Transversely-excited film bulk acoustic resonator with low thermal impedance

1. A method of forming a filter device with low thermal impedance, the method comprising:

forming a bonding oxide (BOX) layer on a surface of a substrate;

bonding a piezoelectric layer to the BOX layer;

removing the piezoelectric layer and the BOX layer from at least a portion of the surface of the substrate;

forming a conductor pattern at the piezoelectric layer and that contacts the portion of the surface of the substrate where the piezoelectric layer and BOX layer were removed; and

forming a cavity, such that a portion of the piezoelectric layer forms a diaphragm over the cavity and the conductor pattern includes an interdigital transducer (IDT) with interleaved fingers disposed on the diaphragm over the cavity.

2. The method of claim 1 , wherein the cavity is formed in the surface of the substrate and before one of:

forming the BOX layer on a surface of a substrate;

bonding the piezoelectric layer to the BOX layer;

removing the piezoelectric layer and the BOX layer from at least the portion of the surface of the substrate; or

forming the conductor pattern at the piezoelectric layer.

3. The method of claim 1 , wherein the cavity is formed in the surface of the substrate after forming the conductor pattern at the piezoelectric layer.

4. The method of claim 1 , wherein removing the piezoelectric layer and the BOX layer includes:

patterning the bonded piezoelectric layer; and

etching the patterned piezoelectric layer to remove a predetermined area of the BOX layer and the piezoelectric layer from selected locations of the surface of the substrate to provide a predetermined amount in reduction of thermal resistance between the interleaved fingers and the substrate.

5. The method of claim 4 , further comprising attaching a second metal layer to:

the surface of the substrate where the piezoelectric layer and the BOX layer are removed;

a side surface of the BOX layer where the piezoelectric layer and the BOX layer are removed;

a side surface of the piezoelectric layer where the piezoelectric layer and the BOX layer are removed and part of a top surface of the piezoelectric layer; and

a side surface and part of a top surface of the IDT.

6. The method of claim 5 ,

wherein the interleaved fingers are two sets of fingers and the IDT further comprises a pair of busbars attached to the two sets of fingers, respectively,

wherein at least a part of the pair of busbars are over the substrate, and

wherein the second metal layer is attached to a top of the pair of busbars and not to a top of the interleaved fingers.

7. The method of claim 1 , wherein removing the piezoelectric layer and the BOX layer includes:

removing predetermined areas of the BOX layer and piezoelectric layer either before or after the IDT is formed; and

using the surface of the substrate as an etch stop.

8. The method of claim 1 ,

wherein the cavity has a perimeter; and

wherein the removing includes removing the BOX layer and piezoelectric layer from excess portions that extend a length and width of a perimeter of a piezoelectric material that spans the cavity and that extends between 2 and 25 percent past a length and width of the perimeter of the cavity.

9. The method of claim 1 , wherein the piezoelectric layer and the IDT are configured such that radio frequency signals applied to the IDT excite a primary shear acoustic mode in the diaphragm of the piezoelectric layer over the cavity, wherein a thickness of the diaphragm is selected to tune the primary shear acoustic modes in the piezoelectric layer.

10. A method of forming a filter device with low thermal impedance, the method comprising:

forming a bonding oxide (BOX) layer on a surface of a substrate;

thinning the BOX layer over at least a portion of the surface of the substrate to form a thinned BOX layer that provides lower thermal resistance between an interdigital transducer (IDT) and the substrate;

bonding a piezoelectric layer to the thinned BOX layer, the piezoelectric layer having a portion that forms a diaphragm over a cavity;

forming the IDT at the piezoelectric layer; and

forming the cavity through at least one of the BOX layer and the surface of the substrate,

wherein the IDT has interleaved fingers disposed on the diaphragm over the cavity.

11. The method of claim 10 , wherein the cavity is formed in the surface of the substrate before one of:

forming the BOX layer on a surface of the substrate;

thinning the BOX layer;

bonding the piezoelectric layer to the BOX layer; or

forming the IDT at the piezoelectric layer.

12. The method of claim 10 , wherein the cavity is formed in the surface of the substrate after forming the IDT at the piezoelectric layer.

13. The method of claim 10 , wherein thinning the BOX layer comprises polishing the formed BOX layer to a desired thickness of the thinned BOX layer.

14. The method of claim 13 , wherein the desired thickness of the thinned BOX layer is between 200 nm and 400 nm.

15. The method of claim 10 , further comprising forming the cavity by etching through openings in a frontside of the piezoelectric layer and the thinned BOX layer to the substrate to remove a portion of the substrate from below the diaphragm and the thinned BOX layer from the diaphragm over the cavity.

16. The method of claim 15 , wherein forming the openings includes forming thermal vias prior or during a frontside etching of the openings or etching of the cavity.

17. The method of claim 10 , further comprising forming thermal vias through the piezoelectric layer and the thinned BOX layer and into the substrate at selected locations of the surface of the substrate to provide a predetermined amount in reduction of thermal resistance between the IDT and the substrate.

18. The method of claim 17 , wherein the thermal vias are formed around a perimeter of and form an island of the BOX layer, the piezoelectric layer and the IDT.

19. The method of claim 10 , further comprising attaching a second metal layer to:

a top surface of the piezoelectric layer; and

a side surface and part of a top surface of the IDT.

20. The method of claim 19 ,

wherein the interleaved fingers are two sets of fingers and the IDT further comprising a pair of busbars attached to the two sets of fingers, respectively,

wherein at least a part of each of the pair of busbars are over the substrate, and

wherein the second metal layer is attached to a top of the pair of busbars and not to a top of the interleaved fingers.

21. The method of claim 10 , wherein the substrate is Si, the BOX layer is SiO2, the IDT is metal, an overlapping distance of the interleaved fingers defines an aperture of the filter device, and the piezoelectric layer comprises one of lithium niobate or lithium tantalate.

22. The method of claim 10 , wherein the piezoelectric plate and the IDT are configured such that radio frequency signals applied to the IDT excite a primary shear acoustic mode in the diaphragm over the cavity, wherein a thickness of the diaphragm is selected to tune the primary shear acoustic modes in the piezoelectric layer.