36)

1. A method, comprising:

forming a lithium metal film on an anode film, wherein the anode film is formed on a current collector comprising a copper film; and

forming a solid electrolyte interface (SEI) film stack on the lithium metal film, comprising:

forming a chalcogenide film on the lithium metal film, wherein the chalcogenide film is selected from the group of bismuth chalcogenide, a copper chalcogenide, or combinations thereof.

2. The method of claim 1 , wherein the anode film comprises graphite.

3. The method of claim 1 , wherein forming the lithium metal film comprises an evaporation process, a sputtering process, a gravure printing system, a slot-die process, or a three-dimensional lithium printing process.

4. The method of claim 1 , wherein the SEI film stack further comprises at least one of a lithium fluoride (LiF) film, a lithium carbonate (Li 2 CO 3 ) film, a lithium oxide film, a lithium nitride (Li 3 N) film, or combinations thereof.

5. The method of claim 4 , wherein the current collector has a thickness between about 2 micrometers and about 8 micrometers.

6. The method of claim 1 , wherein the current collector comprises:

a first nickel or chromium containing film;

the copper film formed on the first nickel or chromium containing film and having a thickness between about 50 nanometers and about 500 nanometers; and

a second nickel or chromium containing film formed on the copper film and having a thickness between about 20 nanometers and about 50 nanometers.

7. The method of claim 1 , wherein the current collector comprises:

a polyethylene terephthalate (PET) polymer substrate; and

the copper film formed on the PET polymer substrate, wherein the copper film is deposited via a physical vapor deposition process.

8. The method of claim 1 , wherein the current collector comprising the copper film is exposed to a plasma treatment or corona discharge process to remove organic materials from exposed surfaces of the current collector.

9. The method of claim 1 , wherein the SEI film stack further comprises lithium fluoride formed on the chalcogenide film.

10. The method of claim 1 , wherein the chalcogenide film is selected from the group of CuS, Cu 2 Se, Cu 2 S, Cu 2 Te, CuTe, Bi 2 Te 3 , Bi 2 Se 3 , or combinations thereof.

11. The method of claim 1 , wherein the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film.

12. The method of claim 11 , wherein the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.

13. The method of claim 1 , wherein the chalcogenide film is deposited using a physical vapor deposition (PVD) process having an RF power source or a DC power source coupled to a target composed of the materials of the chalcogenide film.

14. The method of claim 13 , further comprising:

forming a lithium oxide film on the chalcogenide film by depositing an additional lithium metal film via a PVD process performed in an oxygen-containing atmosphere.

15. An anode electrode structure, comprising:

a current collector comprising a copper film;

an anode film formed on the current collector;

a lithium metal film formed on the anode film; and

a solid electrolyte interface (SEI) film stack formed on the lithium metal film, comprising:

a lithium oxide film;

a lithium carbonate film formed on the lithium oxide film; and

a chalcogenide film formed on the lithium carbonate film, wherein the chalcogenide film is selected from the group of a bismuth chalcogenide, a copper chalcogenide, or combinations thereof.

16. The anode electrode structure of claim 15 , wherein the SEI film stack further comprises a lithium nitride film formed between the lithium metal film and the lithium oxide film.

17. The anode electrode structure of claim 15 , wherein the chalcogenide film is selected from the group of CuS, Cu 2 Se, Cu 2 S, Cu 2 Te, CuTe, Bi 2 Te 3 , Bi 2 Se 3 , or combinations thereof.

18. The anode electrode structure of claim 17 , wherein the chalcogenide film has a thickness between about 1 nanometer to about 400 nanometers.

19. The anode electrode structure of claim 18 , wherein the lithium metal film has a thickness between about 1 micrometers and about 20 micrometers.

20. The anode electrode structure of claim 15 , wherein the chalcogenide film is Bi 2 Te 3 .

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2025
From: APPLIED MATERIALS, INC.
To: ELEVATED MATERIALS US LLC
Reel/Frame 071036/0188 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2021
From: GOPALAKRISHNAN NAIR, GIRISH KUMAR; HERLE, SUBRAMANYA P.; ARMSTRONG, KARL
To: APPLIED MATERIALS, INC.
Reel/Frame 056131/0173 →
Continuity (3)
Continuation 16150111 · Oct 2, 2018
Provisional Application 62583911 · Nov 9, 2017
Related Publication 20210210752A1 · Jul 8, 2021