IP Library Granted Patent US 11,673,155
Granted Patent B2
US 11,673,155 · App. 17/301,564 · Granted Jun 13, 2023

Techniques for arrayed printing of a permanent layer with improved speed and accuracy

Inventors: Michael Baker (Santa Cruz, CA); Nahid Harjee (Sunnyvale, CA); Douglas Bacon (Palo Alto, CA)
Assignee: Kateeva, Inc.
B05B12/12B05B1/02B41J2/04581B41J2/04588B41J2/04593B41J2/2132B41J2/2135H01L51/56H01L51/0005
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Quick Facts
Patent No.
US 11,673,155
App. No.
17/301,564
Granted
Jun 13, 2023
Kind
B2
Abstract

A repeatable manufacturing process uses a printer to deposits liquid for each product carried by a substrate to form respective thin films. The liquid is dried, cured or otherwise processed to form from the liquid a permanent layer of each respective product. To perform printing, each newly-introduced substrate is roughly mechanically aligned, with an optical system detecting sub-millimeter misalignment, and with software correcting for misalignment. Rendering of adjusted data is performed such that nozzles are variously assigned dependent on misalignment to deposit droplets in a regulated manner, to ensure precise deposition of liquid for each given area of the substrate. For example, applied to the manufacture of flat panel displays, software ensures that exactly the right amount of liquid is deposited for each “pixel” of the display, to minimize likelihood of visible discrepancies in the resultant display.

Claims (49)

1. A method comprising:

receiving a print recipe from a memory, the print recipe comprising a plurality of scan paths that define relative movement, in a scanning direction, between a printhead of a printer and an expected position of a substrate, and including, for the scan paths, respective printhead positions along a direction orthogonal to the scanning direction;

using the printer to form a liquid film on the substrate by printing droplets of a liquid onto the substrate; and

processing the liquid film to form a layer,

wherein the method further comprises:

using a camera to determine a position of at least one mark on the substrate relative to an expected position of a feature of the substrate; and

using a processor to define a rotational or location error based on the determined position and to assign nozzles of the printhead to print on the substrate in association with one of the scan paths depending on the error,

wherein printing the droplets of the liquid onto the substrate includes using the assigned nozzles.

2. The method of claim 1 , wherein:

the error also includes a dimension error or a skew error;

using the processor to assign nozzles of the printhead comprises identifying nozzles of the printhead which, based on the rotational, location, dimension, or skew error, will pass over the area of the substrate during execution of each scan path; and

printing the droplets of the liquid onto the substrate comprises using the identified nozzles for each scan path to print during execution of the respective scan path.

3. The method of claim 2 , wherein using the processor to assign further comprises:

retrieving, from non-transitory storage, an expected droplet volume or landing position of typical droplets emitted by each identified nozzle;

determining whether or not one or more of the expected droplet volumes or landing positions would cause a volume of the liquid deposited in the area to fall outside of a predetermined volume tolerance range; and

excluding from use any of the identified nozzles having expected droplet volumes or landing positions that would cause the volume of the liquid deposited in the area to fall outside of the predetermined volume range.

4. The method of claim 3 , wherein the area is a footprint of the substrate.

5. The method of claim 3 , wherein the area is within a structural well.

6. The method of claim 5 , wherein the processor identifies a combination of nozzles to deposit a combination of droplets within the structural well that fall within the predetermined volume range.

7. A method comprising:

using a camera to determine position or rotation of an area of a substrate based on one or more alignment marks;

using a processor to determine an error of the determined position or rotation based on an expected position or rotation of the area and to assign, based on the error and on a plurality of scan paths defining relative movement of a printhead of a printer and the substrate, nozzles of the printhead to print on the substrate; and

printing droplets of a liquid onto the substrate, using the assigned nozzles.

8. The method of claim 7 , wherein the processor identifies nozzles of the printhead which, based on the error and the positions of the printhead during the scan paths, will pass over the area of the substrate during execution of each scan path.

9. The method of claim 8 , wherein

for each identified nozzle,

the processor receives, from a non-transitory storage,

an expected droplet aspect, and

determines whether or not the expected droplet aspect would cause the volume of the liquid deposited in the area to fall outside of a predetermined volume range; and

the processor excludes from use any of the identified nozzles having expected droplet aspects that would cause the volume of the liquid deposited in the area to fall outside of the predetermined volume range.

10. The method of claim 9 , wherein using the camera to determine position or rotation of the area of the substrate comprises capturing an image of the area of the substrate that is to receive the liquid film using a plurality of cameras.

11. The method of claim 10 , wherein the plurality of cameras comprises a standard camera and a high-resolution camera.

12. The method of claim 9 , wherein the droplet aspect is a mean droplet volume.

13. The method of claim 8 , wherein the area is a footprint of the substrate.

14. The method of claim 8 , wherein the area is within a structural well.

15. The method of claim 14 , wherein the processor identifies a combination of nozzles to deposit a combination of droplets within the structural well that fall within the predetermined volume range.

16. A method, comprising:

receiving a print recipe from a memory, the print recipe comprising a plurality of scan paths defining relative movement, in a scanning direction, between a printhead of a printer and an expected position of a substrate, and including, for the scan paths, respective printhead positions along a direction orthogonal to the scanning direction;

optically determining a position of a mark of the substrate relative to an expected position of a feature of the substrate;

using a processor to determine a rotational deviation or a location deviation based on the determined position, and to assign nozzles of the printhead to print on the substrate in association with one of the scan paths depending on the error; and

using the printer to form a liquid film on a substrate by printing droplets of a liquid onto target regions of the substrate using the assigned nozzles.

17. The method of claim 16 , wherein

the processor assigns nozzles to print droplets in an area of the substrate which, based on the error, will pass over the area of the substrate during execution of each scan path;

the processor retrieves, from non-transitory storage, an expected droplet volume or landing position of each nozzle;

the processor determines whether or not one or more of the expected droplet volumes or landing positions would cause a volume of the liquid deposited in the area to fall outside of a predetermined volume tolerance range; and

the processor excludes from use, during execution of each scan path, any of the identified nozzles having corresponding expected droplet volumes or landing positions that would cause the volume of the liquid deposited in the area to fall outside of the predetermined volume range.

18. The method of claim 17 , wherein the area is within a structural well.

19. The method of claim 17 , wherein the processor also determines a dimension error or a skew error based on the determined position, and assigns at least one nozzle depending on the dimension or skew error.

20. The method of claim 16 , wherein optically determining the position of the mark comprises using a first camera to determine a coarse position of the mark and a second camera to refine the coarse position to determine the position.

Assignments (2)
SECURITY INTEREST Recorded Apr 19, 2022
From: KATEEVA CAYMAN HOLDING, INC.
To: HB SOLUTION CO., LTD.
Reel/Frame 059727/0111 →
SECURITY INTEREST Recorded Mar 17, 2022
From: KATEEVA, INC.; KATEEVA CAYMAN HOLDING, INC.
To: SINO XIN JI LIMITED
Reel/Frame 059382/0053 →