Light-emitting device
A light-emitting device comprises a substrate comprising a sidewall, a first top surface, and a second top surface, wherein the second top surface is closer to the sidewall of the substrate than the first top surface to the sidewall of the substrate; a semiconductor stack formed on the substrate comprising a first semiconductor layer, an active layer, and a second semiconductor layer; a dicing street surrounding the semiconductor stack, and exposing the first top surface and the second top surface of the substrate; a protective layer covering the semiconductor stack; a reflective layer comprising a Distributed Bragg Reflector structure covering the protective layer; and a cap layer covering the reflective layer, wherein the second top surface of the substrate is not covered by the protective layer, the reflective layer, and the cap layer.
1. A light-emitting device, comprising:
a substrate, comprising a sidewall, a first top surface and a second top surface, wherein the second top surface is closer to the sidewall of the substrate than the first top surface to the sidewall of the substrate;
a semiconductor stack formed on the substrate, the semiconductor stack comprising a first semiconductor layer, an active layer and a second semiconductor layer, wherein the first semiconductor layer comprises a first mesa continuously surrounding a periphery of the semiconductor stack;
a dicing street surrounding the semiconductor stack and exposing the first top surface and the second top surface of the substrate;
a protective layer covering the semiconductor stack;
a reflective layer comprising a Distributed Bragg Reflector structure, covering the protective layer and the first mesa, wherein the reflective layer does not contact the first mesa; and
a cap layer, covering the reflective layer,
wherein the first top surface and the second top surface of the substrate are not covered by the reflective layer, and
wherein the cap layer does not contact the substrate.
2. The light-emitting device according to claim 1 , wherein the protective layer and the reflective layer do not cover the first top surface of the substrate.
3. The light-emitting device according to claim 1 , wherein the cap layer covers the first top surface of the substrate.
4. The light-emitting device according to claim 1 , wherein the cap layer covers an outer edge of the reflective layer.
5. The light-emitting device according to claim 1 , wherein an outer edge of the reflective layer is separated from an outer edge of the first semiconductor layer by a distance.
6. The light-emitting device according to claim 1 , wherein an outer edge of the reflective layer is aligned with an outer edge of the first semiconductor layer.
7. The light-emitting device according to claim 1 further comprising a compact layer covering an outer edge of the reflective layer and contacting the first mesa.
8. The light-emitting device according to claim 1 further comprising a compact layer covering an outer edge of the reflective layer and formed under the cap layer.
9. The light-emitting device according to claim 1 , wherein the first semiconductor layer comprises a second mesa directly connected to the first mesa, and the second mesa having a thickness different from that of the first mesa and is closer to the sidewall of the substrate than the first mesa to the sidewall of the substrate.
10. The light-emitting device according to claim 9 , wherein the cap layer covers the first top surface of the substrate.
11. The light-emitting device according to claim 9 , wherein an outer edge of the reflective layer is aligned with an outer edge of the second mesa.
12. The light-emitting device according to claim 9 , wherein an outer edge of the reflective layer is separated from an outer edge of the second mesa.
13. A light-emitting device, comprising:
a substrate, comprising a sidewall, a first top surface and a second top surface, wherein the second top surface is closer to the sidewall of the substrate than the first top surface to the sidewall of the substrate;
a semiconductor stack formed on the substrate, the semiconductor stack comprising a first semiconductor layer, an active layer and a second semiconductor layer;
a dicing street surrounding the semiconductor stack and exposing the first top surface and the second top surface of the substrate;
a protective layer covering the semiconductor stack, the first top surface of the substrate and the second top surface of the substrate; and
a cap layer, covering the protective layer and the first top surface of the substrate,
wherein the second top surface of the substrate is not covered by the cap layer.
14. The light-emitting device according to claim 13 , wherein the protective layer comprise a first thickness on the first top surface and a second thickness on the second top surface, and the first thickness is larger than the second thickness.
15. The light-emitting device according to claim 14 , wherein the protective layer comprises SiO x , and the cap layer comprises SiN x .
16. The light-emitting device according to claim 13 , further comprising a reflective layer comprising a Distributed Bragg Reflector structure covering the protective layer.
17. The light-emitting device according to claim 16 , wherein the reflective layer comprise a first thickness on the first top surface and a second thickness on the second top surface, and the first thickness is larger than the second thickness.
18. The light-emitting device according to claim 13 , further comprising a compact layer formed between the substrate and the protective layer.
19. The light-emitting device according to claim 18 , wherein an interface of the compact layer contacting a sidewall of the semiconductor stack comprises a metal element and an oxygen.