IP Library Granted Patent US 11,733,552
Granted Patent B2
US 11,733,552 · App. 17/219,607 · Granted Aug 22, 2023

Ultra-fast optical modulation and ultra-short pulse generation based on tunable graphene-plasmonic hybrid metasurfaces

Inventors: Yu Yao (Chandler, AZ); Ali Basiri (Diamond Bar, CA)
Assignee: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
G02F1/0147G02F2202/30G02F2203/10G02F2203/11
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Quick Facts
Patent No.
US 11,733,552
App. No.
17/219,607
Granted
Aug 22, 2023
Kind
B2
Abstract

An optical device is disclosed. The optical device includes a silicon substrate, an aluminum oxide layer, an aluminum layer between the silicon substrate and the aluminum oxide layer, and a metasurface nanostructure. The metasurface nanostructure may include a graphene monolayer on the aluminum oxide layer and an electrically conductive nanoantenna array in direct contact with the graphene monolayer, where each nanoantenna in the nanoantenna array may include multiple segments, each segment having one or more parameters selected to achieve simultaneous resonance in the mid-infrared and the near infrared spectral regions when the graphene monolayer is irradiated with a near infrared pump pulse and a continuous mid-infrared probe. The optical device generates mid-infrared pulses via ultrafast modulation of hot carriers in the monolayer graphene.

Claims (36)

1. An optical device comprising:

a silicon substrate;

a dielectric layer;

an aluminum layer between the silicon substrate and the dielectric layer; and

a metasurface nanostructure comprising:

a graphene monolayer on the dielectric layer; and

an electrically conductive nanoantenna array in direct contact with the graphene monolayer, wherein each nanoantenna in the nanoantenna array comprises multiple segments, each segment having one or more parameters selected to achieve simultaneous resonance in the mid-infrared and the near infrared spectral regions when the graphene monolayer is irradiated with a near infrared pump pulse and a continuous mid-infrared probe, wherein

the optical device generates mid-infrared pulses via ultrafast modulation of hot carriers in the graphene monolayer, and

the device achieves near field intensity enhancement of the near infrared pump pulse and the continuous mid-infrared probe exceeding 100 and 1500 fold, respectively.

2. The optical device of claim 1 , wherein the one or more parameters comprise:

a length;

a width;

an angular orientation with respect to one or more adjacent segments; and

a gap between one or more adjacent segments.

3. The optical device of claim 1 , wherein the continuous mid-infrared probe is a coherent source or an incoherent source.

4. The optical device of claim 3 , wherein the coherent source is a laser.

5. The optical device of claim 3 , wherein the incoherent source is a thermal emitter.

6. The optical device of claim 1 , wherein the mid-infrared pulses have a modulation time between about 100 femtoseconds and about 500 femtoseconds.

7. The optical device of claim 6 , wherein the mid-infrared pulses have a modulation depth exceeding 10 dB.

8. The optical device of claim 1 , wherein a maximum dimension of each segment is 1000 nm or less.

9. The optical device of claim 1 , wherein a wavelength of the resonance in the mid-infrared is tunable.

10. The optical device of claim 9 , wherein the resonance in the mid-infrared is at a wavelength between about 5 μm and about 20 μm.

11. The optical device of claim 1 , wherein a wavelength of the resonance in the near infrared is tunable.

12. The optical device of claim 11 , wherein the resonance in the near infrared is at a wavelength of about 1 μm.

13. The optical device of claim 1 , wherein the modulation is all-optical.

14. The optical device of claim 1 , wherein a polarization of the near infrared pump pulse and a polarization of the continuous mid-infrared probe are orthogonal.

15. The optical device of claim 1 , wherein a thickness of the dielectric layer is between about 300 nm and about 400 nm.

16. The optical device of claim 1 , wherein the nanoantenna array comprises gold.

17. The optical device of claim 1 , wherein the nanoantenna array comprises a multiplicity of laterally coupled nanoantennas.

18. The optical device of claim 1 , wherein the optical device is configured for optical communication, ultrafast pump probe measurement, or ultrafast molecular spectroscopy.

19. A method of optical communication, comprising:

irradiating an optical device comprising an electrically conductive nanoantenna array in direct contact with a graphene monolayer with a near infrared pump pulse;

irradiating the optical device with a mid-infrared probe;

modulating hot carriers in the graphene monolayer; and

generating mid-infrared pulses, and

wherein the optical device achieves near field intensity enhancement of the near infrared pump pulse and a continuous mid-infrared probe exceeding 100 and 1500 fold, respectively.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 18, 2023
From: YAO, YU; BASIRI, ALI
To: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
Reel/Frame 064296/0191 →
Continuity (2)
Provisional Application 63002939 · Mar 31, 2020
Related Publication 20210302763A1 · Sep 30, 2021