Electro acoustic resonator with suppressed transversal gap mode excitation and reduced transversal modes
An electro acoustic resonator is provided. The resonator has a gap short structure (GSS) to electrically short at least an area of the transversal gap to suppress transversal gap mode excitations. The gap short structure may be provided by a conductive stripe in the gap and parallel to or inclined with respect to the bus bar (BB) shorting adjacent IDT fingers. Additional connectors between the stripe and the bus bar may be provided. The connectors may have different pitch or metallization ratio with respect to the ID fingers. The connectors may be offset from the position of the fingers and my be inclined with respect to the bus bars. Multiple parallel stripes in the gap may provide a transversal reflector. By using a gap short structure a further improved transversal mode suppression of piston mode designs can be achieved.
1. An electro acoustic resonator with suppressed transversal gap mode excitation and reduced transversal modes, comprising:
a piezoelectric material;
an electrode structure arranged on or above the piezoelectric material; and
a gap short structure arranged on or above the piezoelectric material; wherein:
the electrode structure has two opposite busbars, two transversal gaps and electrode fingers,
each electrode finger is alternately electrically connected to one of the busbars,
the transversal gaps are arranged between the end of electrode fingers and the respective opposite busbar, and
the gap short structure has conductor strips or patches and is arranged inside the transversal gaps.
2. The resonator of the claim 1 , wherein the gap short structure electrically shorts an area of the gaps.
3. The resonator of claim 1 , wherein the conductor strips of the gap short structure extend in a longitudinal direction.
4. The resonator of claim 1 , wherein the conductor strips of the gap short structure and the electrode fingers share a same metal layer.
5. The resonator of claim 1 , being selected from a SAW resonator, a TC-SAW resonator, a TF-SAW resonator, a GBAW resonator provided as a one-port resonator, a two-port resonator or a DMS resonator.
6. The resonator of claim 1 , further comprising busbar connectors electrically connecting the gap short structure to the busbars.
7. The resonator of claim 6 , wherein the busbar connectors comprise one or more structures selected from:
electrode finger elements,
electrode finger elements with an increased metallization ratio η,
electrode finger elements with a reduced metallization ratio η,
phase shifted electrode finger elements,
phase shifted conductor patches,
phase shifted electrode finger elements with an increased metallization ratio η,
phase shifted electrode finger elements with a reduced metallization ratio η,
asynchronous conductor patches with an increased pitch p,
asynchronous conductor patches with a reduced pitch p,
asynchronous conductor patches with an irregular pitch p,
rotated conductor patches,
trapezoid conductor patches,
wherein in case of a TGR structure busbar connector conductor patches which are modified from one gap short conductor strip to the next.
8. The resonator of claim 1 , wherein the gap short structures' conductor strips comprise one or more structures selected from
rectangular conductor strips,
rotated conductor strips,
trapezoid conductor strips,
a transversal gapshort reflector, TGR, including a plurality of conductor strips per side of an acoustic track.
9. The resonator of claim 1 , wherein the resonator is part of an electro acoustic filter.
10. The resonator of claim 1 , wherein the resonator is part of a multiplexer.
11. The resonator of claim 1 , wherein the resonator is manufactured at least in part by creating the conductor strips of the gap short structure in the transversal gaps.
12. A method of reducing excitation of transversal gap modes in an electro acoustic resonator, comprising:
electrically shorting an area of transversal gaps of the electro acoustic resonator.
13. The method of claim 12 , comprising:
electrically shorting the area of the transversal gaps via a gap short structure,
providing the gap short structure as conductive strips,
determining a width of the strips and distances between the strips and the electrode finger tips and between the strips and the busbars.
14. The method of claim 12 , comprising:
providing a TGR structure including a plurality of strips extending along a longitudinal direction; and
selecting widths and distances of the plurality of strips towards electrode finger tips, the busbar and neighboring strips.