High Q BAW resonator with spurious mode suppression
A BAW resonator is provided wherein the top electrode (TE) has an outer flap (OF). The flap extends away from the active resonator region (AR) and has a projecting section that runs at a level above the piezoelectric layer (PL) that is higher than the level of the top electrode at any of the inwardly located areas enclosed by the outer flap. The higher level is formed by an intermediate step-forming material (SM) arranged between piezoelectric layer and top electrode in the outer flap. The step forming material comprises a structured layer of an acoustic impedance that is low w.r.t. the impedance of the top electrode and the piezoelectric layer.
1. A bulk acoustic wave (BAW) resonator, comprising:
a bottom electrode;
a piezoelectric layer disposed on the bottom electrode;
a step-forming material structure disposed over a portion of the piezoelectric layer; and
a top electrode disposed over the piezoelectric layer and the step-forming material structure;
wherein an active resonator region is formed where all three layers of the bottom electrode, the piezoelectric layer, and the top electrode overlap each other;
wherein the top electrode forms an outer flap at a higher level than level at a center of the active resonator region, with the outer flap extending away from the active resonator region;
wherein the higher level is formed over the step-forming material structure; and
wherein a first thickness of the top electrode between the outer flap and the active resonator region is less than a second thickness of the top electrode within the active resonator region.
2. The BAW resonator of claim 1 , wherein a margin of the active resonator region comprises an overlap region outwardly adjacent to an underlap region comprising the first thickness of the top electrode.
3. The BAW resonator of claim 1 , wherein the outer flap extends along a whole perimeter of the active resonator region thereby surrounding the active resonator region.
4. The BAW resonator of claim 1 , wherein a dielectric layer comprising at least a SiN layer covers the top electrode.
5. The BAW resonator of claim 1 , further comprising a dielectric layer disposed over the top electrode;
wherein an underlap region is formed at a margin of the active resonator region;
wherein the underlap region that extends along a whole perimeter between the active resonator region and an overlap region at the margin of the active resonator region; and
wherein in the underlap region, a total thickness of the top electrode and the dielectric layer is smaller than a respective total thickness of a substrate, the bottom electrode, and the piezoelectric layer in the center of the active resonator region.
6. The BAW resonator of claim 5 , wherein the dielectric layer comprises a reduced thickness in the underlap region.
7. The BAW resonator of claim 6 , wherein the reduced thickness of the dielectric layer in the underlap region is achieved by enhancing a dielectric layer height in the active resonator region by an additional layer of dielectric material to a portion of the dielectric layer covering the top electrode at the active resonator region exclusively in an area enclosed by the underlap region.
8. The BAW resonator of claim 6 , wherein the total thickness of the top electrode and the dielectric layer being smaller than the respective total thickness is achieved by a reduced thickness of the top electrode.
9. The BAW resonator of claim 1 , wherein the top electrode comprises AlCu; and
wherein the step-forming material structure is arranged between the top electrode and a layer comprising Pt or Ta.
10. The BAW resonator of claim 1 , further comprising: a layer comprising at least one of W, Pt, Mo, and Ta;
wherein the step-forming material structure is arranged under the outer flap between the piezoelectric layer and the layer.
11. The BAW resonator of claim 10 , wherein a thickness of the layer in an overlap region is higher than a thickness of the layer in an underlap region and in the active resonator region.
12. The BAW resonator of claim 1 , wherein the piezoelectric layer comprises AlN doped with Sc.
13. The BAW resonator of claim 1 , further comprising:
a substrate; and
a Bragg mirror disposed between the substrate and the bottom electrode and arranged below the active resonator region.
14. The BAW resonator of claim 1 , wherein the step-forming material structure comprises a structured layer having an acoustic impedance lower than an acoustic impedance of the top electrode and the piezoelectric layer.
15. The BAW resonator of claim 14 , wherein the step-forming material structure comprises a second layer formed on the structured layer having a high acoustic impedance relative to the acoustic impedance of the top electrode and the piezoelectric layer.
16. The BAW resonator of claim 15 , wherein the second layer comprises at least one of Pt, Ta, or an alloy of Pt, or Ta.
17. The BAW resonator of claim 14 , wherein the step-forming material structure comprises a second layer formed under the structured layer having a high acoustic impedance relative to the acoustic impedance of the top electrode and the piezoelectric layer.