Apparatus and method for inspecting lamps

1. A method for inspecting a lamp, the method comprising:

positioning a lamp within a field of view of a camera;

capturing an image of the lamp using the camera;

determining an actual measurement of one or more dimensions of the lamp using the image, wherein the lamp is configured to heat a substrate in a substrate processing apparatus, and determining the actual measurement comprises:

generating a window having a width and a height;

generating a deviation based upon a difference between the actual measurement and a target measurement for the one or more dimensions;

comparing the deviation to a first threshold; and

rejecting the lamp if the deviation is outside the first threshold.

2. The method as recited in claim 1 , wherein the lamp comprises a base, a dome, a filament, a first pin, and a second pin, wherein determining the actual measurement further comprises:

establishing a datum center axis between a first pin datum and a second pin datum of the lamp, the first pin datum extending through a center of the first pin and the second pin datum extending through a center of the second pin; and

extending a line perpendicular to the datum center axis and perpendicularly through the first pin and the second pin to define a lateral datum axis, the datum center axis and the lateral datum axis.

3. The method as recited in claim 2 , wherein determining the actual measurement further comprises:

determining a first deviation angle, wherein the first deviation angle is defined between a deviation line and the datum center axis, the deviation line extending through a center of the filament and through a point at which the lateral datum axis intersects the datum center axis.

4. The method as recited in claim 3 , wherein generating the window comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point.

5. The method as recited in claim 3 , wherein determining the actual measurement further comprises:

rotating the lamp by 90 degrees; and

determining a second deviation angle, wherein the second deviation angle is defined between a second deviation line and the datum center axis, the second deviation angle being different from the first deviation angle.

6. The method as recited in claim 1 , wherein determining the actual measurement further comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point;

generating the window using the plurality of coil points; and

establishing a coil center point using the window.

7. The method as recited in claim 1 , wherein determining the actual measurement further comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point; and

determining an outer diameter of a filament based upon the plurality of coil points.

8. An image processing apparatus comprising:

a camera;

at least one lens; and

a controller configured to perform a method for qualifying a lamp, the method comprising:

positioning the lamp within a field of view of the camera;

capturing an image of the lamp using the camera;

determining an actual measurement of one or more dimensions of a filament of the lamp using the image, wherein the lamp is configured to heat a substrate in a substrate processing apparatus, and determining the actual measurement comprises:

generating a window having a width and a height;

generating a deviation based upon a difference between the actual measurement and a target measurement for the one or more dimensions;

comparing the deviation to a first threshold; and

rejecting the lamp if the deviation is outside the first threshold.

9. The image processing apparatus as recited in claim 8 , wherein the lamp comprises a base, a dome, a filament, a first pin, and a second pin, wherein determining the actual measurement further comprises:

establishing a datum center axis between a first pin datum and a second pin datum of the lamp, the first pin datum extending through a center of the first pin and the second pin datum extending through a center of the second pin; and

extending a line perpendicular to the datum center axis and perpendicularly through the first pin and the second pin to define a lateral datum axis, the datum center axis and the lateral datum axis.

10. The image processing apparatus as recited in claim 9 , wherein determining the actual measurement further comprises:

determining a first deviation angle, wherein the first deviation angle is defined between a deviation line and the datum center axis, the deviation line extending through a center of the filament and through a point at which the lateral datum axis intersects the datum center axis.

11. The image processing apparatus as recited in claim 10 , wherein generating the window comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point.

12. The image processing apparatus as recited in claim 10 , wherein determining the actual measurement further comprises:

rotating the lamp by 90 degrees; and

determining a second deviation angle, wherein the second deviation angle is defined between a second deviation line the datum center axis, the second deviation angle being different from the first deviation angle.

13. The image processing apparatus as recited in claim 8 , wherein determining the actual measurement further comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point;

generating the window using the plurality of coil points; and

establishing a coil center point using the window.

14. The image processing apparatus as recited in claim 8 , wherein determining the actual measurement further comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point; and

determining an outer diameter of a filament based upon the plurality of coil points.

15. A non-transitory computer readable medium configured to store instructions thereon, that when executed by a processor, cause a lamp inspection process to be performed that includes:

positioning a lamp within a field of view of a camera;

capturing an image of the lamp using the camera;

determining an actual measurement of one or more dimensions of a filament of the lamp using the image, wherein the lamp is configured to heat a substrate in a substrate processing apparatus, and determining the actual measurement comprises:

generating a window having a width and a height;

generating a deviation based upon a difference between the actual measurement and a target measurement for the one or more dimensions;

comparing the deviation to a first threshold; and

rejecting the lamp if the deviation is outside the first threshold.

16. The non-transitory computer readable medium as recited in claim 15 , wherein the lamp comprises a base, a dome, a filament, a first pin, and a second pin, wherein determining the actual measurement further comprises:

establishing a datum center axis between a first pin datum and a second pin datum of the lamp, the first pin datum extending through a center of the first pin and the second pin datum extending through a center of the second pin; and

extending a line perpendicular to the datum center axis and perpendicularly through the first pin and the second pin to define a lateral datum axis, the datum center axis and the lateral datum axis.

17. The non-transitory computer readable medium as recited in claim 16 , wherein determining the actual measurement further comprises:

determine a first deviation angle, wherein the first deviation angle is defined between a deviation line and the datum center axis, the deviation line extending through a center of the filament and through a point at which the lateral datum axis intersects the datum center axis.

18. The non-transitory computer readable medium as recited in claim 17 , wherein generating the window comprises:

establish a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point.

19. The non-transitory computer readable medium as recited in claim 17 , wherein determining the actual measurement further comprises:

determining a second deviation angle, wherein the second deviation angle is defined between a second deviation line and the datum center axis, the second deviation angle being different from the first deviation angle.

20. The non-transitory computer readable medium as recited in claim 15 , wherein determining the actual measurement further comprises:

establishing a plurality of coil points that include a first coil end point, a second coil end point, a first coil edge point, and a second coil edge point;

generating the window using the plurality of coil points; and

establishing a coil center point using the window.