Fabrication of thin-film encapsulation layer for light-emitting device
An ink jet process is used to deposit a material layer to a desired thickness. Layout data is converted to per-cell grayscale values, each representing ink volume to be locally delivered. The grayscale values are used to generate a halftone pattern to deliver variable ink volume (and thickness) to the substrate. The halftoning provides for a relatively continuous layer (e.g., without unintended gaps or holes) while providing for variable volume and, thus, contributes to variable ink/material buildup to achieve desired thickness. The ink is jetted as liquid or aerosol that suspends material used to form the material layer, for example, an organic material used to form an encapsulation layer for a flat panel device. The deposited layer is then cured or otherwise finished to complete the process.
1. An electronic device, comprising:
a substrate;
an electroluminescent element formed on the substrate; and
a uniform layer formed over an area of the substrate and over the electroluminescent element, the layer having a plurality of thicknesses and comprising:
a plurality of droplets arranged with a first droplet coverage at an edge of the layer and solidified to form a frame defining a central area within the frame; and
a plurality of droplets arranged with a second droplet coverage different from the first droplet coverage in the central area and solidified, wherein the second droplet coverage is based on a topology of the substrate in the central area.
2. The electronic device of claim 1 , wherein the plurality of droplets arranged with the second droplet coverage are ejected from a plurality of nozzles of a print head of an inkjet printer, and the nozzles are selected to eject the droplets based on the topology of the substrate in the central area.
3. The electronic device of claim 1 , wherein the layer further comprises a plurality of droplets arranged with a third droplet coverage, different from the second droplet coverage, within an intermediate region in the central area adjacent to the frame, and solidified.
4. The electronic device of claim 3 , wherein the layer is an organic polymer.
5. The electronic device of claim 1 , wherein the second droplet coverage is varied by varying a deposition density of the droplets.
6. The electronic device of claim 2 , wherein the second droplet coverage is varied by varying a deposition density of the droplets.
7. The electronic device of claim 1 , wherein the droplets are ejected from a plurality of nozzles of a print head of an inkjet printer, and droplet coverage is defined by a selection of waveforms applied to the nozzles to adjust size of the droplets ejected and by a selection of nozzles of the print head to eject droplets to adjust deposition density of the droplets.
8. The electronic device of claim 1 , wherein the droplets are ejected from a plurality of nozzles of a print head of an inkjet printer, and droplet coverage is defined by a time-dependent frequency of a trigger signal applied to the nozzles.
9. The electronic device of claim 1 , wherein the second droplet coverage is defined by a grayscale that comprises a correction image based on the topology of the substrate in the central area.
10. The electronic device of claim 1 , wherein the second droplet coverage is defined by a pattern of droplets resolved from a correction image based on the topology of the substrate in the central area.
11. An electronic device, comprising:
a substrate;
an electroluminescent t formed on the substrate; and
a uniform layer formed over an area of the substrate and over the electroluminescent element, the layer having a plurality of thicknesses and comprising:
a plurality of droplets arranged with a first droplet coverage at an edge of the layer and solidified to form a frame defining a central area within the frame;
a plurality of droplets arranged with a second droplet coverage different from the first droplet coverage in the central area and solidified, wherein the second droplet coverage is based on a topology of the substrate in the central area; and
a plurality of droplets arranged with a third droplet coverage, different from the first droplet coverage and the second droplet coverage, in the central area and solidified.
12. The electronic device of claim 11 , wherein the droplets are ejected from a plurality of nozzles of a print head of an inkjet printer, and droplet coverage is defined by one or more of:
a selection of nozzles and waveforms that adjust size and deposition density of the droplets;
a time-dependent frequency of a trigger signal for ejecting the droplets; and
a correction image based on a topography of the substrate.
13. The electronic device of claim 11 , wherein the layer is an organic polymer.
14. The electronic device of claim 13 , wherein the layer is impermeable to oxygen.
15. The electronic device of claim 11 , wherein the layer has a planar surface spanning the frame and the central area.
16. The electronic device of claim 11 , wherein the layer contains photoinitiator residues.
17. The electronic device of claim 11 , wherein the layer has a tapered edge.
18. The electronic device of claim 11 , wherein the layer comprises alternating organic and inorganic layers.
19. An electronic device, comprising:
a substrate;
an electroluminescent element formed on the substrate; and
a uniform layer comprising a plurality of films formed over an area of the substrate and over the electroluminescent element, the layer having a plurality of thicknesses and comprising:
a plurality of droplets arranged with a first droplet coverage at an edge of the layer and solidified to form a frame defining a central area within the frame;
a plurality of droplets arranged with a second droplet coverage different from the first droplet coverage in the central area and solidified, wherein the second droplet coverage is based on a topology of the substrate in the central area; and
a plurality of droplets arranged with a third droplet coverage, different from the first droplet coverage and the second droplet coverage, in the central area adjacent to the frame, and solidified.
20. The electronic device of claim 19 , wherein the layer contains photoinitiator residues.