Display device
According to one embodiment, a display device includes a first inorganic insulating film covering an oxide semiconductor layer and a protective metal layer, a second inorganic insulating film covering a gate electrode, a first connection electrode in contact with the protective metal layer at a first opening portion which penetrates through the first inorganic insulating film and the second inorganic insulating film, a first organic insulating film covering the first connection electrode, and a second connection electrode in contact with the first connection electrode at a second opening portion which penetrates through the first organic insulating film, wherein the second opening portion is located above the first opening portion.
1. A display device comprising:
an oxide semiconductor layer;
a protective metal layer covering a part of the oxide semiconductor layer;
a first inorganic insulating film covering the oxide semiconductor layer and the protective metal layer;
a gate electrode provided on the first inorganic insulating film;
a second inorganic insulating film provided on the first inorganic insulating film, and covering the gate electrode;
a first connection electrode in contact with the protective metal layer at a first opening portion which penetrates through the first inorganic insulating film and the second inorganic insulating film;
a first organic insulating film provided on the second inorganic insulating film, and covering at least a part of the first connection electrode;
a second connection electrode in contact with the first connection electrode at a second opening portion which penetrates through the first organic insulating film;
a second organic insulating film provided on the first organic insulating film, and covering at least a part of the second connection electrode;
a third connection electrode in contact with the second connection electrode at a third opening portion which penetrates through the second organic insulating film;
a third inorganic insulating film provided on the second organic insulating film, and covering at least a part of the third connection electrode; and
a pixel electrode in contact with the third connection electrode at a fourth opening portion which penetrates through the third inorganic insulating film,
wherein the second opening portion is located above the first opening portion.
2. The display device of claim 1 , wherein an entire periphery of a first edge which defines the first opening portion is located on an inner side of a second edge which defines the second opening portion in planar view.
3. The display device of claim 1 , wherein the second organic insulating film is thinner than the first organic insulating film.
4. The display device of claim 1 , wherein:
the first connection electrode is constituted by a first stacked layer body in which a plurality of metal layers are stacked over one another;
the second connection electrode is constituted by a second stacked layer body in which a plurality of metal layers are stacked over one another; and
the third connection electrode is formed of a transparent conductive material.
5. The display device of claim 1 , wherein the third opening portion is located between the gate electrode and the second opening portion.
6. The display device of claim 5 , wherein:
the third connection electrode is provided over the second opening portion; and
the second organic insulating film is provided between the second connection electrode and the third connection electrode above the second opening portion.
7. The display device of claim 5 , wherein the first organic insulating film is provided below the third opening portion.
8. The display device of claim 7 , wherein the first organic insulating film is in contact with the second inorganic insulating film below the third opening portion.
9. The display device of claim 1 , wherein the protective metal layer includes an end portion which is closer to the gate electrode than the first connection electrode is.
10. The display device of claim 1 , wherein:
the first connection electrode and the second connection electrode are stacked on the protective metal layer;
the protective metal layer, the first connection electrode, and the second connection electrode include metal layers containing a metal material of a same group; and
the metal layers containing the metal material of the same group are in contact with each other at an interface between the protective metal layer and the first connection electrode, and an interface between the first connection electrode and the second connection electrode.
11. The display device of claim 1 , wherein an entire periphery of a third edge which defines the third opening portion is located on an inner side of a fourth edge which defines the fourth opening portion in planar view.
12. The display device of claim 1 , wherein:
the protective metal layer, the first connection electrode, and the second connection electrode form a stacked layer body by being stacked in order;
the stacked layer body comprises first to third metal layers containing a first metal material, and fourth and fifth metal layers containing a second metal material different from the first metal material;
the fourth metal layer is located between the first metal layer and the second metal layer; and
the fifth metal layer is located between the second metal layer and the third metal layer.
13. The display device of claim 1 , further comprising:
a signal line which is electrically connected to the oxide semiconductor layer at a fifth opening portion which penetrates through the first inorganic insulating film and the second inorganic insulating film, and is covered with the first organic insulating film;
a metal line provided on the first organic insulating film; and
a common electrode which is provided on the second organic insulating film, and is in contact with the metal line at a sixth opening portion which penetrates through the second organic insulating film, wherein
the sixth opening portion is located above the fifth opening portion.
14. The display device of claim 13 , further comprising a metal layer interposed between the oxide semiconductor layer and the signal line.
15. The display device of claim 14 , wherein:
the metal layer is formed of a same material as a material of the protective metal layer;
the signal line is formed of a same material as a material of the first connection electrode;
the metal line is formed of a same material as a material of the second connection electrode; and
the common electrode is formed of a same material as a material of the third connection electrode.