Monolithic multi-I region diode limiters
A number of monolithic diode limiter semiconductor structures are described. The diode limiters can include a hybrid arrangement of diodes with different intrinsic regions, all formed over the same semiconductor substrate. In one example, a method of manufacture of a monolithic diode limiter includes providing an N-type semiconductor substrate, providing an intrinsic layer on the N-type semiconductor substrate, implanting a first P-type region to a first depth into the intrinsic layer, implanting a second P-type region to a second depth into the intrinsic layer, and forming at least one passive circuit element over the intrinsic layer. The method can also include forming an insulating layer on the intrinsic layer, forming a first opening in the insulating layer, and forming a second opening in the insulating layer. The method can also include implanting the first P-type region through the first opening and implanting the second P-type region through the second opening.
1. A method of manufacture of a monolithic diode limiter semiconductor structure, comprising:
providing an N-type semiconductor substrate;
providing an intrinsic layer on the N-type semiconductor substrate;
implanting a first P-type region to a first depth into the intrinsic layer to form a first PIN diode comprising a first effective intrinsic region of a first thickness;
implanting a second P-type region to a second depth into the intrinsic layer to form a second PIN diode comprising a second effective intrinsic region of a second thickness; and
forming at least one blocking capacitor and at least one inductor over the intrinsic layer.
2. The method of manufacture according to claim 1 , wherein the first thickness is greater than the second thickness.
3. The method of manufacture according to claim 1 , wherein the at least one blocking capacitor and the at least one inductor are formed over the intrinsic layer as part of the monolithic diode limiter semiconductor structure.
4. The method of manufacture according to claim 1 , wherein the diode limiter comprises a multistage hybrid diode limiter of at least two stages.
5. The method of manufacture according to claim 1 , further comprising forming at least one transmission line, wherein the at least one blocking capacitor, the at least one inductor, and the at least one transmission line are formed over the intrinsic layer as part of the monolithic diode limiter semiconductor structure.
6. The method of manufacture according to claim 1 , wherein:
a cathode of the first PIN diode is electrically coupled to ground in the monolithic diode limiter semiconductor structure; and
a cathode of the second PIN diode is electrically coupled to ground in the monolithic diode limiter semiconductor structure.
7. The method of manufacture according to claim 1 , further comprising forming at least one transmission line, wherein the at least one blocking capacitor, the at least one inductor, and the at least one transmission line are formed over the intrinsic layer as part of the monolithic diode limiter semiconductor structure.
8. The method of manufacture according to claim 1 , further comprising:
forming an insulating layer on the intrinsic layer;
forming a first opening in the insulating layer, wherein implanting the first P-type region comprises implanting the first P-type region through the first opening; and
forming a second opening in the insulating layer, wherein implanting the second P-type region comprises implanting the second P-type region through the second opening.
9. The method of manufacture according to claim 8 , wherein a first width of the first opening is different than a second width of the second opening.
10. The method of manufacture according to claim 9 , further comprising forming a third opening in the insulating layer.
11. The method of manufacture according to claim 10 , wherein a third width of the third opening is different than the second width of the second opening.
12. The method of manufacture according to claim 10 , further comprising implanting a third P-type region through the third opening.
13. The method of manufacture according to claim 10 , further comprising implanting a third P-type region through the third opening to a third depth into the intrinsic layer to form a third PIN diode comprising a third effective intrinsic region of a third thickness.
14. The method of manufacture according to claim 13 , wherein:
the first thickness is greater than the second thickness; and
the second thickness is greater than the third thickness.
15. A method of manufacture of a monolithic diode limiter semiconductor structure, comprising:
providing an N-type semiconductor substrate;
providing an intrinsic layer on the N-type semiconductor substrate;
implanting a first P-type region to a first depth into the intrinsic layer;
implanting a second P-type region to a second depth into the intrinsic layer; and
forming at least one passive circuit element over the intrinsic layer.
16. The method of manufacture according to claim 15 , wherein the first depth is greater than the second depth.
17. The method of manufacture according to claim 15 , further comprising:
forming an insulating layer on the intrinsic layer;
forming a first opening in the insulating layer, wherein implanting the first P-type region comprises implanting the first P-type region through the first opening; and
forming a second opening in the insulating layer, wherein implanting the second P-type region comprises implanting the second P-type region through the second opening.
18. The method of manufacture according to claim 17 , wherein a first width of the first opening is different than a second width of the second opening.
19. The method of manufacture according to claim 17 , further comprising forming a third opening in the insulating layer.
20. The method of manufacture according to claim 19 , further comprising implanting a third P-type region through the third opening to a third depth into the intrinsic layer.