IP Library Granted Patent US 12,690,278
Granted Patent B2
US 12,690,278 · App. 17/428,725 · Granted Jul 21, 2026

Metal oxynitride back contact layers for photovoltaic devices

Inventors: Changming Jin (Sylvania, OH); Vijay Karthik Sankar (Dearborn, MI)
Assignee: First Solar, Inc.
H10F19/908H10F10/162H10F19/906
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,690,278
App. No.
17/428,725
Filed
Aug 5, 2021
Granted
Jul 21, 2026
Kind
B2
Art Unit
1726
USPC
136/243
Abstract

According to the embodiments provided herein, back contacts for photovoltaic devices can include one or more metal oxynitride layers.

Claims (23)

1 . A photovoltaic device comprising:

a substrate;

a front contact over the substrate;

an absorber layer over the front contact;

a conducting layer having a surface formed by a layer comprising aluminum; and

a back contact between the absorber layer and the conducting layer, the back contact having a first surface, a second surface, and a thickness defined between the first surface of the back contact and the second surface of the back contact, wherein:

the thickness of the back contact is in a range of about 10 nm to about 150 nm;

the first surface of the back contact is in contact with the absorber layer;

the second surface of the back contact is in contact with the surface of the conducting layer;

the back contact comprises: a first layer comprising zinc and tellurium; a second layer comprising zinc and tellurium; and a layer comprising a metal oxynitride material; wherein:

the metal of the metal oxynitride material is at least one of titanium or tungsten;

the first layer comprises a first dopant; and

the second layer comprises a second dopant.

2 . The photovoltaic device of claim 1 , wherein the metal oxynitride material is composed of about 50% or less oxygen or nitrogen.

3 . The photovoltaic device of claim 1 , wherein:

the first dopant includes a copper dopant, a silver dopant or both; and

the second dopant is a group I dopant.

4 . The photovoltaic device of claim 1 , further comprising a high purity metal layer, wherein:

the high-purity metal layer consists essentially of: titanium, tungsten, tantalum, zirconium, or combinations thereof;

the high-purity metal layer has a thickness between about 1 nm to about 5 nm; and

the high purity metal layer is between the layer comprising the metal oxynitride material and the second layer of the back contact.

5 . The photovoltaic device of claim 4 , wherein the metal oxynitride material includes a thickness in a ratio of at least about 2:1 in comparison to the high purity metal layer.

6 . The photovoltaic device of claim 1 , wherein the absorber layer includes a group I dopant, a group V dopant or a combination thereof.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Feb 13, 2026
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 074858/0364 →
SECURITY INTEREST Recorded Jul 10, 2023
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 064237/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 20, 2023
From: JIN, CHANGMING; SANKAR, VIJAY KARTHIK
To: FIRST SOLAR INC.
Reel/Frame 063391/0579 →
Continuity (2)
Provisional Application 62801965 · Feb 6, 2019
Related Publication 20220102567A1 · Mar 31, 2022
References Cited (69)
US 7923354B2 · Choi et al. · 2011 [cited by applicant]
US 8409455B1 · Oetting · 2013 [cited by applicant]
US 9105799B2 · Cheng et al. · 2015 [cited by applicant]
US 9147778B2 · Zafar et al. · 2015 [cited by applicant]
US 9178097B2 · Liang et al. · 2015 [cited by applicant]
US 9412886B2 · Addepalli et al. · 2016 [cited by applicant]
US 9459386B2 · Hebrink et al. · 2016 [cited by applicant]
US 9461186B2 · Jayaraman et al. · 2016 [cited by applicant]
US 9508874B2 · Buller et al. · 2016 [cited by applicant]
US 9871154B2 · Duggal et al. · 2018 [cited by applicant]
US 10026861B2 · Sankin et al. · 2018 [cited by applicant]
US 10141463B2 · Korevaar et al. · 2018 [cited by applicant]
US 10243092B2 · Damjanovic et al. · 2019 [cited by applicant]
US 10529883B2 · Damjanovic et al. · 2020 [cited by applicant]
US 10861994B2 · Abken et al. · 2020 [cited by applicant]
US 10896991B2 · Jin et al. · 2021 [cited by applicant]
US 11164989B2 · Andreini et al. · 2021 [cited by applicant]
US 11450778B2 · Ring et al. · 2022 [cited by applicant]
US 11695085B2 · Jayamaha et al. · 2023 [cited by applicant]
US 11784278B2 · Andreini et al. · 2023 [cited by applicant]
US 11876140B2 · Blaydes et al. · 2024 [cited by applicant]
US 20040063320A1 · Hollars · 2004 [cited by applicant]
US 20040144419A1 · Fix et al. · 2004 [cited by applicant]
US 20080280030A1 · Van Duren et al. · 2008 [cited by applicant]
US 20090020150A1 · Atwater et al. · 2009 [cited by applicant]
US 20110146784A1 · Addepalli et al. · 2011 [cited by applicant]
US 20110151173A1 · Ramadas et al. · 2011 [cited by applicant]
US 20110247687A1 · Zhang et al. · 2011 [cited by applicant]
US 20120156828A1 · Peng et al. · 2012 [cited by applicant]
US 20120164434A1 · Ramadas et al. · 2012 [cited by applicant]
US 20120258294A1 · Leyder et al. · 2012 [cited by applicant]
US 20140060608A1 · Choi · 2014 [cited by examiner]
US 20140261667A1 · Buller et al. · 2014 [cited by applicant]
US 20140284750A1 · Yu et al. · 2014 [cited by applicant]
US 20140338741A1 · Palm · 2014 [cited by examiner]
US 20150380601A1 · Zafar et al. · 2015 [cited by applicant]
US 20160380123A1 · Woods · 2016 [cited by examiner]
US 20170170353A1 · Jin · 2017 [cited by examiner]
US 20190148571A1 · Jayamaha et al. · 2019 [cited by applicant]
US 20190198256A1 · Hayakawa et al. · 2019 [cited by applicant]
US 20190296174A1 · Gloeckler et al. · 2019 [cited by applicant]
US 20200066928A1 · Buller et al. · 2020 [cited by applicant]
US 20210288204A1 · Eaglesham · 2021 [cited by examiner]
US 20210376177A1 · Chen et al. · 2021 [cited by applicant]
EP 2800144A1 · 2014 [cited by applicant]
JP 2009542008A · 2009 [cited by applicant]
JP 2010533985A1 · 2010 [cited by applicant]
JP 2011515852A · 2011 [cited by applicant]
JP 2016517182A · 2016 [cited by applicant]
JP 2016517183A · 2016 [cited by applicant]
WO 2009117072A1 · 2009 [cited by applicant]
WO 2013062825A1 · 2013 [cited by applicant]
WO 2014177620A1 · 2014 [cited by applicant]
WO 2014177621A1 · 2014 [cited by applicant]
WO 2018056295A1 · 2018 [cited by applicant]
WO 2018071509A1 · 2018 [cited by applicant]
WO 2018157106A1 · 2018 [cited by applicant]
Examination report, dated Apr. 10, 2023, Indian Patent Application 202117034554. [cited by applicant]
PCT International Search Report and Written Opinion, dated May 27, 2020, Application No. PCT/US2020/016944. [cited by applicant]
Viswanathan, “Study of Cu Free Back Contacts to Thin Film CdTe Solar Cells,” dissertation, Dept. of Electrical Engineering, University of South Florida, Feb. 2004. [cited by applicant]
Potamialis, “Copper Free Back Contacts for CdTe Solar Cells” dissertation, First Year Report, Loughborough University, Sep. 2015. [cited by applicant]
Japanese Notification of Reasons for Rejection, dated Dec. 21, 2021, Application No. 2021-546240. [cited by applicant]
Japanese Office Action, Application No. 2022-082736, dated Jan. 4, 2024. [cited by applicant]
Extended European Search Report, dated Aug. 9, 2024, application No. 24170320.6. [cited by applicant]
Drayton et al., “Molybdenum oxide and molybdenum oxide-nitride back contacts for CdTe solar cells,” Journal of Vacuum Science, American Institute of Physics, (2015), vol. 33, No. 4, p. 041201-1-041201--7. [cited by applicant]
Feng et al., “Preparation and characterization of ZnTe as an interlayer for CdS/CdTe substrate thin film solar cells on flexible substrates,” Thin Solid Films 535, (2013), pp. 202-205. [cited by applicant]
Guntur et al., “Molybdenum Nitride Films in the Back Contact Structure of Flexible Substrate CdTe Solar Cells,” Thesis, College of Engineering, University of South Florida, (2011), 85 pages. [cited by applicant]
Kindvall et al., “Molybdenum Oxide and Molybdenum Nitride Back Contacts for Thin-Film CdTe Solar Cells,” IEEE 44th Photovoltaic Specialist Conference, (2017), pp. 785-790. [cited by applicant]
Japanese Notification of Reason(s) for Rejection, Application No. 2022-082736, dated Aug. 30, 2024. [cited by applicant]