Methods of fabricating microfluidic valves and systems
The disclosed microfluidic valves may include a valve body having at least one cavity therein, a gate transmission element separating the cavity into an input gate terminal and an output gate terminal, a gate port configured to convey drive fluid into the input gate terminal, and a fluid channel. The gate transmission element may include a flexible membrane and a plunger coupled to the flexible membrane. The gate transmission element may be configured to move within the cavity to inhibit a subject fluid flow from an inlet port to an outlet port of the fluid channel upon pressurization of the input gate terminal, and to allow subject fluid flow from the inlet port to the outlet port upon depressurization of the input gate terminal. Various other related systems and methods are also disclosed.
1. A method of fabricating a microfluidic system, the method comprising:
forming a microfluidic valve, comprising:
removing material from a drive body portion to form an input gate terminal and a gate port into the input gate terminal;
forming a flexible membrane on a gate body portion;
removing material from the gate body portion to form an output gate terminal and to define a plunger within the output gate terminal, the plunger being bonded to the flexible membrane;
forming a flexible bubble on a fluid channel body portion;
removing material from the fluid channel body portion to form an inlet port and an outlet port in fluid communication with an interior of the flexible bubble;
coupling the drive body portion to the gate body portion and separating the input gate terminal from the output gate terminal with the flexible membrane; and
coupling the gate body portion to the fluid channel body portion;
operably coupling a drive fluid source to the gate port;
operably coupling a subject fluid source to the inlet port; and
operably coupling a fluid-driven mechanism to the outlet port to be operated by subject fluid when the microfluidic valve is in an open state.
2. The method of claim 1 , wherein:
forming the microfluidic valve comprises simultaneously forming a plurality of microfluidic valves;
coupling the drive body portion to the gate body portion comprises bonding a drive body substrate material including a plurality of drive body portions to a gate body substrate material including a plurality of gate body portions; and
coupling the gate body portion to the fluid channel body portion comprises bonding the gate body substrate material including the plurality of gate body portions to a fluid channel body substrate material including a plurality of gluid channel body portions.
3. The method of claim 1 , wherein each of removing material from the drive body portion, removing material from the gate body portion, and removing material from the fluid channel body portion comprises performing a photolithography operation to selectively remove the material.
4. The method of claim 1 , wherein forming the flexible bubble on the fluid channel body portion comprises:
forming a block on the fluid channel body portion;
forming a flexible material over the block and the fluid channel body portion; and
removing the block while leaving the flexible material to remain on the fluid channel body portion.
5. The method of claim 4 , wherein removing the block comprises removing a material of the block through at least one of the inlet port or the outlet port using a selective material removal process.
6. The method of claim 4 , wherein each of forming the flexible material over the block and the fluid channel body portion and forming the flexible membrane on the gate body portion comprises forming an elastomeric material.
7. The method of claim 1 , wherein operably coupling the fluid-driven mechanism to the outlet port comprises operably coupling, to the outlet port, at least one of:
a microelectromechanical device;
an expansible cavity;
a piston system; or
a haptic feedback device.
8. The method of claim 1 , wherein forming the flexible bubble on the fluid channel body portion comprises forming the flexible bubble to have a surface area that is smaller than a surface area of the flexible membrane separating the input gate terminal and the output gate terminal.
9. The method of claim 1 , wherein coupling the gate body portion to the fluid channel body portion comprises abutting the plunger against the flexible bubble.