Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters

1. A method of forming a radio frequency filter, comprising:

connecting a first sub-filter and a second sub-filter in parallel between a first port and a second port, wherein connecting each of the first and second sub-filters comprises:

bonding to a substrate a back surface of a piezoelectric plate having front and back surfaces, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate; and

forming a conductor pattern on the front surface, the conductor pattern including a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms, wherein

a thickness of the portion of the piezoelectric plate of the first sub-filter is different from a thickness of the portion of the piezoelectric plate of the second sub-filter, and

wherein the substrate of the first sub-filter is different than the substrate of the second sub-filter.

2. The method of claim 1 , wherein the piezoelectric plate of the first sub-filter is the same as the piezoelectric plate of the second sub-filter.

3. The method of claim 1 , wherein the piezoelectric plate of the first sub-filter is different than the piezoelectric plate of the second sub-filter.

4. The method of claim 1 , wherein:

the first and second portions and the first and second IDTs are configured such that radio frequency signals applied to the first and second IDTs excite primary shear acoustic modes in the first and second portions of the piezoelectric plates forming the plurality of diaphragms spanning the respective cavities in the different substrates; and

the thicknesses of the first and second portions are selected to tune the primary shear acoustic modes in the first and second portions.

5. The method of claim 1 , further comprising:

connecting a third sub-filter in parallel between the first port and the second port, wherein connecting the third sub-filter comprises:

bonding to a substrate a back surface of a piezoelectric plate having front and back surfaces, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate; and

forming a conductor pattern on the front surface, the conductor pattern including a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms, wherein

a thickness of the piezoelectric plate portion of the third sub-filter is different from a thickness of the piezoelectric plate portion of the first and portion of the second sub-filters.

6. The method of claim 5 , wherein the thickness of the piezoelectric plate portion of the first sub-filter is a thickness of between 720 nm and 740 nm extending between a front surface and a back surface of the piezoelectric plate portion of the first sub-filter; wherein the thickness of the piezoelectric plate portion of the second sub-filter is a thickness of between 752 nm and 772 nm extending between a front surface and a back surface of the piezoelectric plate portion of the second sub-filter; and wherein the thickness of the piezoelectric plate portion of the third sub-filter is a thickness of between 734 nm and 754 nm extending between a front surface and a back surface of the piezoelectric plate portion of the third sub-filter.

7. The method of claim 5 , wherein connecting each of the three sub-filters further comprises:

connecting three resonators in series between the first port and the second port; and

connecting two coupling capacitors between ground and a respective node between two of the resonators of the sub-filter.

8. The method of claim 7 , further comprising:

connecting a first low-edge resonator, from the plurality of resonators, between the first port and ground;

connecting a second low-edge resonator, from the plurality of resonators, between the second port and ground;

wherein respective resonance frequencies of the first and second low-edge resonators are adjacent to a lower edge of a passband of the filter.

9. The method of claim 8 , wherein:

two of the resonators of each sub-filter are symmetrical in response;

the low-edge resonators have the same response;

each of the coupling capacitors is a metal-insulator-metal capacitor; and

the sub-filters and the low-edge resonators form a matrix filter having a contiguous passband formed by passbands of the sub-filters; and a center frequency of a passband of each sub-filter is different from a center frequency of any other sub-filter.

10. The method of claim 5 , wherein:

the thickness of the piezoelectric plate portion of the first sub-filter is thinner than the thickness of the piezoelectric plate portion of the second sub-filter; and

the thickness of the piezoelectric plate portion of the second sub-filter is thinner than the thickness of the piezoelectric plate portion of the third sub-filter.

11. A method of forming a radio frequency filter, comprising:

connecting a first sub-filter and a second sub-filter in parallel between a first port and a second port, wherein connecting the first sub-filter comprises:

bonding to a first substrate a first back surface of a first piezoelectric plate having first front and back surfaces, first portions of the first piezoelectric plate forming a first plurality of diaphragms spanning respective first cavities in the first substrate; and

forming a first conductor pattern on the first front surface, the first conductor pattern including a first plurality of interdigital transducers (IDTs) of a first respective plurality of resonators, first interleaved fingers of each IDT disposed on a first respective diaphragm of the first plurality of diaphragms,

wherein connecting the second sub-filters comprises:

bonding to a second substrate a second back surface of a second piezoelectric plate having second front and back surfaces, second portions of the second piezoelectric plate forming a second plurality of diaphragms spanning respective second cavities in the second substrate; and

forming a second conductor pattern on the second front surface, the second conductor pattern including a second plurality of interdigital transducers (IDTs) of a second respective plurality of resonators, second interleaved fingers of each IDT disposed on a second respective diaphragm of the second plurality of diaphragms,

wherein a thickness of the first piezoelectric plate first portions are thicker than a thickness of the second piezoelectric plate second portions, and

wherein the first substrates is different than the second substrate.

12. The method of claim 11 , wherein the first piezoelectric plate is the same as the second piezoelectric plate.

13. The method of claim 11 , wherein the first piezoelectric plate is different than the second piezoelectric plate.

14. The method of claim 11 , wherein:

the first and second portions and the first and second IDTs are configured such that radio frequency signals applied to the first and second IDTs excite primary shear acoustic modes in the first and second portions of the first and second piezoelectric plate portions forming the first and second plurality of diaphragms spanning the first and second respective cavities in the first and second different substrates; and

the thicknesses of the first and second portions are selected to tune the primary shear acoustic modes in the first and second portions.

15. The method of claim 11 ,

wherein connecting each of the first and second sub-filters further comprises:

connecting three resonators connected in series between the first port and the second port;

connecting each of two coupling capacitors between ground and a respective node between two of the resonators of the sub-filter;

and further comprising:

connecting a first low-edge resonator, from the plurality of resonators, between the first port and ground;

connecting a second low-edge resonator, from the plurality of resonators, between the second port and ground;

wherein respective resonance frequencies of the first and second low-edge resonators are adjacent to a lower edge of a passband of the filter.

16. A method of forming radio frequency filter, comprising:

connecting a first sub-filter, a second and a third sub-filter in parallel between a first port and a second port, wherein connecting each of the first, second and third sub-filters comprises:

bonding to a substrate a back surface of a piezoelectric plate having front and back surfaces, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate; and

forming a conductor pattern on the front surface, the conductor pattern including a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms, wherein

a thickness of the piezoelectric plate portion of the first sub-filter is different from a thickness of the piezoelectric plate portion of the second and third sub-filter,

a thickness of the piezoelectric plate portion of the second sub-filter is different from a thickness of the piezoelectric plate portion of the third sub-filter,

wherein the substrate of the first sub-filter different than the substrate of the second sub-filter and the third sub-filter, and

the substrate of the second sub-filter is different than the substrate of the third sub-filter.

17. The method of claim 16 , wherein the piezoelectric plate of the first sub-filter different than the piezoelectric plate of the second sub-filter and the third sub-filter, and wherein

the piezoelectric plate of the second sub-filter is different than the piezoelectric plate of the third sub-filter.

18. The method of claim 16 , wherein:

the piezoelectric plate portions and the IDTs of the first, second and third sub-filter are configured such that radio frequency signals applied to the IDTs excite primary shear acoustic modes in the portions of the piezoelectric plate portions forming the plurality of diaphragms spanning the respective cavities in the different substrates; and

the thicknesses of the piezoelectric plate portions of the first, second and third sub-filters are selected to tune the primary shear acoustic modes in the portions of the piezoelectric plates.