IP Library Granted Patent US 11,675,128
Granted Patent B2
US 11,675,128 · App. 17/249,060 · Granted Jun 13, 2023

End-face coupling structures within electrical backend

Inventors: Roman Bruck (Vienna, AT); Thierry J. Pinguet (Arlington, WA); Attila Mekis (Carlsbad, CA)
Assignee: Cisco Technology, Inc.
G02B6/122G02B6/13
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Quick Facts
Patent No.
US 11,675,128
App. No.
17/249,060
Granted
Jun 13, 2023
Kind
B2
Abstract

End-face coupling structures within an electrical backend are provided via photonic integrated circuit (PIC), comprising: a first plurality of spacer layers; a second plurality of etch-stop layers, wherein each etch-stop layer of the second plurality of etch-stop layers is located between two spacer layers of the first plurality of spacer layers; and an optical coupler comprising a plurality of waveguides arranged as a waveguide array configured to receive an optical signal in a direction of travel, wherein each waveguide of the plurality of waveguides is located at a layer interface defined between an etch-stop layer and a spacer layer. Portions of the PIC can be formed by depositing layers of spacer and etch-stop materials in which cavities are formed to define the waveguides when the waveguide material is deposited or interconnects when a metal is deposited therein.

Claims (21)

1. A photonic integrated circuit (PIC), comprising:

a first plurality of spacer layers;

a second plurality of etch-stop layers, wherein each etch-stop layer of the second plurality of etch-stop layers is located between two spacer layers of the first plurality of spacer layers; and

an optical coupler comprising a plurality of waveguides arranged as a waveguide array configured to receive an optical signal in a direction of travel, wherein each waveguide of the plurality of waveguides is located at a layer interface defined between an etch-stop layer and a spacer layer, and wherein the waveguides of the plurality of waveguides are comprised of different waveguide materials.

2. The PIC of claim 1 , wherein waveguides of the plurality of waveguides are arranged in a plane perpendicular to the direction of travel to define a receiving area matched to a beam size of the optical signal, wherein each waveguide of the plurality of waveguides has a cross-sectional area in the plane that is smaller than the beam size.

3. The PIC of claim 2 , wherein the waveguide array begins at a first location in the direction of travel and ends at a second location in the direction of travel, wherein the waveguide array is configured to change the beam size of the optical signal as received at the first location to a second beam size at the second location.

4. The PIC of claim 3 , wherein the waveguide array is configured to shift the optical signal in a second direction, perpendicular to the direction of travel, onto a carrier waveguide configured to carry the optical signal at the second beam size.

5. The PIC of claim 4 , wherein the carrier waveguide is disposed in a dielectric that comprises a different material than the first plurality of spacer layers.

6. The PIC of claim 1 , wherein the spacer layers comprise an optically transmissive dielectric material and the etch-stop layers comprise an optically transmissive etch-stop material.

7. The PIC of claim 1 , wherein the etch-stop layers comprise an optically transmissive etch-stop material.

8. A photonic integrated circuit (PIC), comprising:

a first plurality of spacer layers;

a second plurality of etch-stop layers, wherein each etch-stop layer of the second plurality of etch-stop layers is located between two spacer layers of the first plurality of spacer layers; and

an optical coupler comprising a plurality of waveguides arranged as a waveguide array configured to receive an optical signal in a direction of travel, wherein each waveguide of the plurality of waveguides is located at a layer interface defined between an etch-stop layer and a spacer layer, and wherein waveguides of the plurality of waveguides are arranged in a plane perpendicular to the direction of travel to define a receiving area matched to a beam size of the optical signal.

9. The PIC of claim 8 , wherein each waveguide of the plurality of waveguides has a cross-sectional area in the plane that is smaller than the beam size.

10. The PIC of claim 9 , wherein the waveguide array begins at a first location in the direction of travel and ends at a second location in the direction of travel, wherein the waveguide array is configured to change the beam size of the optical signal as received at the first location to a second beam size at the second location.

11. The PIC of claim 10 , wherein the waveguide array is configured to shift the optical signal in a second direction, perpendicular to the direction of travel, onto a carrier waveguide configured to carry the optical signal at the second beam size.

12. The PIC of claim 11 , wherein the carrier waveguide is disposed in a dielectric that comprises a different material than the first plurality of spacer layers.

13. The PIC of claim 8 , wherein the waveguides of the plurality of waveguides are comprised of different waveguide materials.

14. The PIC of claim 8 , wherein the spacer layers comprise an optically transmissive dielectric material and the etch-stop layers comprise an optically transmissive etch-stop material.

15. The PIC of claim 8 , wherein the etch-stop layers comprise an optically transmissive etch-stop material.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2021
From: BRUCK, ROMAN; PINGUET, THIERRY J.; MEKIS, ATTILA
To: CISCO TECHNOLOGY, INC.
Reel/Frame 055323/0420 →
Continuity (1)
Related Publication 20220260775A1 · Aug 18, 2022