Kit for cleaning agent and method for preparing cleaning agent
The present invention addresses the problem of providing a kit for a cleaning agent, which is used for the purpose of preparing a cleaning agent that maintains, even after long-term storage, adequate impurity removal performance from the surface of a semiconductor substrate that has been subjected to a CMP process. The present invention also addresses the problem of providing a method for preparing the above-described cleaning agent. A kit for a cleaning agent according to the present invention is a kit for preparing a cleaning agent which is used for cleaning of a semiconductor substrate that has been subjected to a CMP process, and which has a pH of from 7.5 to 13.0. This kit for a cleaning agent comprises a first liquid that is acidic and contains a compound represented by formula (1) and a second liquid that is alkaline and contains a basic compound; and an acidic compound is contained in at least one of the first liquid and the second liquid.
1. A kit for preparing a cleaning agent with a pH of 7.5 to 13.0 that is used in cleaning of a semiconductor substrate having undergone a chemical mechanical polishing process, the kit comprising:
a first liquid containing a compound represented by Formula (1), an acidic compound and water and showing acidic properties; and
a second liquid containing a basic compound and showing alkaline properties,
wherein the basic compound comprises a hydroxylamine compound, and
the basic compound further comprises at least one selected from the group consisting of a diamine compound, an amidine compound, an azole compound, a pyrazine compound, a pyrimidine compound, and a quaternary ammonium compound,
where R 1 to R 5 each independently represent a hydrogen atom, a hydroxyl group, a carboxyl group, or an alkoxycarbonyl group, and at least two of R 1 to R 5 represent a hydroxyl group, provided that a combination in which R 1 and R 5 each represent a hydroxyl group, a combination in which R 2 and R 4 each represent a hydroxyl group, and a combination in which R 3 and R 5 each represent a hydroxyl group are excluded.
2. The kit according to claim 1 ,
wherein the compound represented by Formula (1) includes at least one selected from the group consisting of pyrogallol, pyrocatechol, hydroquinone, dihydroxybenzoic acid, gallic acid, and gallic acid esters.
3. The kit according to claim 1 ,
wherein the compound represented by Formula (1) includes pyrogallol.
4. The kit according to claim 1 ,
wherein the acidic compound includes carboxylic acid.
5. The kit according to claim 4 ,
wherein the carboxylic acid has two or more carboxyl groups.
6. The kit according to claim 4 ,
wherein the carboxylic acid further has at least one hydroxyl group.
7. The kit according to claim 1 ,
wherein the basic compound comprises the hydroxylamine compound and further comprises at least one selected from the group consisting of a diamine compound and a quaternary ammonium compound.
8. The kit according to claim 1 ,
wherein the diamine compound is a compound represented by Formula (2):
where R 6 and R 7 each independently represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, or an aryl group having 6 to 10 carbon atoms, R 8 represents a hydrogen atom, a hydroxyl group, or an alkyl group having 1 to 4 carbon atoms that may have a hydroxyl group, R 9 and R 10 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, R 6 and R 7, R 7 and R 10, or R 8 and R 10 may be bonded together to form an alkylene group having 1 to 3 carbon atoms, m represents 0 or 1, and n represents an integer of 0 to 2.
9. The kit according to claim 1 ,
wherein the hydroxylamine compound is a compound represented by Formula (6) or its salt,
where R 23 represents an alkyl group having 1 to 6 carbon atoms, and R 24 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
10. The kit according to claim 1 ,
wherein the quaternary ammonium compound is at least one selected from the group consisting of tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, 2-hydroxyethyl trimethylammonium hydroxide, and bis (2-hydroxyethyl) dimethylammonium hydroxide.
11. The kit according to claim 1 ,
wherein the semiconductor substrate has either a copper wiring film or a copper alloy wiring film, and a cobalt-containing film.
12. The kit according to claim 11 ,
wherein the cobalt-containing film is a barrier metal of the copper wiring film or the copper alloy wiring film.
13. The kit according to claim 1 ,
wherein a pH of the first liquid is not more than 5.0.