IP Library Granted Patent US 11,489,146
Granted Patent B2
US 11,489,146 · App. 17/248,858 · Granted Nov 1, 2022

Techniques for print ink droplet measurement and control to deposit fluids within precise tolerances

Inventors: Nahid Harjee (Sunnyvale, CA); Lucas D. Barkley (Lexington, KY); Christopher R. Hauf (Belmont, CA); Eliyahu Vronsky (Los Altos, CA); Conor F. Madigan (San Francisco, CA); Gregory Lewis (Menlo Park, CA); Alexander Sou-Kang Ko (Santa Clara, CA); Valerie Gassend (East Palo Alto, CA)
Assignee: Kateeva, Inc.
H01L51/56B41J2/01B41J2/0456B41J2/04581B41J2/04586B41J2/04588B41J2/04593B41J2/2054H01L51/0005H01L51/0012H01L51/0029
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Quick Facts
Patent No.
US 11,489,146
App. No.
17/248,858
Granted
Nov 1, 2022
Kind
B2
Abstract

An ink printing process employs per-nozzle droplet volume measurement and processing software that plans droplet combinations to reach specific aggregate ink fills per target region, guaranteeing compliance with minimum and maximum ink fills set by specification. In various embodiments, different droplet combinations are produced through different printhead/substrate scan offsets, offsets between printheads, the use of different nozzle drive waveforms, and/or other techniques. These combinations can be based on repeated, rapid droplet measurements that develop understandings for each nozzle of means and spreads for expected droplet volume, velocity and trajectory, with combinations of droplets being planned based on these statistical parameters. Optionally, random fill variation can be introduced so as to mitigate Mura effects in a finished display device. The disclosed techniques have many possible applications.

Claims (43)

1. A method of processing a substrate, the method comprising:

moving a print head of an inkjet printer from a printing region to a region adjacent to a droplet measurement area;

controlling an atmosphere of the printing region and the droplet measurement area;

at the droplet measurement area, obtaining a measurement of a characteristic of a droplet of a liquid ejected from a nozzle of the print head during droplet flight by illuminating the droplet with a beam of light and detecting a change in the light;

adding the measurement to a population of measurements of the characteristic;

computing a statistic of the population; and

printing liquid from the nozzle onto the substrate in dependence on the statistic.

2. The method of claim 1 , further comprising positioning the beam of light relative to the print head in at least two independent dimensions while the print head is stationary.

3. The method of claim 1 , wherein the detecting a change in the light comprises imaging the droplet.

4. The method of claim 1 , wherein the detecting a change in the light comprises obtaining an interference pattern of the light.

5. The method of claim 1 , wherein the printing region and the droplet measurement area are in the same controlled atmosphere.

6. The method of claim 1 , wherein a measurement of the characteristic for the nozzle is obtained for a plurality of waveforms used to eject droplets from the nozzle.

7. The method of claim 6 , further comprising illuminating the droplet a plurality of times and obtaining a measurement of the characteristic for each illumination of the droplet.

8. The method of claim 7 , further comprising positioning the beam of light relative to the print head in at least two independent dimensions while the print head is stationary.

9. The method of claim 1 , wherein the characteristic is volume, velocity, or trajectory.

10. The method of claim 1 , further comprising comparing the measurement to the population and detecting malfunction of the nozzle based on the comparison.

11. A method of processing a substrate, the method comprising:

moving a print head of an inkjet printer from a printing region to a region adjacent to a droplet measurement area;

controlling an atmosphere of the printing region and the droplet measurement area;

at the droplet measurement area, obtaining a measurement of a characteristic of a droplet of a liquid ejected from a nozzle of the print head during droplet flight by illuminating the droplet with a beam of light and detecting a change in the light;

comparing the measurement to a population of measurements of the characteristic;

determining whether the nozzle is functioning normally based on the comparison;

upon determining that the nozzle is functioning normally,

adding the measurement to a population of measurements of the characteristic;

computing a statistic of the population; and

printing liquid from the nozzle onto the substrate in dependence on the statistic.

12. The method of claim 11 , wherein the detecting a change in the light comprises imaging the droplet or obtaining an interference pattern of the light.

13. The method of claim 12 , wherein the printing region and the droplet measurement area are in the same controlled atmosphere.

14. The method of claim 13 , wherein a measurement of the characteristic for the nozzle is obtained for a plurality of waveforms used to eject droplets from the nozzle.

15. The method of claim 14 , further comprising illuminating the droplet a plurality of times and obtaining a measurement of the characteristic for each illumination of the droplet.

16. The method of claim 15 , further comprising positioning the beam of light relative to the print head in at least two independent dimensions while the print head is stationary.

17. The method of claim 16 , wherein the characteristic is volume, velocity, or trajectory.

18. The method of claim 17 , wherein one or more measurements of statistics of the population are stored in a digital storage at the time the measurements are obtained or the statistics computed, and the statistic is retrieved from the digital storage at the time a print plan is made.

19. A method of processing a substrate, the method comprising:

moving a print head of an inkjet printer within a controlled atmosphere from a printing region to a region adjacent to a droplet measurement area;

at the droplet measurement area, obtaining a measurement of a characteristic of a droplet of a liquid ejected from a nozzle of the print head during droplet flight by illuminating the droplet using a strobed beam of light and detecting a change in the light;

comparing the measurement to a population of measurements of the characteristic;

determining whether the nozzle is functioning normally based on the comparison;

upon determining that the nozzle is functioning normally,

adding the measurement to a population of measurements of the characteristic;

computing a statistic of the population; and

printing liquid from the nozzle onto the substrate in dependence on the statistic.

20. The method of claim 19 , further comprising positioning the beam of light relative to the print head in at least two independent dimensions while the print head is stationary.

Assignments (2)
SECURITY INTEREST Recorded Apr 19, 2022
From: KATEEVA CAYMAN HOLDING, INC.
To: HB SOLUTION CO., LTD.
Reel/Frame 059727/0111 →
SECURITY INTEREST Recorded Mar 17, 2022
From: KATEEVA, INC.; KATEEVA CAYMAN HOLDING, INC.
To: SINO XIN JI LIMITED
Reel/Frame 059382/0053 →
Priority Claims (1)
TW 102148330 · Dec 26, 2013 · national
Continuity (17)
Continuation 16536654 · Aug 9, 2019
Continuation 15716753 · Sep 27, 2017
Continuation 15135380 · Apr 21, 2016
Continuation 14340403 · Jul 24, 2014
Continuation In Part PCTUS2014035193 · Apr 23, 2014
Continuation In Part 14162525 · Jan 23, 2014
Continuation PCTUS2013077720 · Dec 24, 2013
Provisional Application 61950820 · Mar 10, 2014
Provisional Application 61920715 · Dec 24, 2013
Provisional Application 61898769 · Nov 1, 2013
Provisional Application 61866031 · Aug 14, 2013
Provisional Application 61857298 · Jul 23, 2013
Provisional Application 61842351 · Jul 2, 2013
Provisional Application 61822855 · May 13, 2013
Provisional Application 61816696 · Apr 26, 2013
Provisional Application 61746545 · Dec 27, 2012
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