Diamond Coated Electrodes for Electrochemical Processing and Applications Thereof
An electrode for an ozone generator or chlorine generator includes an electrically conductive substrate, a doped-Si layer disposed over the conductive substrate, and a boron-doped diamond (BDD) layer disposed over the doped-silicon layer. The doped-silicon layer defines a discrete architecture that maintains adhesion throughout a high temperature CVD boron-doped diamond process. Another electrode having a PVD nitrogen-doped diamond (ta-C:N) layer disposed over a conductive substrate is also provided.
1 .- 7 . (canceled)
8 . An electrode for an ozone generator or chlorine generator, the electrode comprising:
an electrically conductive substrate;
a physical vapor deposited nitrogen-doped diamond (ta-C:N) layer disposed over the electrically conductive substrate.
9 . The electrode of claim 8 wherein the substrate is a doped-silicon substrate or doped-silicon coating on an electrically conductive substrate
10 . The electrode of claim 8 wherein the ta-C:N layer has a thickness from 10 nm to 5 microns.
11 . The electrode of claim 8 wherein the thickness is achieved by depositing the ta-C:N in a discrete architecture.
12 . The electrode of claim 8 wherein the electrically conductive substrate can also act as an electrical contact between a power source and the ta-C:N catalyst.