Pressure sensor and electronic apparatus
A pressure sensor is a pressure sensor that includes: a capacitive sensor electrode layer that includes a plurality of sensing units; a first reference electrode layer that faces a first surface of the sensor electrode layer; a second reference electrode layer that faces a second surface of the sensor electrode layer; an elastic layer disposed between the first reference electrode layer and the sensor electrode layer; and a gap layer disposed between the second reference electrode layer and the sensor electrode layer. In the pressure sensor, the sensor electrode layer, the first reference electrode layer, and the second reference electrode layer have a slit.
1. A pressure sensor comprising:
a sensor electrode layer that is of a capacitive type and includes a plurality of sensing units;
a first electrode base member including a first reference electrode thin film that faces a first surface of the sensor electrode layer;
a second electrode base member including a second reference electrode thin film that faces a second surface of the sensor electrode layer;
an elastic layer disposed between the first reference electrode thin film and the sensor electrode layer; and
a gap layer disposed between the second reference electrode thin film and the sensor electrode layer,
wherein the sensor electrode layer, the first reference electrode thin film, and the second reference electrode thin film each have a respective slit.
2. The pressure sensor according to claim 1 , wherein
the sensor electrode layer includes:
a trunk portion; and
a plurality of branch portions extending like branches from the trunk portion, and
the slit is disposed between adjacent ones of the branch portions.
3. The pressure sensor according to claim 1 , wherein
the first reference electrode thin film and the second reference electrode thin film have two end portions facing each other, and
the slit extends inward from the two end portions facing each other.
4. The pressure sensor according to claim 1 , wherein
extending directions of the slit of the sensor electrode layer and the slit of the first reference electrode thin film differ from each other, and
extension directions of the slit of the sensor electrode layer and the slit of the second reference electrode thin film differ from each other.
5. The pressure sensor according to claim 1 , wherein
the sensor electrode layer includes:
a first electrode including a plurality of first sub electrodes; and
a second electrode including a plurality of second sub electrodes, and
the sensing units are formed with the first sub electrodes and the second sub electrodes that are alternately arranged at regular intervals.
6. The pressure sensor according to claim 1 , wherein
the sensor electrode layer includes:
a first electrode having a first comb-like shape; and
a second electrode having a second comb-like shape, and
the sensing units are formed with the first electrode and the second electrode that are arranged to make the first comb-like shape and the second comb-like shape mesh with each other.
7. The pressure sensor according to claim 1 , further comprising a tubular elastomer layer that covers a sensor main frame including the sensor electrode layer, the first reference electrode thin film, the second reference electrode thin film, the elastic layer, and the gap layer.
8. The pressure sensor according to claim 1 , wherein the elastic layer contains a foamed resin or an elastomer.
9. An electronic apparatus comprising:
an exterior member having a curved surface; and
the pressure sensor according to claim 1 , the pressure sensor being bonded to the curved surface.
10. The electronic apparatus according to claim 9 , wherein the curved surface is a curved surface having non-uniform curvature.
11. The pressure sensor according to claim 1 , wherein each one of the respective slits extends entirely through one of the respective layers of the sensor electrode layer, the first electrode base member, and the second electrode base member.
12. A pressure sensor comprising:
a capacitive sensor electrode layer that includes a plurality of sensing units;
a first reference electrode layer that faces a first surface of the sensor electrode layer;
a second reference electrode layer that faces a second surface of the sensor electrode layer;
an elastic layer disposed between the first reference electrode layer and the sensor electrode layer; and
a gap layer disposed between the second reference electrode layer and the sensor electrode layer,
wherein the sensor electrode layer, the first reference electrode layer, and the second reference electrode layer have a trunk portion extending in a first direction, which is greater than a perpendicular second direction, with a plurality of branch portions arranged in the first direction and each extending like branches from the trunk portion in opposite directions in the second direction.
13. A pressure sensor comprising:
a sensor electrode layer that includes a plurality of sensing units;
a first electrode base member including a first reference electrode thin film that faces a first surface of the sensor electrode layer;
a second electrode base member including a second reference electrode thin film that faces a second surface of the sensor electrode layer;
an elastic layer disposed between the first reference electrode thin film and the sensor electrode layer; and
a gap layer disposed between the second reference electrode thin film and the sensor electrode layer,
wherein the sensor electrode layer, the first reference electrode thin film, and the second reference electrode thin film each have a respective slit.
14. The pressure sensor according to claim 13 , wherein each one of the respective slits extends entirely through one of the respective layers of the sensor electrode layer, the first electrode base member, and the second electrode base member.