Integrated circuit package and method of forming same
Various embodiments of an integrated circuit package and a method of forming such package are disclosed. The package includes a substrate having a core layer disposed between a first dielectric layer and a second dielectric layer, a die disposed in a cavity of the core layer, and an encapsulant disposed in the cavity between the die and a sidewall of the cavity. The package further includes a first patterned conductive layer disposed within the first dielectric layer, a device disposed on an outer surface of the first dielectric layer such that the first patterned conductive layer is between the device and the core layer, a second patterned conductive layer disposed within the second dielectric layer, and a conductive pad disposed on an outer surface of the second dielectric layer such that the second patterned conductive layer is between the conductive pad and the core layer.
1. A method of forming an integrated circuit package, comprising:
disposing a cavity in a core layer;
disposing a carrier layer on the core layer over the cavity;
disposing a die within the cavity on the carrier layer;
disposing a first dielectric layer on the core layer over the cavity such that the core layer is between the first dielectric layer and the carrier layer, wherein the first dielectric layer comprises a first patterned conductive layer disposed between first and second sublayers of the first dielectric layer, wherein the first patterned conductive layer comprises a field plate that is spaced apart from the die;
removing the carrier layer from the core layer; and
disposing a second dielectric layer on the core layer such that the core layer is between the first and second dielectric layers, wherein the second dielectric layer comprises a second patterned conductive layer disposed between first and second sublayers of the second dielectric layer.
2. The method of claim 1 , wherein disposing the first dielectric layer on the core layer over the cavity comprises:
disposing the first sublayer on the core layer;
disposing the first patterned conductive layer on the first sublayer; and
disposing the second sublayer on the first patterned conductive layer and the first sublayer.
3. The method of claim 2 , wherein disposing the first dielectric layer on the core layer over the cavity further comprises disposing at least a portion of the first sublayer into the cavity between the die and a sidewall of the cavity.
4. The method of claim 1 , further comprising:
disposing a via through the first dielectric layer between an outer surface of the first dielectric layer and the die, wherein the die is electrically connected to the via; and
disposing a device on the outer surface of the first dielectric layer such that it is electrically connected to the die by the via.
5. The method of claim 4 , further comprising disposing a third patterned conductive layer on the outer surface of the first dielectric layer, wherein the device and the via are electrically connected to the third patterned conductive layer.
6. The method of claim 1 , further comprising:
disposing a second via through the second dielectric layer between an outer surface of the second dielectric layer and the die, wherein the die is electrically connected to the second via; and
disposing a conductive pad on the outer surface of the second dielectric layer such that it is electrically connected to the die by the second via.
7. The method of claim 1 , wherein disposing the second dielectric layer on the core layer over the cavity comprises:
disposing the first sublayer on the core layer;
disposing the second patterned conductive layer on the first sublayer; and
disposing the second sublayer on the second patterned conductive layer and the first sublayer.
8. The method of claim 1 , wherein disposing the cavity in the core layer comprises at least one of drilling, laser drilling, chemical etching, plasma etching, or stamping the cavity in the core layer.
9. The method of claim 1 , further comprising disposing a release layer on the core layer over the cavity prior to disposing the carrier layer on the core layer over the cavity, wherein the release layer is disposed between the core layer and the carrier layer.
10. The method of claim 1 , further comprising, prior to disposing the die within the cavity on the carrier layer, disposing a glass layer on the carrier layer such that the carrier layer is between the glass layer and the core layer.
11. The method of claim 2 , wherein disposing the first patterned conductive layer comprises:
disposing a continuous conductive layer on the first sublayer of the first dielectric layer; and
patterning the continuous conductive layer to provide the first patterned conductive layer.
12. The method of claim 7 , wherein disposing the second patterned conductive layer comprises:
disposing a continuous conductive layer on the first sublayer of the second dielectric layer; and
patterning the continuous conductive layer to provide the second patterned conductive layer.
13. The method of claim 1 , wherein disposing the first dielectric layer comprises laminating the first dielectric layer to the core layer over the cavity.
14. the method of claim 1 , wherein disposing the second dielectric layer comprises laminating the second dielectric layer to the core layer.
15. The method of claim 1 , wherein the die comprises a field termination structure disposed on an outer surface of the die that faces the field plate, wherein at least a portion of the field plate overlaps the field termination structure in a direction orthogonal to an outer surface of the first dielectric layer.
16. The method of claim 1 , wherein the die comprises a high voltage electrical component.
17. A method of forming an integrated circuit package, comprising:
disposing a cavity in a core layer;
disposing a carrier layer on the core layer over the cavity;
disposing a high voltage electrical component within the cavity on the carrier layer;
disposing a first dielectric layer on the core layer over the cavity such that the core layer is between the first dielectric layer and the carrier layer;
disposing a first patterned conductive layer within the first dielectric layer, wherein the first patterned conductive layer comprises a field plate that is spaced apart from the die;
removing the carrier layer from the core layer;
disposing a second dielectric layer on the core layer such that the core layer is between the first and second dielectric layers; and
disposing a second patterned conductive layer within the second dielectric layer.
18. The method of claim 17 , wherein disposing the first dielectric layer on the core layer over the cavity comprises:
disposing a first sublayer of the first dielectric layer on the core layer;
disposing the first patterned conductive layer on the first sublayer; and
disposing a second sublayer of the first dielectric layer on the first patterned conductive layer and the first sublayer.
19. The method of claim 18 , wherein disposing the first dielectric layer on the core layer over the cavity further comprises disposing at least a portion of the first sublayer into the cavity between the die and a sidewall of the cavity.
20. The method of claim 18 , wherein disposing the second dielectric layer on the core layer comprises:
disposing a first sublayer of the second dielectric layer on the core layer;
disposing the second patterned conductive layer on the first sublayer; and
disposing a second sublayer of the second dielectric layer on the second patterned conductive layer and the first sublayer.