Light-receiving device and method for manufacturing light-receiving device
A light-receiving device includes a light-receiving element in which a plurality of light-receiving portions are provided; and a glass cover that has a first surface and a second surface opposite to the first surface and that is fixed above the light-receiving element such that the second surface faces the light-receiving element. The glass cover includes a plurality of diffraction gratings provided in at least one of the first surface and an inside of the glass cover. Each of the plurality of diffraction gratings is configured to concentrate laser light for distance measurement on each of the plurality of light-receiving portions, the laser light for distance measurement incident on the first surface of the glass cover.
1. A method for manufacturing a light-receiving device, the method comprising:
a first step of preparing a light-receiving element in which a plurality of light-receiving portions are provided, and a glass cover having a first surface and a second surface opposite to the first surface;
a second step of disposing the glass cover above the light-receiving element such that the second surface faces the light-receiving element, after the first step; and
a third step of forming a plurality of light-concentrating elements in the glass cover by irradiating the glass cover with laser light for processing after the second step,
wherein in the third step, the plurality of light-concentrating elements are formed such that each of the plurality of light-concentrating elements concentrates laser light for distance measurement on each of the plurality of light-receiving portions, the laser light for distance measurement incident on the first surface of the glass cover.
2. The method for manufacturing a light-receiving device according to claim 1 ,
wherein in the second step, the glass cover is fixed above the light-receiving element such that the glass cover is separated from the light-receiving element.
3. The method for manufacturing a light-receiving device according to claim 1 ,
wherein in the second step, the glass cover is fixed on the light-receiving element such that the glass cover is in contact with the light-receiving element.
4. The method for manufacturing a light-receiving device according to claim 1 ,
wherein the glass cover includes a glass substrate and a first film provided on a surface on a first surface side of the glass substrate, and
in the third step, the plurality of light-concentrating elements are formed in the first film.
5. The method for manufacturing a light-receiving device according to claim 4 ,
wherein the plurality of light-concentrating elements are a plurality of diffraction gratings.
6. The method for manufacturing a light-receiving device according to claim 1 ,
wherein the glass cover includes a glass substrate, and
in the third step, the plurality of light-concentrating elements are formed in the glass substrate.
7. The method for manufacturing a light-receiving device according to claim 6 ,
wherein in the third step, the plurality of light-concentrating elements are formed in a surface on a first surface side of the glass substrate.
8. The method for manufacturing a light-receiving device according to claim 7 ,
wherein the plurality of light-concentrating elements are a plurality of diffraction gratings.
9. The method for manufacturing a light-receiving device according to claim 6 ,
wherein in the third step, the plurality of light-concentrating elements are formed inside the glass substrate.
10. The method for manufacturing a light-receiving device according to claim 9 ,
wherein the plurality of light-concentrating elements are a plurality of diffraction gratings, a plurality of lens surfaces, or a plurality of light-guiding portions.
11. The method for manufacturing a light-receiving device according to claim 1 ,
wherein the glass cover includes a glass substrate and a second film provided on a surface on a second surface side of the glass substrate, and
the second film has transmission properties for the laser light for distance measurement, and has light shielding properties for the laser light for processing.
12. The method for manufacturing a light-receiving device according to claim 1 ,
wherein the glass cover includes a glass substrate, and
the glass substrate has transmission properties for the laser light for distance measurement, and has light shielding properties for the laser light for processing.
13. The method for manufacturing a light-receiving device according to claim 1 ,
wherein in the first step, a semiconductor wafer including a plurality of portions that become the light-receiving elements, and a glass wafer including a plurality of portions that become the glass covers are prepared,
in the second step, the glass wafer is fixed on the semiconductor wafer, and
in the third step, the plurality of light-concentrating elements are formed for each of the portions, which become the light-receiving elements, by irradiating the glass wafer with the laser light for processing.
14. The method for manufacturing a light-receiving device according to claim 13 , further comprising:
a fourth step of cutting the semiconductor wafer and the glass wafer for each of the portions, which become the light-receiving elements, after the third step.